A System Built for Both Deterministic Transfer Processes and Contact Photolithography Article Swipe
Huandong Chen
,
Jayakanth Ravichandran
·
YOU?
·
· 2024
· Open Access
·
· DOI: https://doi.org/10.1002/adem.202401228
YOU?
·
· 2024
· Open Access
·
· DOI: https://doi.org/10.1002/adem.202401228
A home‐built compact system that functions as both a transfer stage for deterministic transfer processes and a mask aligner for contact photolithography, is constructed. The precision translation sample stage and optical microscope are shared between the two modes. In the transfer mode, assisted by either an adhesive or a heating element, the setup has been used to deterministically transfer freestanding semiconductors, 2D materials, and van der Waals electrodes. When configured in photolithography mode, the proposed instrument has been employed to fabricate various microscale patterns and devices, with minimum feature sizes of 1–2 μm achieved. The prototype instrument provides a feasible solution for performing high‐quality deterministic transfer and photolithography processes on one single tool in‐house.
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Concepts
Metadata
- Type
- preprint
- Language
- en
- Landing Page
- https://doi.org/10.1002/adem.202401228
- OA Status
- green
- Cited By
- 4
- References
- 30
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4395065063
All OpenAlex metadata
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- OpenAlex ID
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https://openalex.org/W4395065063Canonical identifier for this work in OpenAlex
- DOI
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https://doi.org/10.1002/adem.202401228Digital Object Identifier
- Title
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A System Built for Both Deterministic Transfer Processes and Contact PhotolithographyWork title
- Type
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preprintOpenAlex work type
- Language
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enPrimary language
- Publication year
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2024Year of publication
- Publication date
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2024-06-28Full publication date if available
- Authors
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Huandong Chen, Jayakanth RavichandranList of authors in order
- Landing page
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https://doi.org/10.1002/adem.202401228Publisher landing page
- Open access
-
YesWhether a free full text is available
- OA status
-
greenOpen access status per OpenAlex
- OA URL
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https://arxiv.org/pdf/2404.13471Direct OA link when available
- Concepts
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Photolithography, Computer science, Transfer (computing), Nanotechnology, Engineering drawing, Engineering, Materials science, Operating systemTop concepts (fields/topics) attached by OpenAlex
- Cited by
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4Total citation count in OpenAlex
- Citations by year (recent)
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2025: 4Per-year citation counts (last 5 years)
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30Number of works referenced by this work
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10Other works algorithmically related by OpenAlex
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