High $Q$ Antisymmetric Mode Lithium Niobate MEMS Resonators With Spurious Mitigation Article Swipe

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Resonator Lithium niobate Antisymmetric relation Spurious relationship Lamb waves Physics Figure of merit Optoelectronics Materials science Computer science Optics Surface wave Mathematical physics Machine learning

Yansong Yang , Ruochen Lu , Songbin Gong ·

YOU? · · 2020 · Open Access · · DOI: https://doi.org/10.1109/jmems.2020.2967784 · OA: W3005417901

This paper reports on the demonstrations of first-order antisymmetric Lamb wave (A1) mode resonator as a new platform for front-end filtering of the fifth-generation (5G) wireless communication. The sub-6 GHz resonance in this work is achieved by employing the A1 mode in the micromachined V-cut Lithium Niobate (LiNbO 3 ) thin films. The spurious modes mitigation is achieved by optimizing the distribution of the electric field. The demonstrated figure-of-merit (FoM = Q · k 2 t ) of 435 marks the first time that a new resonator technology with the FoMs exceeds those of surface acoustic wave (SAW) resonators and thin-film bulk acoustic resonators (FBARs) in the sub-6 GHz (1-6 GHz) frequency range.