Development of Volume Produced Negative Ion Source using a CCRF Discharge Article Swipe

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Pawandeep Singh , Swati Dahiya , Avnish Kumar Pandey , Yashashri Patil , S. K. Karkari ·

YOU? · · 2024 · Open Access · · DOI: https://doi.org/10.48550/arxiv.2406.13506

This work shows the development of a volume-produced negative ion source that consists of annular parallel plates driven by a 13.56 MHz capacitively coupled radio frequency in a push-pull configuration. This source shows advantages in controlling plasma conditions by varying the pressure, power, and applied axial magnetic field. It is found that the push-pull configuration allows the plasma potential to remain in the range of 20 to 40 Volts. Conversely, the application of a magnetic field helps serves to augment the production of negative ions in the central hollow part of the annular plate. Further, a plausible explanation to the obtained experimental results is presented.

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Volume (thermodynamics) Ion Materials science Chemistry Physics Thermodynamics Organic chemistry

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Type: preprint
Language: en
Landing Page: http://arxiv.org/abs/2406.13506
PDF: https://arxiv.org/pdf/2406.13506
OA Status: green
Related Works: 10
OpenAlex ID: https://openalex.org/W4399912864

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DOI: https://doi.org/10.48550/arxiv.2406.13506

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Title: Development of Volume Produced Negative Ion Source using a CCRF Discharge

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Type: preprint

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Language: en

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Publication year: 2024

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Publication date: 2024-06-19

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Authors: Pawandeep Singh, Swati Dahiya, Avnish Kumar Pandey, Yashashri Patil, S. K. Karkari

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Landing page: https://arxiv.org/abs/2406.13506

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PDF URL: https://arxiv.org/pdf/2406.13506

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OA status: green

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OA URL: https://arxiv.org/pdf/2406.13506

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Concepts: Volume (thermodynamics), Ion, Materials science, Chemistry, Physics, Thermodynamics, Organic chemistry

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Cited by: 0

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Related works (count): 10

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