Mechanical Design and Development of Compact Linear Nanopositioning Flexure Stages with Centimeter-Level Travel Range and Nanometer-Level Resolution Article Swipe

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Deming Shu , Jayson Anton , Steven Kearney , Barry Lai , Wenjun Liu , J. Mäser , Chris Roehrig , Jonathan Z. Tischler ·

YOU? · · 2017 · Open Access · · DOI: https://doi.org/10.18429/jacow-medsi2016-tuba04

Nanopositioning techniques present an important capability to support the state-of-the-art synchrotron radiation instrumentation research for the APS operations and upgrade project. To overcome the performance limitations of precision ball-bearing-based or roller-bearing-based linear stage systems, two compact linear nanopositiioning flexure stages have been designed and developed at the APS with centimeter-level travel range and nanometer-level resolution for x-ray experimental applications. The APS T8-54 linear flexure stage is designed to perform a precision wire scan as a differential aperture for the 3-D diffraction microscope at the APS sector 34, and the APS T8-56 linear flexure stage is designed for a horizontal sample scanning stage for a hard x-ray microscope at the APS sector 2. Both linear flexure stages are using a similar improved deformation compensated linear guiding mechanism which was developed initially at the APS for the T8-52 flexural linear stage *. The mechanical design and finite element analyses of the APS T8-54 and T8-56 flexural stages, as well as its initial mechanical test results with laser interferometer are described in this paper.

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Optics Nanometre Centimeter Range (aeronautics) Materials science Physics Composite material Astronomy

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Type: article
Language: en
Landing Page: https://doi.org/10.18429/jacow-medsi2016-tuba04
OA Status: green
Cited By: 3
Related Works: 14
OpenAlex ID: https://openalex.org/W3194293295

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OpenAlex ID: https://openalex.org/W3194293295

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DOI: https://doi.org/10.18429/jacow-medsi2016-tuba04

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Title: Mechanical Design and Development of Compact Linear Nanopositioning Flexure Stages with Centimeter-Level Travel Range and Nanometer-Level Resolution

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Type: article

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Language: en

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Publication year: 2017

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Publication date: 2017-01-01

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Authors: Deming Shu, Jayson Anton, Steven Kearney, Barry Lai, Wenjun Liu, J. Mäser, Chris Roehrig, Jonathan Z. Tischler

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Landing page: https://doi.org/10.18429/jacow-medsi2016-tuba04

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OA status: green

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Concepts: Optics, Nanometre, Centimeter, Range (aeronautics), Materials science, Physics, Composite material, Astronomy

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Cited by: 3

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Citations by year (recent): 2019: 1, 2017: 2

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