Development of Silicon Nanowire Field Effect Transistors for Detection in Liquid Phase Article Swipe
Les transistors à effet de champ sensibles aux ions (ISFET) sont des composants électroniques conçus pour fonctionner en phase liquide. Pour résumer, ce sont des MOSFET dont la grille métallique est remplacée par une membrane isolante ionosensible. Au début des années 2000, ces composants ont évolué avec l'introduction des premiers dispositifs à base de nanofils de silicium. Grâce à leurs faibles dimensions, ces capteurs ont ouvert de nouvelles perspectives, comme par exemple, l'étude des métabolismes intracellulaires. L'objectif de cette thèse a été de développer et d'étudier un capteur de type ISFET, à base de nanofils de silicium, ayant comme couche sensible l'alumine Al2O3. Les premiers travaux ont porté sur l'intégration de films minces d'alumine Al2O3 dans un procédé de type MOSFET. Ce matériau devant être déposé sur des nanofils de silicium, la technique de dépôt successif de couches moléculaires (Atomic Layer Deposition ALD) a été retenue. Cette méthode offre la possibilité de déposer des films d'épaisseur homogène tout autour des nanofils. Après l'étude de l'ALD-Al2O3, la deuxième grande partie de ce projet a consisté à développer, en utilisant les techniques de la microélectronique, des structures innovantes à base de nanofils de silicium. Des transistors constitués d'un seul nanofil, et d'autres constitués de réseaux parallèles de nanofils ont été réalisés. Ces capteurs ont été intégrés dans des canaux microfluidiques, permettant ainsi de localiser précisément le liquide sur les nanofils, mais aussi de pouvoir travailler en micro/nanovolumes. La dernière partie de ce projet a consisté à caractériser ces capteurs en phase liquide. Les différentes configurations ont montré leurs avantages et inconvénients en termes de transconductance, courants de fuite, pentes sous le seuil, sensibilités au pH et aux ions interférents (Na+ et K+). Les caractérisations se sont avérées excellentes et laissent entrevoir des perspectives intéressantes pour des applications biologiques. Les principales innovations de ces capteurs concernent : l'utilisation de nanofils suspendus, la réalisation d'une gaine isolante ionosensible bicouche SiO2/Al2O3 tout autour des nanofils, la variation du dopage le long des nanofils ce qui a conduit à la réalisation de jonctions N+/P/N+, et l'intégration des capteurs dans des canaux microfluidiques couverts.
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Metadata
- Type
- preprint
- Language
- fr
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- OA Status
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- OpenAlex ID
- https://openalex.org/W4392424250
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W4392424250Canonical identifier for this work in OpenAlex
- Title
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Development of Silicon Nanowire Field Effect Transistors for Detection in Liquid PhaseWork title
- Type
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preprintOpenAlex work type
- Language
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frPrimary language
- Publication year
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2017Year of publication
- Publication date
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2017-10-17Full publication date if available
- Authors
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Ahmet LaleList of authors in order
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https://www.theses.fr/2017TOU30175/documentPublisher landing page
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YesWhether a free full text is available
- OA status
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greenOpen access status per OpenAlex
- OA URL
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https://www.theses.fr/2017TOU30175/documentDirect OA link when available
- Concepts
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Silicon nanowires, Nanowire, Materials science, Field-effect transistor, Liquid phase, Silicon, Transistor, Nanotechnology, Optoelectronics, Engineering physics, Electrical engineering, Engineering, Physics, Voltage, ThermodynamicsTop concepts (fields/topics) attached by OpenAlex
- Cited by
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0Total citation count in OpenAlex
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10Other works algorithmically related by OpenAlex
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| abstract_inverted_index.bicouche | 314 |
| abstract_inverted_index.capteurs | 63, 210, 246, 301, 341 |
| abstract_inverted_index.courants | 263 |
| abstract_inverted_index.d'autres | 199 |
| abstract_inverted_index.déposer | 152 |
| abstract_inverted_index.déposé | 125 |
| abstract_inverted_index.exemple, | 71 |
