Improved optical and structural properties of nonpolar a-plane AlGaN epi-layers after Cp₂Mg and NH₃ treatments Article Swipe

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Jianguo Zhao , Xiong Zhang , Jiaqi He , Aijie Fan , Shuai Chen , Zili Wu , Youhua Zhu , Meiyu Wang , Zhe Chuan Feng , Yiping Cui ·

YOU? · · 2018 · Open Access · · DOI: https://doi.org/10.1364/ome.8.002586

The optical and structural properties of non-polar a-plane Al0.4Ga0.6N epi-layers were improved significantly with the assistance of a bicyclopentadienyl-magnesium (Cp2Mg) and ammonia (NH3) (BA) treatment. The defects-related emission was remarkably suppressed with the introduced BA treatment. Moreover, the crystalline quality could be improved significantly using a BA treatment at a relatively low-temperature (LT), whereas the anisotropy in crystalline quality could be suppressed remarkably using a BA treatment at a relatively high-temperature (HT). In fact, the full width at half maximum values in the X-ray rocking curves measured along c- and m-directions were found to be decreased by approximately 15.5% and 56.0%, respectively, with the introduction of both LT-BA and HT-BA treatments. Meanwhile, the root-mean-square value measured with an atomic force microscope was decreased from 7.1 to 3.3 nm due to the LT-BA and HT-BA treatments.

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Materials science Optoelectronics Optics Optical materials Physics

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Type: article
Language: en
Landing Page: https://doi.org/10.1364/ome.8.002586
OA Status: gold
Cited By: 2
References: 20
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OpenAlex ID: https://openalex.org/W2885923718

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DOI: https://doi.org/10.1364/ome.8.002586

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Title: Improved optical and structural properties of nonpolar a-plane AlGaN epi-layers after Cp₂Mg and NH₃ treatments

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Language: en

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Publication year: 2018

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Publication date: 2018-08-08

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Authors: Jianguo Zhao, Xiong Zhang, Jiaqi He, Aijie Fan, Shuai Chen, Zili Wu, Youhua Zhu, Meiyu Wang, Zhe Chuan Feng, Yiping Cui

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Landing page: https://doi.org/10.1364/ome.8.002586

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Concepts: Materials science, Optoelectronics, Optics, Optical materials, Physics

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Cited by: 2

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Improved optical and structural properties of nonpolar a-plane AlGaN epi-layers after Cp2Mg and NH3 treatments Article Swipe

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Improved optical and structural properties of nonpolar a-plane AlGaN epi-layers after Cp₂Mg and NH₃ treatments Article Swipe