Chromatic confocal coherence scanning interferometry with speed-variable scanning method to measure large-depth step Article Swipe
Yulu Zhao
,
Songtao Chang
,
Yi Zhang
,
Feifan Xu
,
Haojie Xia
·
YOU?
·
· 2024
· Open Access
·
· DOI: https://doi.org/10.1088/1361-6501/ad26ca
YOU?
·
· 2024
· Open Access
·
· DOI: https://doi.org/10.1088/1361-6501/ad26ca
Coherence scanning interferometry (CSI) is a crucial measurement technique for achieving non-contact, rapid, and high-precision measurements. However, when applied to large-depth steps, CSI encounters challenges related to prolonged measurement times and suboptimal signal utilization. This paper introduces a hybrid CSI system that integrates the chromatic confocal technique (CC-CSI). The confocal spectral signal peak facilitates the rapid determination of the coherence area, allowing the scanning process to be divided into two phases. The signal collection is limited within the coherence area at a lower scanning speed, while in other positions, the scanning speed is increased. This speed-variable scanning technique significantly augments measurement efficiency. The CC-CSI system with the speed-variable scanning method demonstrated a significant enhancement in measurement time compared to conventional CSI under identical experimental conditions. The measured step heights were 100 μm, 200 μm, and 300 μm. Standard deviations of less than 0.3 μm were observed in 10 consecutive measurements. In addition, the proposed CC-CSI system demonstrated the capability to profile the groove structure.
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- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.1088/1361-6501/ad26ca
- https://iopscience.iop.org/article/10.1088/1361-6501/ad26ca/pdf
- OA Status
- bronze
- Cited By
- 1
- References
- 35
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4391558272
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W4391558272Canonical identifier for this work in OpenAlex
- DOI
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https://doi.org/10.1088/1361-6501/ad26caDigital Object Identifier
- Title
-
Chromatic confocal coherence scanning interferometry with speed-variable scanning method to measure large-depth stepWork title
- Type
-
articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
-
2024Year of publication
- Publication date
-
2024-02-06Full publication date if available
- Authors
-
Yulu Zhao, Songtao Chang, Yi Zhang, Feifan Xu, Haojie XiaList of authors in order
- Landing page
-
https://doi.org/10.1088/1361-6501/ad26caPublisher landing page
- PDF URL
-
https://iopscience.iop.org/article/10.1088/1361-6501/ad26ca/pdfDirect link to full text PDF
- Open access
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YesWhether a free full text is available
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-
bronzeOpen access status per OpenAlex
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https://iopscience.iop.org/article/10.1088/1361-6501/ad26ca/pdfDirect OA link when available
- Concepts
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Optics, Coherence (philosophical gambling strategy), Confocal, Optical coherence tomography, Interferometry, SIGNAL (programming language), Chromatic scale, White light interferometry, Measure (data warehouse), Materials science, Computer science, Physics, Database, Quantum mechanics, Programming languageTop concepts (fields/topics) attached by OpenAlex
- Cited by
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1Total citation count in OpenAlex
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2025: 1Per-year citation counts (last 5 years)
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35Number of works referenced by this work
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10Other works algorithmically related by OpenAlex
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