HfO$_2$-based platform for high-index-contrast visible/UV integrated photonics Article Swipe
Ó.A. Jaramillo
,
Vighnesh Natarajan
,
Hamim Mahmud Rivy
,
Joshua Tensuan
,
Leonardo Massai
,
Karan K. Mehta
·
YOU?
·
· 2024
· Open Access
·
· DOI: https://doi.org/10.48550/arxiv.2412.09421
YOU?
·
· 2024
· Open Access
·
· DOI: https://doi.org/10.48550/arxiv.2412.09421
Ultraviolet and visible integrated photonics are enabling for applications in quantum information, sensing, and spectroscopy, among others. Few materials support low-loss photonics into the UV, and the relatively low refractive index of known depositable materials limits the achievable functionality. Here we present a high-index integrated photonics platform based on HfO$_2$ and Al$_2$O$_3$ composites deposited via Atomic Layer Deposition (ALD) with low loss in the visible and near-UV. We show that Al$_2$O$_3$ incorporation dramatically decreases bulk loss compared to pure HfO$_2$, consistent with inhibited crystallization due to the admixture of Al$_2$O$_3$. Composites exhibit refractive index $n$ following the average of that of HfO$_2$ and Al$_2$O$_3$, weighted by the HfO$_2$ fractional composition $x$. At $λ=375$ nm, composites with $x=0.67$ exhibit $n=2.08$ preserving most of HfO$_2$'s significantly higher index, and $3.8(7) $ dB/cm material loss. We further present fully etched and cladded waveguides, grating couplers, and ring resonators, realizing single-mode waveguide loss of $0.25(2)$ dB/cm inferred from resonators of 2.6 million intrinsic quality factor at $λ=729$ nm, $2.6(2)$ dB/cm at $λ=405$ nm, and $7.7(6)$ dB/cm at $λ=375$ nm. We measure the composite's thermo-optic coefficient (TOC) to be $2.44(3) \times 10^{-5}$ RIU/$^\circ$C near $λ=397$ nm. This work establishes (HfO$_2$)$_x$(Al$_2$O$_3$)$_{1-x}$ composites as a platform amenable to integration for low-loss, high-index photonics spanning the UV to NIR.
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Metadata
- Type
- preprint
- Language
- en
- Landing Page
- http://arxiv.org/abs/2412.09421
- https://arxiv.org/pdf/2412.09421
- OA Status
- green
- Cited By
- 1
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4405355291
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W4405355291Canonical identifier for this work in OpenAlex
- DOI
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https://doi.org/10.48550/arxiv.2412.09421Digital Object Identifier
- Title
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HfO$_2$-based platform for high-index-contrast visible/UV integrated photonicsWork title
- Type
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preprintOpenAlex work type
- Language
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enPrimary language
- Publication year
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2024Year of publication
- Publication date
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2024-12-12Full publication date if available
- Authors
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Ó.A. Jaramillo, Vighnesh Natarajan, Hamim Mahmud Rivy, Joshua Tensuan, Leonardo Massai, Karan K. MehtaList of authors in order
- Landing page
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https://arxiv.org/abs/2412.09421Publisher landing page
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https://arxiv.org/pdf/2412.09421Direct link to full text PDF
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YesWhether a free full text is available
- OA status
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greenOpen access status per OpenAlex
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https://arxiv.org/pdf/2412.09421Direct OA link when available
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Contrast (vision), Photonics, Index (typography), Integrated optics, Optoelectronics, Computer science, Materials science, Optics, Physics, World Wide WebTop concepts (fields/topics) attached by OpenAlex
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1Total citation count in OpenAlex
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2024: 1Per-year citation counts (last 5 years)
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10Other works algorithmically related by OpenAlex
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| abstract_inverted_index.inferred | 152 |
| abstract_inverted_index.low-loss | 20 |
| abstract_inverted_index.material | 130 |
| abstract_inverted_index.near-UV. | 66 |
| abstract_inverted_index.platform | 46, 198 |
| abstract_inverted_index.sensing, | 12 |
| abstract_inverted_index.spanning | 206 |
| abstract_inverted_index.weighted | 104 |
| abstract_inverted_index.$0.25(2)$ | 150 |
| abstract_inverted_index.HfO$_2$'s | 122 |
| abstract_inverted_index.admixture | 87 |
| abstract_inverted_index.couplers, | 141 |
| abstract_inverted_index.decreases | 73 |
| abstract_inverted_index.deposited | 53 |
| abstract_inverted_index.following | 95 |
| abstract_inverted_index.inhibited | 82 |
| abstract_inverted_index.intrinsic | 158 |
| abstract_inverted_index.low-loss, | 203 |
| abstract_inverted_index.materials | 18, 34 |
| abstract_inverted_index.photonics | 4, 21, 45, 205 |
| abstract_inverted_index.realizing | 145 |
| abstract_inverted_index.waveguide | 147 |
| abstract_inverted_index.Composites | 90 |
| abstract_inverted_index.Deposition | 57 |
| abstract_inverted_index.achievable | 37 |
| abstract_inverted_index.composites | 52, 114, 195 |
| abstract_inverted_index.consistent | 80 |
| abstract_inverted_index.fractional | 108 |
| abstract_inverted_index.high-index | 43, 204 |
| abstract_inverted_index.integrated | 3, 44 |
| abstract_inverted_index.preserving | 119 |
| abstract_inverted_index.refractive | 29, 92 |
| abstract_inverted_index.relatively | 27 |
| abstract_inverted_index.resonators | 154 |
| abstract_inverted_index.Al$_2$O$_3$ | 51, 70 |
| abstract_inverted_index.Ultraviolet | 0 |
| abstract_inverted_index.coefficient | 180 |
| abstract_inverted_index.composite's | 178 |
| abstract_inverted_index.composition | 109 |
| abstract_inverted_index.depositable | 33 |
| abstract_inverted_index.establishes | 193 |
| abstract_inverted_index.integration | 201 |
| abstract_inverted_index.resonators, | 144 |
| abstract_inverted_index.single-mode | 146 |
| abstract_inverted_index.waveguides, | 139 |
| abstract_inverted_index.Al$_2$O$_3$, | 103 |
| abstract_inverted_index.Al$_2$O$_3$. | 89 |
| abstract_inverted_index.applications | 8 |
| abstract_inverted_index.dramatically | 72 |
| abstract_inverted_index.information, | 11 |
| abstract_inverted_index.thermo-optic | 179 |
| abstract_inverted_index.RIU/$^\circ$C | 187 |
| abstract_inverted_index.incorporation | 71 |
| abstract_inverted_index.significantly | 123 |
| abstract_inverted_index.spectroscopy, | 14 |
| abstract_inverted_index.functionality. | 38 |
| abstract_inverted_index.crystallization | 83 |
| abstract_inverted_index.(HfO$_2$)$_x$(Al$_2$O$_3$)$_{1-x}$ | 194 |
| cited_by_percentile_year.max | 94 |
| cited_by_percentile_year.min | 90 |
| countries_distinct_count | 0 |
| institutions_distinct_count | 6 |
| citation_normalized_percentile.value | 0.5617237 |
| citation_normalized_percentile.is_in_top_1_percent | False |
| citation_normalized_percentile.is_in_top_10_percent | False |