Aligned Stacking of Nanopatterned 2D Materials for High-Resolution 3D Device Fabrication Article Swipe
Jonas Haas
,
Finn Ulrich
,
Christoph K. Hofer
,
Xiao Wang
,
Kai Braun
,
Jannik C. Meyer
·
YOU?
·
· 2022
· Open Access
·
· DOI: https://doi.org/10.1021/acsnano.1c09122
YOU?
·
· 2022
· Open Access
·
· DOI: https://doi.org/10.1021/acsnano.1c09122
Two-dimensional materials can be combined by placing individual layers on top of each other, so that they are bound only by their van der Waals interaction. The sequence of layers can be chosen arbitrarily, enabling an essentially atomic-level control of the material and thereby a wide choice of properties along one dimension. However, simultaneous control over the structure in the in-plane directions is so far still rather limited. Here, we combine spatially controlled modifications of 2D materials, using focused electron irradiation or electron beam induced etching, with the layer-by-layer assembly of van der Waals heterostructures. The presented assembly process makes it possible to structure each layer with an arbitrary pattern prior to the assembly into the heterostructure. Moreover, it enables a stacking of the layers with accurate lateral alignment, with an accuracy of currently 10 nm, under observation in an electron microscope. Together, this enables the fabrication of almost arbitrary 3D structures with highest spatial resolution.
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Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.1021/acsnano.1c09122
- OA Status
- green
- Cited By
- 18
- References
- 73
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4210512467
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W4210512467Canonical identifier for this work in OpenAlex
- DOI
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https://doi.org/10.1021/acsnano.1c09122Digital Object Identifier
- Title
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Aligned Stacking of Nanopatterned 2D Materials for High-Resolution 3D Device FabricationWork title
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articleOpenAlex work type
- Language
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enPrimary language
- Publication year
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2022Year of publication
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2022-02-02Full publication date if available
- Authors
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Jonas Haas, Finn Ulrich, Christoph K. Hofer, Xiao Wang, Kai Braun, Jannik C. MeyerList of authors in order
- Landing page
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https://doi.org/10.1021/acsnano.1c09122Publisher landing page
- Open access
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YesWhether a free full text is available
- OA status
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greenOpen access status per OpenAlex
- OA URL
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https://arxiv.org/pdf/2110.07884Direct OA link when available
- Concepts
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Stacking, Fabrication, Materials science, Nanotechnology, High resolution, Optoelectronics, Chemistry, Geology, Remote sensing, Pathology, Alternative medicine, Organic chemistry, MedicineTop concepts (fields/topics) attached by OpenAlex
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18Total citation count in OpenAlex
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2025: 5, 2024: 9, 2023: 3, 2022: 1Per-year citation counts (last 5 years)
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73Number of works referenced by this work
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10Other works algorithmically related by OpenAlex
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