Nanolithography Toolbox Article Swipe

Robert R. Ilic , Krishna C. Balram , Daron Westly , Marcelo Davanço , Karen E. Grutter , Qing Li , Thomas Michels , Christopher H. Ray , Liya E. Yu , Neal A. Bertrand , Samuel M. Stavis , Vladimir Aksyuk , James Alexander A. Liddle , Brian A. Bryce , Nicolae Lobontiu , Yuxiang Liu , Meredith Metzler , Gerald G Lopez , David A. Czaplewski , Leonidas E. Ocola , Pavel Neužil , Vojtěch Svatoš , Slava Krylov , Christopher B. Wallin , Ian Gilbert , Kristen A. Dill , Richard Kasica , Kartik Srinivasan , Gregory Simelgor , Juraj Topolancik · YOU? · · 2016 · Open Access · · DOI: https://doi.org/10.6028/nist.hb.160 · OA: W4231731516