Development of Microfluidic Cell for Liquid Phase Layer Deposition Tracking Article Swipe

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Microfluidics Deposition (geology) Ellipsometry Nanotechnology Materials science Layer (electronics) Liquid phase Microstructure Phase (matter) Tracking (education) Microscopy Thin film Chemistry Optics Composite material Physics Biology Organic chemistry Sediment Paleontology Pedagogy Psychology Thermodynamics

József Bálint Renkó , Attila Bonyár , Péter Jánoš Szabó ·

YOU? · · 2020 · Open Access · · DOI: https://doi.org/10.33924/amt-2020-02-08 · OA: W3125096349

This paper shows how microfluidic tools can be used for up-to-date microstructural investigations based on thin film deposition. The construction and production methods of such measuring procedures are introduced, and their application in ellipsometric investigations is shown. By using these tools, the researchers provide the possibility to observe and document the effects of certain fine structural processes in the development of the final microstructure. This paper describes two specific application areas of such microfluidics cells. Microfluidics cells can be used together with both optical microscopy and spectroscopic ellipsometry to understand previously unexplored microstructural changes.