Fabrication of thermal microphotonic sensors and sensor arrays Article Swipe
A thermal microphotonic sensor is fabricated on a silicon substrate by etching an opening and a trench into the substrate, and then filling in the opening and trench with silicon oxide which can be deposited or formed by thermally oxidizing a portion of the silicon substrate surrounding the opening and trench. The silicon oxide forms a support post for an optical resonator which is subsequently formed from a layer of silicon nitride, and also forms a base for an optical waveguide formed from the silicon nitride layer. Part of the silicon substrate can be selectively etched away to elevate the waveguide and resonator. The thermal microphotonic sensor, which is useful to detect infrared radiation via a change in the evanescent coupling of light between the waveguide and resonator, can be formed as a single device or as an array.
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Metadata
- Type
- article
- Language
- en
- Landing Page
- https://www.osti.gov/biblio/1015989
- https://www.osti.gov/biblio/1015989
- OA Status
- green
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4300431751
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W4300431751Canonical identifier for this work in OpenAlex
- Title
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Fabrication of thermal microphotonic sensors and sensor arraysWork title
- Type
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articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
-
2023Year of publication
- Publication date
-
2023-01-23Full publication date if available
- Authors
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Michael Shaw, Michael R. Watts, Gregory N. NielsonList of authors in order
- Landing page
-
https://www.osti.gov/biblio/1015989Publisher landing page
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https://www.osti.gov/biblio/1015989Direct link to full text PDF
- Open access
-
YesWhether a free full text is available
- OA status
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greenOpen access status per OpenAlex
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https://www.osti.gov/biblio/1015989Direct OA link when available
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Fabrication, Thermal, Materials science, Optoelectronics, Nanotechnology, Physics, Meteorology, Medicine, Alternative medicine, PathologyTop concepts (fields/topics) attached by OpenAlex
- Cited by
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0Total citation count in OpenAlex
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10Other works algorithmically related by OpenAlex
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