Microheater hotspot engineering for spatially resolved and repeatable multi-level switching in foundry-processed phase change silicon photonics Article Swipe

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Hongyi Sun , Chuanyu Lian , Francis Vásquez , S. Kari , Yi‐Siou Huang , Alessandro Restelli , Steven A. Vitale , Ichiro Takeuchi , Juejun Hu , Nathan Youngblood , Georges Pavlidis , Carlos Rı́os ·

YOU? · · 2025 · Open Access · · DOI: https://doi.org/10.1038/s41467-025-59399-6

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Semiconductor Device Fabrication

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Hotspot (geology) Microheater Photonics Materials science Silicon photonics Silicon Phase change Foundry Nanotechnology Optoelectronics Engineering physics Engineering Physics Fabrication Alternative medicine Medicine Pathology Geophysics Metallurgy

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Type: article
Language: en
Landing Page: https://doi.org/10.1038/s41467-025-59399-6
PDF: https://www.nature.com/articles/s41467-025-59399-6.pdf
OA Status: gold
Cited By: 2
References: 55
Related Works: 10
OpenAlex ID: https://openalex.org/W4410242546

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OpenAlex ID: https://openalex.org/W4410242546

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DOI: https://doi.org/10.1038/s41467-025-59399-6

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Title: Microheater hotspot engineering for spatially resolved and repeatable multi-level switching in foundry-processed phase change silicon photonics

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Type: article

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Language: en

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Publication year: 2025

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Publication date: 2025-05-09

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Authors: Hongyi Sun, Chuanyu Lian, Francis Vásquez, S. Kari, Yi‐Siou Huang, Alessandro Restelli, Steven A. Vitale, Ichiro Takeuchi, Juejun Hu, Nathan Youngblood, Georges Pavlidis, Carlos Rı́os

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Landing page: https://doi.org/10.1038/s41467-025-59399-6

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PDF URL: https://www.nature.com/articles/s41467-025-59399-6.pdf

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Concepts: Hotspot (geology), Microheater, Photonics, Materials science, Silicon photonics, Silicon, Phase change, Foundry, Nanotechnology, Optoelectronics, Engineering physics, Engineering, Physics, Fabrication, Alternative medicine, Medicine, Pathology, Geophysics, Metallurgy

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Cited by: 2

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