Athermal silicon ring resonators clad with titanium dioxide for 13µm wavelength operation Article Swipe

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Resonator Materials science Wavelength Silicon Optics Optoelectronics Silicon photonics Resonance (particle physics) Fabrication Optical ring resonators Photonics Physics Atomic physics Pathology Medicine Alternative medicine

Shaoqi Feng , Kuanping Shang , Jock Bovington , Rui Wu , Binbin Guan , Kwang‐Ting Cheng , John E. Bowers , S. J. Ben Yoo ·

YOU? · · 2015 · Open Access · · DOI: https://doi.org/10.1364/oe.23.025653 · OA: W1751310752

We investigate the athermal characteristics of silicon waveguides clad with TiO(2) designed for 1.3 µm wavelength operation. Using CMOS-compatible fabrication processes, we realize and experimentally demonstrate silicon photonic ring resonators with resonant wavelengths that vary by less than 6 pm/°C at 1.3 µm. The measured ring resonance wavelengths across the 20-50°C temperature range show nearly complete cancellation of the first-order thermo-optical effects and exhibit second-order thermo-optical effects expected from the combination of TiO(2) and Si.