Nanomechanical spectroscopy of ultrathin silicon nitride suspended membranes Article Swipe
Sanket Jugade
,
Anuj Aggarwal
,
Akshay Naik
·
YOU?
·
· 2021
· Open Access
·
· DOI: https://doi.org/10.1051/epjap/2021210068
YOU?
·
· 2021
· Open Access
·
· DOI: https://doi.org/10.1051/epjap/2021210068
Mechanical properties of a nanomechanical resonator significantly impact the performance of a resonant Nano-electromechanical system (NEMS) device. We study the mechanical properties of suspended membranes fabricated out of low-pressure chemical vapor deposited silicon nitride thin films. We fabricated doubly-clamped membranes of silicon nitride with thickness less than 50 nm and length varying from 5 to 60 μm. The elastic modulus and stress in the suspended membranes were measured using Atomic Force Microscope (AFM)-based nanomechanical spectroscopy. The elastic moduli of the suspended membranes are significantly higher than those of corresponding on-substrate thin films. We observed a reduction in net stress after the fabrication of suspended membrane, which is explained by estimating the thermal stress and intrinsic stress. We also use a mathematical model to study the stress and thickness-dependent elastic modulus of the ultrathin membranes. Lastly, we study the capillary force-gradient between the SiN x suspended membrane-Si substrate that could collapse the suspended membrane.
Related Topics
Concepts
Membrane
Materials science
Silicon nitride
Elastic modulus
Substrate (aquarium)
Silicon
Composite material
Stress (linguistics)
Force spectroscopy
Thin film
Nitride
Nanoindentation
Nanomechanics
Nanoelectromechanical systems
Nanotechnology
Optoelectronics
Atomic force microscopy
Layer (electronics)
Chemistry
Nanoparticle
Oceanography
Geology
Philosophy
Linguistics
Nanomedicine
Biochemistry
Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.1051/epjap/2021210068
- OA Status
- green
- Cited By
- 3
- References
- 38
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W3170542070
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
-
https://openalex.org/W3170542070Canonical identifier for this work in OpenAlex
- DOI
-
https://doi.org/10.1051/epjap/2021210068Digital Object Identifier
- Title
-
Nanomechanical spectroscopy of ultrathin silicon nitride suspended membranesWork title
- Type
-
articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
-
2021Year of publication
- Publication date
-
2021-05-01Full publication date if available
- Authors
-
Sanket Jugade, Anuj Aggarwal, Akshay NaikList of authors in order
- Landing page
-
https://doi.org/10.1051/epjap/2021210068Publisher landing page
- Open access
-
YesWhether a free full text is available
- OA status
-
greenOpen access status per OpenAlex
- OA URL
-
https://eprints.iisc.ac.in/69254/1/epj_app_phy_93-05_2021.pdfDirect OA link when available
- Concepts
-
Membrane, Materials science, Silicon nitride, Elastic modulus, Substrate (aquarium), Silicon, Composite material, Stress (linguistics), Force spectroscopy, Thin film, Nitride, Nanoindentation, Nanomechanics, Nanoelectromechanical systems, Nanotechnology, Optoelectronics, Atomic force microscopy, Layer (electronics), Chemistry, Nanoparticle, Oceanography, Geology, Philosophy, Linguistics, Nanomedicine, BiochemistryTop concepts (fields/topics) attached by OpenAlex
- Cited by
-
3Total citation count in OpenAlex
- Citations by year (recent)
-
2023: 1, 2022: 1, 2021: 1Per-year citation counts (last 5 years)
- References (count)
-
38Number of works referenced by this work
- Related works (count)
-
10Other works algorithmically related by OpenAlex
Full payload
| id | https://openalex.org/W3170542070 |
|---|---|
| doi | https://doi.org/10.1051/epjap/2021210068 |
| ids.doi | https://doi.org/10.1051/epjap/2021210068 |
| ids.mag | 3170542070 |
| ids.openalex | https://openalex.org/W3170542070 |
| fwci | 0.3952749 |
| type | article |
| title | Nanomechanical spectroscopy of ultrathin silicon nitride suspended membranes |
