Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures Article Swipe
Fu-Yen Kuo
,
Ching‐Yu Lin
,
Po-Chun Chuang
,
Chun-Lin Chien
,
Yu‐Chen Yeh
,
Stella Kuei-Ann Wen
·
YOU?
·
· 2017
· Open Access
·
· DOI: https://doi.org/10.1109/jeds.2017.2666821
YOU?
·
· 2017
· Open Access
·
· DOI: https://doi.org/10.1109/jeds.2017.2666821
In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 μm 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically. By using resonators as the building blocks, multiple MEMS sensors including environmental temperature sensor, ambient pressure sensor, accelerometer as well as gyro sensor can be monolithically implemented with the readout circuits by the single standard ASIC/MEMS process without off-fab pre/post processes. The proposed architecture enables compact and innovative sentient-assisted SOC design for the emerging IOT applications.
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Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.1109/jeds.2017.2666821
- OA Status
- gold
- Cited By
- 22
- References
- 19
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W2588588111
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W2588588111Canonical identifier for this work in OpenAlex
- DOI
-
https://doi.org/10.1109/jeds.2017.2666821Digital Object Identifier
- Title
-
Monolithic Multi-Sensor Design With Resonator-Based MEMS StructuresWork title
- Type
-
articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
-
2017Year of publication
- Publication date
-
2017-02-13Full publication date if available
- Authors
-
Fu-Yen Kuo, Ching‐Yu Lin, Po-Chun Chuang, Chun-Lin Chien, Yu‐Chen Yeh, Stella Kuei-Ann WenList of authors in order
- Landing page
-
https://doi.org/10.1109/jeds.2017.2666821Publisher landing page
- Open access
-
YesWhether a free full text is available
- OA status
-
goldOpen access status per OpenAlex
- OA URL
-
https://doi.org/10.1109/jeds.2017.2666821Direct OA link when available
- Concepts
-
Microelectromechanical systems, Application-specific integrated circuit, Resonator, Accelerometer, Electronic engineering, Electronic circuit, CMOS, Process (computing), Integrated circuit, Computer science, Engineering, Electrical engineering, Materials science, Optoelectronics, Operating systemTop concepts (fields/topics) attached by OpenAlex
- Cited by
-
22Total citation count in OpenAlex
- Citations by year (recent)
-
2025: 2, 2024: 2, 2023: 2, 2022: 3, 2021: 9Per-year citation counts (last 5 years)
- References (count)
-
19Number of works referenced by this work
- Related works (count)
-
10Other works algorithmically related by OpenAlex
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