A Theoretical Study on Static Gas Pressure Measurement via Circular Non-Touch Mode Capacitive Pressure Sensor Article Swipe
Ji Wu
,
Xiao‐Ting He
,
Jun‐Yi Sun
·
YOU?
·
· 2024
· Open Access
·
· DOI: https://doi.org/10.3390/s24165314
YOU?
·
· 2024
· Open Access
·
· DOI: https://doi.org/10.3390/s24165314
A circular non-touch mode capacitive pressure sensor can operate in both transverse and normal uniform loading modes, but the elastic behavior of its movable electrode plate is different under the two different loading modes, making its input–output analytical relationships between pressure and capacitance different. This suggests that when such a sensor operates, respectively, in transverse and normal uniform loading modes, the theory of its numerical design and calibration is different, in other words, the theory for the transverse uniform loading mode (available in the literature) cannot be used as the theory for the normal uniform loading mode (not yet available in the literature). In this paper, a circular non-touch mode capacitive pressure sensor operating in normal uniform loading mode is considered. The elastic behavior of the movable electrode plate of the sensor under normal uniform loading is analytically solved with the improved governing equations, and the improved analytical solution obtained can be used to mathematically describe the movable electrode plate with larger elastic deflections, in comparison with the existing two analytical solutions in the literature. This provides a larger technical space for developing the circular non-touch mode capacitive pressure sensors used for measuring the static gas pressure (belonging to normal uniform loading).
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Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.3390/s24165314
- OA Status
- gold
- Cited By
- 1
- References
- 45
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4401639934
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W4401639934Canonical identifier for this work in OpenAlex
- DOI
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https://doi.org/10.3390/s24165314Digital Object Identifier
- Title
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A Theoretical Study on Static Gas Pressure Measurement via Circular Non-Touch Mode Capacitive Pressure SensorWork title
- Type
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articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
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2024Year of publication
- Publication date
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2024-08-16Full publication date if available
- Authors
-
Ji Wu, Xiao‐Ting He, Jun‐Yi SunList of authors in order
- Landing page
-
https://doi.org/10.3390/s24165314Publisher landing page
- Open access
-
YesWhether a free full text is available
- OA status
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goldOpen access status per OpenAlex
- OA URL
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https://doi.org/10.3390/s24165314Direct OA link when available
- Concepts
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Capacitive sensing, Pressure sensor, Acoustics, Mode (computer interface), Pressure measurement, Materials science, Engineering, Electrical engineering, Electronic engineering, Optoelectronics, Mechanical engineering, Computer science, Physics, Operating systemTop concepts (fields/topics) attached by OpenAlex
- Cited by
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1Total citation count in OpenAlex
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2024: 1Per-year citation counts (last 5 years)
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45Number of works referenced by this work
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10Other works algorithmically related by OpenAlex
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