Automated Nanoscale Absolute Accuracy Alignment System for Transfer Printing Article Swipe
John McPhillimy
,
Dimitars Jevtics
,
Benoit Guilhabert
,
Charalambos Klitis
,
Antonio Hurtado
,
Marc Sorel
,
Martin D. Dawson
,
Michael J. Strain
·
YOU?
·
· 2020
· Open Access
·
· DOI: https://doi.org/10.1021/acsanm.0c02224
YOU?
·
· 2020
· Open Access
·
· DOI: https://doi.org/10.1021/acsanm.0c02224
The heterogeneous integration of micro- and nanoscale devices with on-chip circuits and waveguide platforms is a key enabling technology, with wide-ranging applications in areas including telecommunications, quantum information processing, and sensing. Pick and place integration with absolute positional accuracy at the nanoscale has been previously demonstrated for single proof-of-principle devices. However, to enable scaling of this technology for realization of multielement systems or high throughput manufacturing, the integration process must be compatible with automation while retaining nanoscale accuracy. In this work, an automated transfer printing process is realized by using a simple optical microscope, computer vision, and high accuracy translational stage system. Automatic alignment using a cross-correlation image processing method demonstrates absolute positional accuracy of transfer with an average offset of 2 area is demonstrated with an average offset of <30 nm (3σ < 705 nm). Rotational accuracy better than 45 mrad is achieved for all device variants. Devices can be selected and placed with high accuracy on a target substrate, both from lithographically defined positions on their native substrate or from a randomly distributed population. These demonstrations pave the way for future scalable manufacturing of heterogeneously integrated chip systems.
Related Topics
Concepts
Offset (computer science)
Computer science
Photonics
Chip
Scalability
Nanoscopic scale
Automation
Materials science
Transfer printing
Integrated circuit
Scaling
Computer hardware
Optoelectronics
Nanotechnology
Engineering
Telecommunications
Mechanical engineering
Database
Mathematics
Geometry
Programming language
Composite material
Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.1021/acsanm.0c02224
- https://pubs.acs.org/doi/pdf/10.1021/acsanm.0c02224
- OA Status
- hybrid
- Cited By
- 50
- References
- 34
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W3088780506
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W3088780506Canonical identifier for this work in OpenAlex
- DOI
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https://doi.org/10.1021/acsanm.0c02224Digital Object Identifier
- Title
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Automated Nanoscale Absolute Accuracy Alignment System for Transfer PrintingWork title
- Type
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articleOpenAlex work type
- Language
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enPrimary language
- Publication year
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2020Year of publication
- Publication date
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2020-09-23Full publication date if available
- Authors
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John McPhillimy, Dimitars Jevtics, Benoit Guilhabert, Charalambos Klitis, Antonio Hurtado, Marc Sorel, Martin D. Dawson, Michael J. StrainList of authors in order
- Landing page
-
https://doi.org/10.1021/acsanm.0c02224Publisher landing page
- PDF URL
-
https://pubs.acs.org/doi/pdf/10.1021/acsanm.0c02224Direct link to full text PDF
- Open access
-
YesWhether a free full text is available
- OA status
-
hybridOpen access status per OpenAlex
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https://pubs.acs.org/doi/pdf/10.1021/acsanm.0c02224Direct OA link when available
- Concepts
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Offset (computer science), Computer science, Photonics, Chip, Scalability, Nanoscopic scale, Automation, Materials science, Transfer printing, Integrated circuit, Scaling, Computer hardware, Optoelectronics, Nanotechnology, Engineering, Telecommunications, Mechanical engineering, Database, Mathematics, Geometry, Programming language, Composite materialTop concepts (fields/topics) attached by OpenAlex
- Cited by
-
50Total citation count in OpenAlex
- Citations by year (recent)
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2025: 13, 2024: 11, 2023: 11, 2022: 11, 2021: 4Per-year citation counts (last 5 years)
- References (count)
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34Number of works referenced by this work
- Related works (count)
-
10Other works algorithmically related by OpenAlex
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