| biblio.issue | 2 |
| biblio.volume | 94 |
| biblio.last_page | 20301 |
| biblio.first_page | 20301 |
| grants[0].funder | https://openalex.org/F4320322724 |
| grants[0].award_id | |
| grants[0].funder_display_name | Ministry of Education, India |
| grants[1].funder | https://openalex.org/F4320325255 |
| grants[1].award_id | |
| grants[1].funder_display_name | Ministry of Electronics and Information technology |
| topics[0].id | https://openalex.org/T10923 |
| topics[0].field.id | https://openalex.org/fields/31 |
| topics[0].field.display_name | Physics and Astronomy |
| topics[0].score | 1.0 |
| topics[0].domain.id | https://openalex.org/domains/3 |
| topics[0].domain.display_name | Physical Sciences |
| topics[0].subfield.id | https://openalex.org/subfields/3107 |
| topics[0].subfield.display_name | Atomic and Molecular Physics, and Optics |
| topics[0].display_name | Force Microscopy Techniques and Applications |
| topics[1].id | https://openalex.org/T11449 |
| topics[1].field.id | https://openalex.org/fields/31 |
| topics[1].field.display_name | Physics and Astronomy |
| topics[1].score | 1.0 |
| topics[1].domain.id | https://openalex.org/domains/3 |
| topics[1].domain.display_name | Physical Sciences |
| topics[1].subfield.id | https://openalex.org/subfields/3107 |
| topics[1].subfield.display_name | Atomic and Molecular Physics, and Optics |
| topics[1].display_name | Mechanical and Optical Resonators |
| topics[2].id | https://openalex.org/T10369 |
| topics[2].field.id | https://openalex.org/fields/22 |
| topics[2].field.display_name | Engineering |
| topics[2].score | 0.9998999834060669 |
| topics[2].domain.id | https://openalex.org/domains/3 |
| topics[2].domain.display_name | Physical Sciences |
| topics[2].subfield.id | https://openalex.org/subfields/2208 |
| topics[2].subfield.display_name | Electrical and Electronic Engineering |
| topics[2].display_name | Advanced MEMS and NEMS Technologies |
| funders[0].id | https://openalex.org/F4320322724 |
| funders[0].ror | https://ror.org/048xjjh50 |
| funders[0].display_name | Ministry of Education, India |
| funders[1].id | https://openalex.org/F4320325255 |
| funders[1].ror | |
| funders[1].display_name | Ministry of Electronics and Information technology |
| is_xpac | False |
| apc_list | |
| apc_paid | |
| concepts[0].id | https://openalex.org/C41625074 |
| concepts[0].level | 2 |
| concepts[0].score | 0.8464850187301636 |
| concepts[0].wikidata | https://www.wikidata.org/wiki/Q176088 |
| concepts[0].display_name | Membrane |
| concepts[1].id | https://openalex.org/C192562407 |
| concepts[1].level | 0 |
| concepts[1].score | 0.8005884885787964 |
| concepts[1].wikidata | https://www.wikidata.org/wiki/Q228736 |
| concepts[1].display_name | Materials science |
| concepts[2].id | https://openalex.org/C2777431650 |
| concepts[2].level | 3 |
| concepts[2].score | 0.757752001285553 |
| concepts[2].wikidata | https://www.wikidata.org/wiki/Q413828 |
| concepts[2].display_name | Silicon nitride |
| concepts[3].id | https://openalex.org/C43486711 |
| concepts[3].level | 2 |
| concepts[3].score | 0.6724833846092224 |
| concepts[3].wikidata | https://www.wikidata.org/wiki/Q192005 |
| concepts[3].display_name | Elastic modulus |
| concepts[4].id | https://openalex.org/C2777289219 |
| concepts[4].level | 2 |
| concepts[4].score | 0.6493263244628906 |
| concepts[4].wikidata | https://www.wikidata.org/wiki/Q7632154 |
| concepts[4].display_name | Substrate (aquarium) |
| concepts[5].id | https://openalex.org/C544956773 |
| concepts[5].level | 2 |
| concepts[5].score | 0.5268265604972839 |
| concepts[5].wikidata | https://www.wikidata.org/wiki/Q670 |
| concepts[5].display_name | Silicon |
| concepts[6].id | https://openalex.org/C159985019 |
| concepts[6].level | 1 |
| concepts[6].score | 0.5236061215400696 |
| concepts[6].wikidata | https://www.wikidata.org/wiki/Q181790 |
| concepts[6].display_name | Composite material |
| concepts[7].id | https://openalex.org/C21036866 |