| abstract_inverted_index.isolante | 35, 312 |
| abstract_inverted_index.l'étude | 72, 162 |
| abstract_inverted_index.laissent | 287 |
| abstract_inverted_index.liquide. | 19, 249 |
| abstract_inverted_index.membrane | 34 |
| abstract_inverted_index.méthode | 147 |
| abstract_inverted_index.nanofil, | 197 |
| abstract_inverted_index.nanofils | 54, 94, 128, 189, 205, 306, 327 |
| abstract_inverted_index.premiers | 49, 104 |
| abstract_inverted_index.retenue. | 145 |
| abstract_inverted_index.réseaux | 202 |
| abstract_inverted_index.sensible | 100 |
| abstract_inverted_index.évolué | 45 |
| abstract_inverted_index.avantages | 256 |
| abstract_inverted_index.avérées | 284 |
| abstract_inverted_index.consisté | 173, 242 |
| abstract_inverted_index.couverts. | 346 |
| abstract_inverted_index.d'alumine | 113 |
| abstract_inverted_index.dernière | 236 |
| abstract_inverted_index.deuxième | 166 |
| abstract_inverted_index.entrevoir | 288 |
| abstract_inverted_index.homogène | 156 |
| abstract_inverted_index.jonctions | 336 |
| abstract_inverted_index.l'alumine | 101 |
| abstract_inverted_index.localiser | 221 |
| abstract_inverted_index.matériau | 122 |
| abstract_inverted_index.nanofils, | 227, 319 |
| abstract_inverted_index.nanofils. | 160 |
| abstract_inverted_index.nouvelles | 67 |
| abstract_inverted_index.procédé | 117 |
| abstract_inverted_index.résumer, | 21 |
| abstract_inverted_index.sensibles | 6 |
| abstract_inverted_index.silicium, | 96, 130 |
| abstract_inverted_index.silicium. | 56, 191 |
| abstract_inverted_index.successif | 135 |
| abstract_inverted_index.technique | 132 |
| abstract_inverted_index.utilisant | 177 |
| abstract_inverted_index.variation | 321 |
| abstract_inverted_index.Deposition | 141 |
| abstract_inverted_index.L'objectif | 76 |
| abstract_inverted_index.SiO2/Al2O3 | 315 |
| abstract_inverted_index.composants | 12, 43 |
| abstract_inverted_index.concernent | 302 |
| abstract_inverted_index.d'étudier | 85 |
| abstract_inverted_index.innovantes | 185 |
| abstract_inverted_index.intégrés | 213 |
| abstract_inverted_index.permettant | 218 |
| abstract_inverted_index.remplacée | 31 |
| abstract_inverted_index.structures | 184 |
| abstract_inverted_index.suspendus, | 307 |
| abstract_inverted_index.techniques | 179 |
| abstract_inverted_index.travailler | 232 |
| abstract_inverted_index.constitués | 194, 200 |
| abstract_inverted_index.dimensions, | 61 |
| abstract_inverted_index.dispositifs | 50 |
| abstract_inverted_index.développer | 83 |
| abstract_inverted_index.excellentes | 285 |
| abstract_inverted_index.fonctionner | 16 |
| abstract_inverted_index.innovations | 298 |
| abstract_inverted_index.métallique | 29 |
| abstract_inverted_index.parallèles | 203 |
| abstract_inverted_index.principales | 297 |
| abstract_inverted_index.réalisés. | 208 |
| abstract_inverted_index.transistors | 1, 193 |
| abstract_inverted_index.applications | 294 |
| abstract_inverted_index.biologiques. | 295 |
| abstract_inverted_index.d'épaisseur | 155 |
| abstract_inverted_index.différentes | 251 |
| abstract_inverted_index.développer, | 175 |
| abstract_inverted_index.ionosensible | 313 |
| abstract_inverted_index.l'ALD-Al2O3, | 164 |
| abstract_inverted_index.perspectives | 290 |
| abstract_inverted_index.possibilité | 150 |
| abstract_inverted_index.réalisation | 309, 334 |
| abstract_inverted_index.caractériser | 244 |
| abstract_inverted_index.interférents | 276 |
| abstract_inverted_index.ionosensible. | 36 |
| abstract_inverted_index.l'utilisation | 304 |
| abstract_inverted_index.moléculaires | 138 |
| abstract_inverted_index.métabolismes | 74 |
| abstract_inverted_index.perspectives, | 68 |
| abstract_inverted_index.précisément | 222 |
| abstract_inverted_index.sensibilités | 270 |
| abstract_inverted_index.configurations | 252 |
| abstract_inverted_index.inconvénients | 258 |
| abstract_inverted_index.intéressantes | 291 |
| abstract_inverted_index.l'introduction | 47 |
| abstract_inverted_index.l'intégration | 109, 339 |
| abstract_inverted_index.électroniques | 13 |
| abstract_inverted_index.microfluidiques | 345 |
| abstract_inverted_index.microfluidiques, | 217 |
| abstract_inverted_index.caractérisations | 281 |
| abstract_inverted_index.intracellulaires. | 75 |
| abstract_inverted_index.transconductance, | 262 |
| abstract_inverted_index.micro/nanovolumes. | 234 |
| abstract_inverted_index.microélectronique, | 182 |
| cited_by_percentile_year | |
| corresponding_author_ids | https://openalex.org/A5078221367 |
| countries_distinct_count | 0 |
| institutions_distinct_count | 1 |
| sustainable_development_goals[0].id | https://metadata.un.org/sdg/7 |
| sustainable_development_goals[0].score | 0.4699999988079071 |
| sustainable_development_goals[0].display_name | Affordable and clean energy |
| citation_normalized_percentile |