Development of Physical Vapor Deposition Technique and Testing on Ceramics and CoCrMo Alloys Article Swipe
Feng‐Min Lai
,
Tan-Chih Chang
·
YOU?
·
· 2024
· Open Access
·
· DOI: https://doi.org/10.18494/sam4586
YOU?
·
· 2024
· Open Access
·
· DOI: https://doi.org/10.18494/sam4586
In this study, TiN thin films were coated on CoCrMo alloys and ceramic samples using vacuum coating technology with high-power impulse magnetron sputtering (HiPIMS), which was followed by coating at 100 and 200 °C to a thickness of 250, 500 or 750 nm to enhance the characteristics of the coated alloys.Through X-ray diffraction measurements, scanning electron microscopy, and microscale hardness testing, the structural, morphological, and mechanical characteristics of the CoCrMo and ceramic samples coated with TiN films were investigated in detail.The experimental results revealed that a smooth surface can be achieved on the film of 250 nm thickness and indicated that the TiN film with the smoother surface, formed by the vacuum coating method, has a higher hardness.It was also found that the TiN film prepared by coating at 200 °C had the smoothest surface and the highest hardness (365.64HV0.5), leading to enhanced mechanical properties of the CoCrMo alloys.In the ceramic samples, the TiN film prepared by coating at 100 °C had the smoothest surface and the highest hardness (376.81HV0.5).In addition, the vacuum coating process is helpful for improving the mechanical properties of TiN coating.The TiN materials are used in many sensor applications, and sensor applications can be realized using TiN/CoCrMo materials.In the future, we will study the sensing performance of TiN sensors fabricated on CoCrMo alloys, as well as implants made using the coated alloys.Then, we will further study circuit substrates, heat-resistant sensors, and corrosion-and wear-resistant parts that can be applied with TiN/Al 2 O 3 materials.
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Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.18494/sam4586
- https://sensors.myu-group.co.jp/sm_pdf/SM3585.pdf
- OA Status
- gold
- Cited By
- 1
- References
- 16
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4393302554
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W4393302554Canonical identifier for this work in OpenAlex
- DOI
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https://doi.org/10.18494/sam4586Digital Object Identifier
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Development of Physical Vapor Deposition Technique and Testing on Ceramics and CoCrMo AlloysWork title
- Type
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articleOpenAlex work type
- Language
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enPrimary language
- Publication year
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2024Year of publication
- Publication date
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2024-03-29Full publication date if available
- Authors
-
Feng‐Min Lai, Tan-Chih ChangList of authors in order
- Landing page
-
https://doi.org/10.18494/sam4586Publisher landing page
- PDF URL
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https://sensors.myu-group.co.jp/sm_pdf/SM3585.pdfDirect link to full text PDF
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YesWhether a free full text is available
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goldOpen access status per OpenAlex
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https://sensors.myu-group.co.jp/sm_pdf/SM3585.pdfDirect OA link when available
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Materials science, Deposition (geology), Ceramic, Chemical vapor deposition, Physical vapor deposition, Metallurgy, Nanotechnology, Thin film, Geology, Sediment, PaleontologyTop concepts (fields/topics) attached by OpenAlex
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1Total citation count in OpenAlex
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2025: 1Per-year citation counts (last 5 years)
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16Number of works referenced by this work
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10Other works algorithmically related by OpenAlex
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| abstract_inverted_index.properties | 144, 181 |
| abstract_inverted_index.sputtering | 22 |
| abstract_inverted_index.technology | 17 |
| abstract_inverted_index.coating.The | 184 |
| abstract_inverted_index.diffraction | 52 |
| abstract_inverted_index.hardness.It | 117 |
| abstract_inverted_index.microscopy, | 56 |
| abstract_inverted_index.performance | 209 |
| abstract_inverted_index.structural, | 62 |
| abstract_inverted_index.substrates, | 231 |
| abstract_inverted_index.alloys.Then, | 225 |
| abstract_inverted_index.applications | 195 |
| abstract_inverted_index.experimental | 81 |
| abstract_inverted_index.investigated | 78 |
| abstract_inverted_index.materials.In | 201 |
| abstract_inverted_index.applications, | 192 |
| abstract_inverted_index.corrosion-and | 235 |
| abstract_inverted_index.measurements, | 53 |
| abstract_inverted_index.(365.64HV0.5), | 139 |
| abstract_inverted_index.alloys.Through | 50 |
| abstract_inverted_index.heat-resistant | 232 |
| abstract_inverted_index.morphological, | 63 |
| abstract_inverted_index.wear-resistant | 236 |
| abstract_inverted_index.characteristics | 46, 66 |
| abstract_inverted_index.(376.81HV0.5).In | 169 |
| cited_by_percentile_year.max | 95 |
| cited_by_percentile_year.min | 91 |
| countries_distinct_count | 1 |
| institutions_distinct_count | 2 |
| citation_normalized_percentile.value | 0.79563938 |
| citation_normalized_percentile.is_in_top_1_percent | False |
| citation_normalized_percentile.is_in_top_10_percent | False |