| concepts[7].level | 2 |
| concepts[7].score | 0.48270654678344727 |
| concepts[7].wikidata | https://www.wikidata.org/wiki/Q181767 |
| concepts[7].display_name | Stress (linguistics) |
| concepts[8].id | https://openalex.org/C119473381 |
| concepts[8].level | 3 |
| concepts[8].score | 0.48108288645744324 |
| concepts[8].wikidata | https://www.wikidata.org/wiki/Q49298 |
| concepts[8].display_name | Force spectroscopy |
| concepts[9].id | https://openalex.org/C19067145 |
| concepts[9].level | 2 |
| concepts[9].score | 0.4774237871170044 |
| concepts[9].wikidata | https://www.wikidata.org/wiki/Q1137203 |
| concepts[9].display_name | Thin film |
| concepts[10].id | https://openalex.org/C194760766 |
| concepts[10].level | 3 |
| concepts[10].score | 0.47732311487197876 |
| concepts[10].wikidata | https://www.wikidata.org/wiki/Q410851 |
| concepts[10].display_name | Nitride |
| concepts[11].id | https://openalex.org/C49326732 |
| concepts[11].level | 2 |
| concepts[11].score | 0.4651879370212555 |
| concepts[11].wikidata | https://www.wikidata.org/wiki/Q1549892 |
| concepts[11].display_name | Nanoindentation |
| concepts[12].id | https://openalex.org/C133267278 |
| concepts[12].level | 3 |
| concepts[12].score | 0.42221009731292725 |
| concepts[12].wikidata | https://www.wikidata.org/wiki/Q4120515 |
| concepts[12].display_name | Nanomechanics |
| concepts[13].id | https://openalex.org/C173409883 |
| concepts[13].level | 4 |
| concepts[13].score | 0.4156160354614258 |
| concepts[13].wikidata | https://www.wikidata.org/wiki/Q175593 |
| concepts[13].display_name | Nanoelectromechanical systems |
| concepts[14].id | https://openalex.org/C171250308 |
| concepts[14].level | 1 |
| concepts[14].score | 0.35922276973724365 |
| concepts[14].wikidata | https://www.wikidata.org/wiki/Q11468 |
| concepts[14].display_name | Nanotechnology |
| concepts[15].id | https://openalex.org/C49040817 |
| concepts[15].level | 1 |
| concepts[15].score | 0.29084140062332153 |
| concepts[15].wikidata | https://www.wikidata.org/wiki/Q193091 |
| concepts[15].display_name | Optoelectronics |
| concepts[16].id | https://openalex.org/C102951782 |
| concepts[16].level | 2 |
| concepts[16].score | 0.26520848274230957 |
| concepts[16].wikidata | https://www.wikidata.org/wiki/Q49295 |
| concepts[16].display_name | Atomic force microscopy |
| concepts[17].id | https://openalex.org/C2779227376 |
| concepts[17].level | 2 |
| concepts[17].score | 0.1650591790676117 |
| concepts[17].wikidata | https://www.wikidata.org/wiki/Q6505497 |
| concepts[17].display_name | Layer (electronics) |
| concepts[18].id | https://openalex.org/C185592680 |
| concepts[18].level | 0 |
| concepts[18].score | 0.1260492205619812 |
| concepts[18].wikidata | https://www.wikidata.org/wiki/Q2329 |
| concepts[18].display_name | Chemistry |
| concepts[19].id | https://openalex.org/C155672457 |
| concepts[19].level | 2 |
| concepts[19].score | 0.11727839708328247 |
| concepts[19].wikidata | https://www.wikidata.org/wiki/Q61231 |
| concepts[19].display_name | Nanoparticle |
| concepts[20].id | https://openalex.org/C111368507 |
| concepts[20].level | 1 |
| concepts[20].score | 0.0 |
| concepts[20].wikidata | https://www.wikidata.org/wiki/Q43518 |
| concepts[20].display_name | Oceanography |
| concepts[21].id | https://openalex.org/C127313418 |
| concepts[21].level | 0 |
| concepts[21].score | 0.0 |
| concepts[21].wikidata | https://www.wikidata.org/wiki/Q1069 |
| concepts[21].display_name | Geology |
| concepts[22].id | https://openalex.org/C138885662 |
| concepts[22].level | 0 |
| concepts[22].score | 0.0 |
| concepts[22].wikidata | https://www.wikidata.org/wiki/Q5891 |
| concepts[22].display_name | Philosophy |
| concepts[23].id | https://openalex.org/C41895202 |
| concepts[23].level | 1 |
| concepts[23].score | 0.0 |
| concepts[23].wikidata | https://www.wikidata.org/wiki/Q8162 |
| concepts[23].display_name | Linguistics |
| concepts[24].id | https://openalex.org/C15083742 |
