Improvement of Mg-Doped GaN with Shutter-Controlled Process in Plasma-Assisted Molecular Beam Epitaxy Article Swipe
Ying‐Chieh Wang
,
Ikai Lo
,
Yu-Chung Lin
,
Cheng-Da Tsai
,
Ting‐Chang Chang
·
YOU?
·
· 2023
· Open Access
·
· DOI: https://doi.org/10.3390/cryst13060907
YOU?
·
· 2023
· Open Access
·
· DOI: https://doi.org/10.3390/cryst13060907
Mg-doped GaN was grown by plasma-assisted molecular beam epitaxy (PAMBE) on a Fe-doped GaN template substrate by employing a shutter-controlled process. The transition from n-type to p-type conductivity of Mg-doped GaN in relation to the N/Ga flux ratio was studied. The highest p-type carrier concentration in this series was 3.12 × 1018 cm−3 under the most N-rich condition. By modulating the shutters of different effusion cells for the shutter-controlled process, a wide growth window for p-type GaN was obtained. It was found that the presence of Mg flux effectively prevents the formation of structural defects in GaN epi-layers, resulting in the improvement of crystal quality and carrier mobility.
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Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.3390/cryst13060907
- https://www.mdpi.com/2073-4352/13/6/907/pdf?version=1685616314
- OA Status
- gold
- References
- 31
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4379229600
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W4379229600Canonical identifier for this work in OpenAlex
- DOI
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https://doi.org/10.3390/cryst13060907Digital Object Identifier
- Title
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Improvement of Mg-Doped GaN with Shutter-Controlled Process in Plasma-Assisted Molecular Beam EpitaxyWork title
- Type
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articleOpenAlex work type
- Language
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enPrimary language
- Publication year
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2023Year of publication
- Publication date
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2023-06-01Full publication date if available
- Authors
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Ying‐Chieh Wang, Ikai Lo, Yu-Chung Lin, Cheng-Da Tsai, Ting‐Chang ChangList of authors in order
- Landing page
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https://doi.org/10.3390/cryst13060907Publisher landing page
- PDF URL
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https://www.mdpi.com/2073-4352/13/6/907/pdf?version=1685616314Direct link to full text PDF
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YesWhether a free full text is available
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goldOpen access status per OpenAlex
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https://www.mdpi.com/2073-4352/13/6/907/pdf?version=1685616314Direct OA link when available
- Concepts
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Shutter, Molecular beam epitaxy, Materials science, Doping, Optoelectronics, Substrate (aquarium), Plasma, Crystal (programming language), Epitaxy, Optics, Nanotechnology, Layer (electronics), Programming language, Geology, Computer science, Quantum mechanics, Physics, OceanographyTop concepts (fields/topics) attached by OpenAlex
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0Total citation count in OpenAlex
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31Number of works referenced by this work
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10Other works algorithmically related by OpenAlex
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| referenced_works | https://openalex.org/W2790300128, https://openalex.org/W2025284722, https://openalex.org/W55816622, https://openalex.org/W1625492393, https://openalex.org/W2054227182, https://openalex.org/W4233164433, https://openalex.org/W2017667889, https://openalex.org/W2069099261, https://openalex.org/W2091446565, https://openalex.org/W2088025672, https://openalex.org/W2035552528, https://openalex.org/W1995470743, https://openalex.org/W2011228655, https://openalex.org/W2953049478, https://openalex.org/W4220729032, https://openalex.org/W2057895727, https://openalex.org/W2072481218, https://openalex.org/W2068183079, https://openalex.org/W2055860232, https://openalex.org/W2291792508, https://openalex.org/W2000852454, https://openalex.org/W2094537611, https://openalex.org/W2048454557, https://openalex.org/W2028519318, https://openalex.org/W2603540723, https://openalex.org/W2038008965, https://openalex.org/W2057782478, https://openalex.org/W2037124594, https://openalex.org/W1963646524, https://openalex.org/W1968471949, https://openalex.org/W2028896994 |
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| abstract_inverted_index.to | 25, 33 |
| abstract_inverted_index.× | 50 |
| abstract_inverted_index.GaN | 1, 13, 30, 76, 96 |
| abstract_inverted_index.The | 21, 40 |
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| abstract_inverted_index.for | 66, 74 |
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| abstract_inverted_index.3.12 | 49 |
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| cited_by_percentile_year | |
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| corresponding_institution_ids | https://openalex.org/I142974352 |
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| citation_normalized_percentile.is_in_top_10_percent | False |