An ultra-compact angstrom-scale displacement sensor with large measurement range based on wavelength modulation Article Swipe
Yi Xu
,
Baowei Gao
,
Axin He
,
Tongzhou Zhang
,
Jiasen Zhang
·
YOU?
·
· 2022
· Open Access
·
· DOI: https://doi.org/10.1515/nanoph-2021-0754
YOU?
·
· 2022
· Open Access
·
· DOI: https://doi.org/10.1515/nanoph-2021-0754
Optical displacement metrology is important in nanotechnology and used to identify positions and displacements of nanodevices. Although several methods have been proposed, a sensor with ultracompact size, angstrom-scale resolution, and large measurement range is still lacking. We propose an optical displacement sensor with wavelength modulation that can demonstrate subwavelength footprint and angstrom-level resolution with large measurement range in this study. The proposed sensor consists of two optical slot antennas. Surface plasmon polaritons (SPPs) are launched at antennas and interfere when a tightly focused broadband light source illuminates the sensor. Spectrum of output SPPs presents a dip, which depends on the position of focal spot of incident light and is used to extract displacement. A maximum resolution of 0.734 nm was obtained. Furthermore, we used interference fringe of two broadband beams as light source and the measurement range of the sensor is not limited by the size of the tightly focused light source while maintaining high resolution. The method utilizes a new mechanism of wavelength modulation to overcome the trade-off between the high resolution and large measurement range, and achieve a variety of potential applications for nanometrology in the future.
Related Topics
Concepts
Nanometrology
Optics
Wavelength
Modulation (music)
Plasmon
High dynamic range
Metrology
Displacement (psychology)
Broadband
Optoelectronics
Materials science
Interference (communication)
Dynamic range
Physics
Telecommunications
Computer science
Acoustics
Channel (broadcasting)
Psychotherapist
Psychology
Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.1515/nanoph-2021-0754
- https://www.degruyter.com/document/doi/10.1515/nanoph-2021-0754/pdf
- OA Status
- gold
- Cited By
- 5
- References
- 27
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4210672508
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W4210672508Canonical identifier for this work in OpenAlex
- DOI
-
https://doi.org/10.1515/nanoph-2021-0754Digital Object Identifier
- Title
-
An ultra-compact angstrom-scale displacement sensor with large measurement range based on wavelength modulationWork title
- Type
-
articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
-
2022Year of publication
- Publication date
-
2022-02-02Full publication date if available
- Authors
-
Yi Xu, Baowei Gao, Axin He, Tongzhou Zhang, Jiasen ZhangList of authors in order
- Landing page
-
https://doi.org/10.1515/nanoph-2021-0754Publisher landing page
- PDF URL
-
https://www.degruyter.com/document/doi/10.1515/nanoph-2021-0754/pdfDirect link to full text PDF
- Open access
-
YesWhether a free full text is available
- OA status
-
goldOpen access status per OpenAlex
- OA URL
-
https://www.degruyter.com/document/doi/10.1515/nanoph-2021-0754/pdfDirect OA link when available
- Concepts
-
Nanometrology, Optics, Wavelength, Modulation (music), Plasmon, High dynamic range, Metrology, Displacement (psychology), Broadband, Optoelectronics, Materials science, Interference (communication), Dynamic range, Physics, Telecommunications, Computer science, Acoustics, Channel (broadcasting), Psychotherapist, PsychologyTop concepts (fields/topics) attached by OpenAlex
- Cited by
-
5Total citation count in OpenAlex
- Citations by year (recent)
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2025: 1, 2024: 1, 2023: 1, 2022: 2Per-year citation counts (last 5 years)
- References (count)
-
27Number of works referenced by this work
- Related works (count)
-
10Other works algorithmically related by OpenAlex
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