| concepts[24].level | 3 |
| concepts[24].score | 0.0 |
| concepts[24].wikidata | https://www.wikidata.org/wiki/Q261659 |
| concepts[24].display_name | Nanomedicine |
| concepts[25].id | https://openalex.org/C55493867 |
| concepts[25].level | 1 |
| concepts[25].score | 0.0 |
| concepts[25].wikidata | https://www.wikidata.org/wiki/Q7094 |
| concepts[25].display_name | Biochemistry |
| keywords[0].id | https://openalex.org/keywords/membrane |
| keywords[0].score | 0.8464850187301636 |
| keywords[0].display_name | Membrane |
| keywords[1].id | https://openalex.org/keywords/materials-science |
| keywords[1].score | 0.8005884885787964 |
| keywords[1].display_name | Materials science |
| keywords[2].id | https://openalex.org/keywords/silicon-nitride |
| keywords[2].score | 0.757752001285553 |
| keywords[2].display_name | Silicon nitride |
| keywords[3].id | https://openalex.org/keywords/elastic-modulus |
| keywords[3].score | 0.6724833846092224 |
| keywords[3].display_name | Elastic modulus |
| keywords[4].id | https://openalex.org/keywords/substrate |
| keywords[4].score | 0.6493263244628906 |
| keywords[4].display_name | Substrate (aquarium) |
| keywords[5].id | https://openalex.org/keywords/silicon |
| keywords[5].score | 0.5268265604972839 |
| keywords[5].display_name | Silicon |
| keywords[6].id | https://openalex.org/keywords/composite-material |
| keywords[6].score | 0.5236061215400696 |
| keywords[6].display_name | Composite material |
| keywords[7].id | https://openalex.org/keywords/stress |
| keywords[7].score | 0.48270654678344727 |
| keywords[7].display_name | Stress (linguistics) |
| keywords[8].id | https://openalex.org/keywords/force-spectroscopy |
| keywords[8].score | 0.48108288645744324 |
| keywords[8].display_name | Force spectroscopy |
| keywords[9].id | https://openalex.org/keywords/thin-film |
| keywords[9].score | 0.4774237871170044 |
| keywords[9].display_name | Thin film |
| keywords[10].id | https://openalex.org/keywords/nitride |
| keywords[10].score | 0.47732311487197876 |
| keywords[10].display_name | Nitride |
| keywords[11].id | https://openalex.org/keywords/nanoindentation |
| keywords[11].score | 0.4651879370212555 |
| keywords[11].display_name | Nanoindentation |
| keywords[12].id | https://openalex.org/keywords/nanomechanics |
| keywords[12].score | 0.42221009731292725 |
| keywords[12].display_name | Nanomechanics |
| keywords[13].id | https://openalex.org/keywords/nanoelectromechanical-systems |
| keywords[13].score | 0.4156160354614258 |
| keywords[13].display_name | Nanoelectromechanical systems |
| keywords[14].id | https://openalex.org/keywords/nanotechnology |
| keywords[14].score | 0.35922276973724365 |
| keywords[14].display_name | Nanotechnology |
| keywords[15].id | https://openalex.org/keywords/optoelectronics |
| keywords[15].score | 0.29084140062332153 |
| keywords[15].display_name | Optoelectronics |
| keywords[16].id | https://openalex.org/keywords/atomic-force-microscopy |
| keywords[16].score | 0.26520848274230957 |
| keywords[16].display_name | Atomic force microscopy |
| keywords[17].id | https://openalex.org/keywords/layer |
| keywords[17].score | 0.1650591790676117 |
| keywords[17].display_name | Layer (electronics) |
| keywords[18].id | https://openalex.org/keywords/chemistry |
| keywords[18].score | 0.1260492205619812 |
| keywords[18].display_name | Chemistry |
| keywords[19].id | https://openalex.org/keywords/nanoparticle |
| keywords[19].score | 0.11727839708328247 |
| keywords[19].display_name | Nanoparticle |
| language | en |
| locations[0].id | doi:10.1051/epjap/2021210068 |
| locations[0].is_oa | False |
| locations[0].source.id | https://openalex.org/S201767027 |
| locations[0].source.issn | 1286-0042, 1286-0050 |
| locations[0].source.type | journal |
| locations[0].source.is_oa | False |
| locations[0].source.issn_l | 1286-0042 |
| locations[0].source.is_core | True |
| locations[0].source.is_in_doaj | False |
