Experiments on Temperature Changes of Microbolometer under Blackbody Radiation and Predictions Using Thermal Modeling by COMSOL Multiphysics Simulator Article Swipe
Yu-Zhen Deng
,
Shiang‐Feng Tang
,
Hong-Yuan Zeng
,
Zhengyuan Wu
,
Der-Kuo Tung
·
YOU?
·
· 2018
· Open Access
·
· DOI: https://doi.org/10.3390/s18082593
YOU?
·
· 2018
· Open Access
·
· DOI: https://doi.org/10.3390/s18082593
In this study, we study a heat transfer model, with the surface of the microbolometer device receiving radiation from blackbody constructed using a COMSOL Multiphysics simulator. We have proposed three kinds of L-type 2-leg and 4-leg with the pixel pitch of 35 μm based on vanadium oxide absorbent membrane sandwiched with top passivated and bottom Si3N4 supporting films, respectively. Under the blackbody radiation, the surface temperature changes and distributions of these samples are simulated and analyzed in detail. The trend of change of the temperature dependent resistance of the four kinds of bolometer devices using the proposed heat transfer model is consistent with the actual results of the change of resistance of 4 samples irradiated with 325 K blackbody located in the front distance of 5 cm. In this paper, ΔT indicates the averaged differences of the top temperature on the suspended membrane and the lowest temperature on the post of legs of the microbolometers. It is shown that ΔT ≈ 17 mK is larger in nominal 2-leg microbolometer device than that of 4-leg one and of 2-leg with 2 μm × 2 μm central square hole and two 7.5 μm × 2 μm slits in suspended films. Additionally, only ΔT ≈ 5 mK with 4-leg microbolometer device under the same radiated energy of 325 K blackbody results from the larger total thermal conductance.
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- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.3390/s18082593
- https://www.mdpi.com/1424-8220/18/8/2593/pdf?version=1533701831
- OA Status
- gold
- Cited By
- 19
- References
- 10
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W2886970041
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- OpenAlex ID
-
https://openalex.org/W2886970041Canonical identifier for this work in OpenAlex
- DOI
-
https://doi.org/10.3390/s18082593Digital Object Identifier
- Title
-
Experiments on Temperature Changes of Microbolometer under Blackbody Radiation and Predictions Using Thermal Modeling by COMSOL Multiphysics SimulatorWork title
- Type
-
articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
-
2018Year of publication
- Publication date
-
2018-08-08Full publication date if available
- Authors
-
Yu-Zhen Deng, Shiang‐Feng Tang, Hong-Yuan Zeng, Zhengyuan Wu, Der-Kuo TungList of authors in order
- Landing page
-
https://doi.org/10.3390/s18082593Publisher landing page
- PDF URL
-
https://www.mdpi.com/1424-8220/18/8/2593/pdf?version=1533701831Direct link to full text PDF
- Open access
-
YesWhether a free full text is available
- OA status
-
goldOpen access status per OpenAlex
- OA URL
-
https://www.mdpi.com/1424-8220/18/8/2593/pdf?version=1533701831Direct OA link when available
- Concepts
-
Microbolometer, Black-body radiation, Multiphysics, Emissivity, Thermal radiation, Bolometer, Heat transfer, Materials science, Radiation, Thermal conductivity, Thermal resistance, Optics, Physics, Optoelectronics, Mechanics, Composite material, Thermodynamics, Finite element method, DetectorTop concepts (fields/topics) attached by OpenAlex
- Cited by
-
19Total citation count in OpenAlex
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2024: 2, 2023: 6, 2022: 2, 2021: 4, 2020: 3Per-year citation counts (last 5 years)
- References (count)
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10Number of works referenced by this work
- Related works (count)
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10Other works algorithmically related by OpenAlex
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