AlGaN/GaN pressure sensor with a Wheatstone bridge structure Article Swipe
Xin Tan
,
Yuanjie Lv
,
Xinyu Zhou
,
Y. G. Wang
,
Xubo Song
,
G. D. Gu
,
Peng Ji
,
Xuelin Yang
,
Bo Shen
,
Zhihong Feng
,
Shujun Cai
·
YOU?
·
· 2018
· Open Access
·
· DOI: https://doi.org/10.1063/1.4996257
YOU?
·
· 2018
· Open Access
·
· DOI: https://doi.org/10.1063/1.4996257
In this work, a Wheatstone bridge-type pressure sensor based on AlGaN/GaN heterostructure was fabricated for the first time. The pressure sensor consisted of four gateless high electron mobility transistors (HEMTs) on a 585 μm depth circular membrane, in which 15-μm-thick silicon substrate was left. Direct voltage readout was realized in the AlGaN/GaN pressure sensor, which exhibited a non-linearity of 0.6% with a sensitivity of 1.25 μV/kPa/V over a wide pressure range from 0.1 MPa to 5 MPa. Because of the in-plane isotropic properties, the working mechanism in the AlGaN/GaN pressure sensor is found to be quite different from the silicon-based sensor. Although the resistances of the four gateless HEMTs all increased with enlarging pressure, the changes of neighboring resistors varied with alignments under the piezoelectric effects. Finally, voltage linear readout was realized by the differential operation of Wheatstone bridge circuit.
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Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.1063/1.4996257
- https://aip.scitation.org/doi/pdf/10.1063/1.4996257
- OA Status
- gold
- Cited By
- 12
- References
- 16
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W2885359323
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W2885359323Canonical identifier for this work in OpenAlex
- DOI
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https://doi.org/10.1063/1.4996257Digital Object Identifier
- Title
-
AlGaN/GaN pressure sensor with a Wheatstone bridge structureWork title
- Type
-
articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
-
2018Year of publication
- Publication date
-
2018-08-01Full publication date if available
- Authors
-
Xin Tan, Yuanjie Lv, Xinyu Zhou, Y. G. Wang, Xubo Song, G. D. Gu, Peng Ji, Xuelin Yang, Bo Shen, Zhihong Feng, Shujun CaiList of authors in order
- Landing page
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https://doi.org/10.1063/1.4996257Publisher landing page
- PDF URL
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https://aip.scitation.org/doi/pdf/10.1063/1.4996257Direct link to full text PDF
- Open access
-
YesWhether a free full text is available
- OA status
-
goldOpen access status per OpenAlex
- OA URL
-
https://aip.scitation.org/doi/pdf/10.1063/1.4996257Direct OA link when available
- Concepts
-
Wheatstone bridge, Materials science, Pressure sensor, Optoelectronics, Linearity, Resistor, Silicon, Voltage, Heterojunction, Piezoelectricity, Isotropy, Substrate (aquarium), Electrical engineering, Composite material, Optics, Physics, Geology, Engineering, Oceanography, ThermodynamicsTop concepts (fields/topics) attached by OpenAlex
- Cited by
-
12Total citation count in OpenAlex
- Citations by year (recent)
-
2025: 2, 2022: 2, 2021: 5, 2020: 1, 2019: 2Per-year citation counts (last 5 years)
- References (count)
-
16Number of works referenced by this work
- Related works (count)
-
10Other works algorithmically related by OpenAlex
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