| locations[0].source.display_name | The European Physical Journal Applied Physics |
| locations[0].source.host_organization | https://openalex.org/P4310319748 |
| locations[0].source.host_organization_name | EDP Sciences |
| locations[0].source.host_organization_lineage | https://openalex.org/P4310319748 |
| locations[0].license | |
| locations[0].pdf_url | |
| locations[0].version | publishedVersion |
| locations[0].raw_type | journal-article |
| locations[0].license_id | |
| locations[0].is_accepted | True |
| locations[0].is_published | True |
| locations[0].raw_source_name | The European Physical Journal Applied Physics |
| locations[0].landing_page_url | https://doi.org/10.1051/epjap/2021210068 |
| locations[1].id | pmh:oai:eprints.iisc.ac.in:69254 |
| locations[1].is_oa | True |
| locations[1].source.id | https://openalex.org/S4306401429 |
| locations[1].source.issn | |
| locations[1].source.type | repository |
| locations[1].source.is_oa | False |
| locations[1].source.issn_l | |
| locations[1].source.is_core | False |
| locations[1].source.is_in_doaj | False |
| locations[1].source.display_name | ePrints@IISc (Indian Institute of Science) |
| locations[1].source.host_organization | https://openalex.org/I59270414 |
| locations[1].source.host_organization_name | Indian Institute of Science Bangalore |
| locations[1].source.host_organization_lineage | https://openalex.org/I59270414 |
| locations[1].license | |
| locations[1].pdf_url | http://eprints.iisc.ac.in/69254/1/epj_app_phy_93-05_2021.pdf |
| locations[1].version | acceptedVersion |
| locations[1].raw_type | Journal Article |
| locations[1].license_id | |
| locations[1].is_accepted | True |
| locations[1].is_published | False |
| locations[1].raw_source_name | |
| locations[1].landing_page_url | |
| indexed_in | crossref |
| authorships[0].author.id | https://openalex.org/A5084735054 |
| authorships[0].author.orcid | https://orcid.org/0000-0001-6522-5823 |
| authorships[0].author.display_name | Sanket Jugade |
| authorships[0].countries | IN |
| authorships[0].affiliations[0].institution_ids | https://openalex.org/I59270414 |
| authorships[0].affiliations[0].raw_affiliation_string | Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science (IISc) Bengaluru 560012, India |
| authorships[0].institutions[0].id | https://openalex.org/I59270414 |
| authorships[0].institutions[0].ror | https://ror.org/04dese585 |
| authorships[0].institutions[0].type | education |
| authorships[0].institutions[0].lineage | https://openalex.org/I59270414 |
| authorships[0].institutions[0].country_code | IN |
| authorships[0].institutions[0].display_name | Indian Institute of Science Bangalore |
| authorships[0].author_position | first |
| authorships[0].raw_author_name | Sanket S. Jugade |
| authorships[0].is_corresponding | False |
| authorships[0].raw_affiliation_strings | Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science (IISc) Bengaluru 560012, India |
| authorships[1].author.id | https://openalex.org/A5109058970 |
| authorships[1].author.orcid | https://orcid.org/0009-0003-2156-9570 |
| authorships[1].author.display_name | Anuj Aggarwal |
| authorships[1].countries | IN |
| authorships[1].affiliations[0].institution_ids | https://openalex.org/I59270414 |
| authorships[1].affiliations[0].raw_affiliation_string | Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science (IISc) Bengaluru 560012, India |
| authorships[1].institutions[0].id | https://openalex.org/I59270414 |
| authorships[1].institutions[0].ror | https://ror.org/04dese585 |
| authorships[1].institutions[0].type | education |
| authorships[1].institutions[0].lineage | https://openalex.org/I59270414 |
| authorships[1].institutions[0].country_code | IN |
| authorships[1].institutions[0].display_name | Indian Institute of Science Bangalore |
| authorships[1].author_position | middle |
| authorships[1].raw_author_name | Anuj Aggarwal |
| authorships[1].is_corresponding | False |
