Advanced Microelectronics Metrology Workshop Article Swipe
Chang‐Yong Nam
,
Yong S. Chu
,
Satyavolu S. Papa Rao
,
G. Carini
·
YOU?
·
· 2022
· Open Access
·
· DOI: https://doi.org/10.1080/08940886.2022.2135946
YOU?
·
· 2022
· Open Access
·
· DOI: https://doi.org/10.1080/08940886.2022.2135946
Related Topics
Concepts
Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.1080/08940886.2022.2135946
- OA Status
- hybrid
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4309089193
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
-
https://openalex.org/W4309089193Canonical identifier for this work in OpenAlex
- DOI
-
https://doi.org/10.1080/08940886.2022.2135946Digital Object Identifier
- Title
-
Advanced Microelectronics Metrology WorkshopWork title
- Type
-
articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
-
2022Year of publication
- Publication date
-
2022-09-03Full publication date if available
- Authors
-
Chang‐Yong Nam, Yong S. Chu, Satyavolu S. Papa Rao, G. CariniList of authors in order
- Landing page
-
https://doi.org/10.1080/08940886.2022.2135946Publisher landing page
- Open access
-
YesWhether a free full text is available
- OA status
-
hybridOpen access status per OpenAlex
- OA URL
-
https://doi.org/10.1080/08940886.2022.2135946Direct OA link when available
- Concepts
-
Microelectronics, Metrology, Systems engineering, Engineering, Computer science, Physics, Electrical engineering, OpticsTop concepts (fields/topics) attached by OpenAlex
- Cited by
-
0Total citation count in OpenAlex
- Related works (count)
-
10Other works algorithmically related by OpenAlex
Full payload
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