High-performance grating couplers by inverse design for perfectly vertical coupling Article Swipe
Mingshan Zhao
,
Mingxiang Yang
,
YUNJIE YAN
,
Zhenlin Wu
,
Geert Morthier
·
YOU?
·
· 2023
· Open Access
·
· DOI: https://doi.org/10.1364/opticaopen.22207384.v1
YOU?
·
· 2023
· Open Access
·
· DOI: https://doi.org/10.1364/opticaopen.22207384.v1
In the application of free-space optical (FSO) communication, grating couplers (GCs) are the key components, enabling the coupling of the vertically incident optical beam to optical waveguides. This paper presents the design and experimental characterization of apodized grating couplers for perfectly-vertical coupling to 220 nm thick silicon-on-insulator (SOI) waveguides in the C-band. We also designed and characterized uniform grating couplers to demonstrate the superior performance of apodized grating couplers. We used a gradient-based inverse design method to optimize apodized grating couplers. The design and measurement results show that apodized grating couplers have a 3dB lower coupling loss than uniform grating couplers. We fabricated focusing apodized grating couplers by electron beam lithography with a 70 nm shallow etch and a minimum feature size of 100 nm, which is compatible with CMOS technology. They achieved an excellent coupling loss of 5.86 dB for perfectly vertical coupling.
Related Topics
Concepts
Apodization
Grating
Optics
Coupling (piping)
Materials science
Silicon on insulator
Electron-beam lithography
Coupling loss
Blazed grating
Diffraction grating
Optoelectronics
Physics
Silicon
Resist
Optical fiber
Layer (electronics)
Composite material
Metallurgy
Metadata
- Type
- preprint
- Language
- en
- Landing Page
- https://doi.org/10.1364/opticaopen.22207384.v1
- OA Status
- green
- References
- 13
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4323048238
All OpenAlex metadata
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https://openalex.org/W4323048238Canonical identifier for this work in OpenAlex
- DOI
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https://doi.org/10.1364/opticaopen.22207384.v1Digital Object Identifier
- Title
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High-performance grating couplers by inverse design for perfectly vertical couplingWork title
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-
preprintOpenAlex work type
- Language
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enPrimary language
- Publication year
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2023Year of publication
- Publication date
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2023-03-03Full publication date if available
- Authors
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Mingshan Zhao, Mingxiang Yang, YUNJIE YAN, Zhenlin Wu, Geert MorthierList of authors in order
- Landing page
-
https://doi.org/10.1364/opticaopen.22207384.v1Publisher landing page
- Open access
-
YesWhether a free full text is available
- OA status
-
greenOpen access status per OpenAlex
- OA URL
-
https://figshare.com/articles/preprint/High-performance_grating_couplers_by_inverse_design_for_perfectly_vertical_coupling/22207384Direct OA link when available
- Concepts
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Apodization, Grating, Optics, Coupling (piping), Materials science, Silicon on insulator, Electron-beam lithography, Coupling loss, Blazed grating, Diffraction grating, Optoelectronics, Physics, Silicon, Resist, Optical fiber, Layer (electronics), Composite material, MetallurgyTop concepts (fields/topics) attached by OpenAlex
- Cited by
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0Total citation count in OpenAlex
- References (count)
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13Number of works referenced by this work
- Related works (count)
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10Other works algorithmically related by OpenAlex
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