| authorships[1].raw_affiliation_strings | Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science (IISc) Bengaluru 560012, India |
| authorships[2].author.id | https://openalex.org/A5021027571 |
| authorships[2].author.orcid | https://orcid.org/0000-0001-6325-7231 |
| authorships[2].author.display_name | Akshay Naik |
| authorships[2].countries | IN |
| authorships[2].affiliations[0].institution_ids | https://openalex.org/I59270414 |
| authorships[2].affiliations[0].raw_affiliation_string | Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science (IISc) Bengaluru 560012, India |
| authorships[2].institutions[0].id | https://openalex.org/I59270414 |
| authorships[2].institutions[0].ror | https://ror.org/04dese585 |
| authorships[2].institutions[0].type | education |
| authorships[2].institutions[0].lineage | https://openalex.org/I59270414 |
| authorships[2].institutions[0].country_code | IN |
| authorships[2].institutions[0].display_name | Indian Institute of Science Bangalore |
| authorships[2].author_position | last |
| authorships[2].raw_author_name | Akshay K. Naik |
| authorships[2].is_corresponding | True |
| authorships[2].raw_affiliation_strings | Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science (IISc) Bengaluru 560012, India |
| has_content.pdf | True |
| has_content.grobid_xml | True |
| is_paratext | False |
| open_access.is_oa | True |
| open_access.oa_url | http://eprints.iisc.ac.in/69254/1/epj_app_phy_93-05_2021.pdf |
| open_access.oa_status | green |
| open_access.any_repository_has_fulltext | False |
| created_date | 2025-10-10T00:00:00 |
| display_name | Nanomechanical spectroscopy of ultrathin silicon nitride suspended membranes |
| has_fulltext | True |
| is_retracted | False |
| updated_date | 2025-11-06T03:46:38.306776 |
| primary_topic.id | https://openalex.org/T10923 |
| primary_topic.field.id | https://openalex.org/fields/31 |
| primary_topic.field.display_name | Physics and Astronomy |
| primary_topic.score | 1.0 |
| primary_topic.domain.id | https://openalex.org/domains/3 |
| primary_topic.domain.display_name | Physical Sciences |
| primary_topic.subfield.id | https://openalex.org/subfields/3107 |
| primary_topic.subfield.display_name | Atomic and Molecular Physics, and Optics |
| primary_topic.display_name | Force Microscopy Techniques and Applications |
| related_works | https://openalex.org/W1547164960, https://openalex.org/W67038896, https://openalex.org/W2133104640, https://openalex.org/W2187101264, https://openalex.org/W2010216705, https://openalex.org/W3022406877, https://openalex.org/W2966504883, https://openalex.org/W4205395533, https://openalex.org/W2027173938, https://openalex.org/W1607877762 |
| cited_by_count | 3 |
| counts_by_year[0].year | 2023 |
| counts_by_year[0].cited_by_count | 1 |
| counts_by_year[1].year | 2022 |
| counts_by_year[1].cited_by_count | 1 |
| counts_by_year[2].year | 2021 |
| counts_by_year[2].cited_by_count | 1 |
| locations_count | 2 |
| best_oa_location.id | pmh:oai:eprints.iisc.ac.in:69254 |
| best_oa_location.is_oa | True |
| best_oa_location.source.id | https://openalex.org/S4306401429 |
| best_oa_location.source.issn | |
| best_oa_location.source.type | repository |
| best_oa_location.source.is_oa | False |
| best_oa_location.source.issn_l | |
| best_oa_location.source.is_core | False |
| best_oa_location.source.is_in_doaj | False |
| best_oa_location.source.display_name | ePrints@IISc (Indian Institute of Science) |
| best_oa_location.source.host_organization | https://openalex.org/I59270414 |
| best_oa_location.source.host_organization_name | Indian Institute of Science Bangalore |
| best_oa_location.source.host_organization_lineage | https://openalex.org/I59270414 |
| best_oa_location.license | |
| best_oa_location.pdf_url | http://eprints.iisc.ac.in/69254/1/epj_app_phy_93-05_2021.pdf |
| best_oa_location.version | acceptedVersion |
| best_oa_location.raw_type | Journal Article |
| best_oa_location.license_id | |
| best_oa_location.is_accepted | True |
| best_oa_location.is_published | False |
| best_oa_location.raw_source_name | |
| best_oa_location.landing_page_url | |
| primary_location.id | doi:10.1051/epjap/2021210068 |
| primary_location.is_oa | False |
| primary_location.source.id | https://openalex.org/S201767027 |
| primary_location.source.issn | 1286-0042, 1286-0050 |
| primary_location.source.type | journal |
| primary_location.source.is_oa | False |
| primary_location.source.issn_l | 1286-0042 |
| primary_location.source.is_core | True |
| primary_location.source.is_in_doaj | False |
| primary_location.source.display_name | The European Physical Journal Applied Physics |
| primary_location.source.host_organization | https://openalex.org/P4310319748 |
| primary_location.source.host_organization_name | EDP Sciences |
| primary_location.source.host_organization_lineage | https://openalex.org/P4310319748 |
| primary_location.license | |
| primary_location.pdf_url | |
| primary_location.version | publishedVersion |
| primary_location.raw_type | journal-article |
| primary_location.license_id | |
| primary_location.is_accepted | True |
| primary_location.is_published | True |
| primary_location.raw_source_name | The European Physical Journal Applied Physics |
| primary_location.landing_page_url | https://doi.org/10.1051/epjap/2021210068 |
| publication_date | 2021-05-01 |
| publication_year | 2021 |
| referenced_works | https://openalex.org/W2043416085, https://openalex.org/W4234009147, https://openalex.org/W2006346031, https://openalex.org/W2063620997, https://openalex.org/W2074191268, https://openalex.org/W1993617326, https://openalex.org/W2029841771, https://openalex.org/W2152832683, https://openalex.org/W2078740349, https://openalex.org/W2176766577, https://openalex.org/W2467009620, https://openalex.org/W2157972301, https://openalex.org/W2066633305, https://openalex.org/W2116631066, https://openalex.org/W2010971702, https://openalex.org/W2093192991, https://openalex.org/W2150903279, https://openalex.org/W2113315103, https://openalex.org/W2621919695, https://openalex.org/W2043400591, https://openalex.org/W2141808559, https://openalex.org/W4301291038, https://openalex.org/W2128552649, https://openalex.org/W2043319682, https://openalex.org/W1992934352, https://openalex.org/W2056675885, https://openalex.org/W2030145631, https://openalex.org/W2464509217, https://openalex.org/W1994722051, https://openalex.org/W2155019690, https://openalex.org/W2005699465, https://openalex.org/W1990546030, https://openalex.org/W2124217397, https://openalex.org/W2504864752, https://openalex.org/W2067051883, https://openalex.org/W60811066, https://openalex.org/W3121709470, https://openalex.org/W2085555354 |
| referenced_works_count | 38 |
| abstract_inverted_index.5 | 53 |
| abstract_inverted_index.a | 3, 11, 94, 119 |
| abstract_inverted_index.x | 143 |
| abstract_inverted_index.50 | 47 |
| abstract_inverted_index.60 | 55 |
| abstract_inverted_index.We | 17, 36, 92, 116 |
| abstract_inverted_index.by | 108 |
| abstract_inverted_index.in | 62, 96 |
| abstract_inverted_index.is | 106 |
| abstract_inverted_index.nm | 48 |
| abstract_inverted_index.of | 2, 10, 22, 27, 40, 78, 87, 102, 130 |
| abstract_inverted_index.to | 54, 122 |
| abstract_inverted_index.we | 135 |
| abstract_inverted_index.SiN | 142 |
| abstract_inverted_index.The | 57, 75 |
| abstract_inverted_index.and | 49, 60, 113, 126 |
| abstract_inverted_index.are | 82 |
| abstract_inverted_index.net | 97 |
| abstract_inverted_index.out | 26 |
| abstract_inverted_index.the | 8, 19, 63, 79, 100, 110, 124, 131, 137, 141, 150 |
| abstract_inverted_index.use | 118 |
| abstract_inverted_index.also | 117 |
| abstract_inverted_index.from | 52 |
| abstract_inverted_index.less | 45 |
| abstract_inverted_index.than | 46, 85 |
| abstract_inverted_index.that | 147 |
| abstract_inverted_index.thin | 34, 90 |
| abstract_inverted_index.were | 66 |
| abstract_inverted_index.with | 43 |
| abstract_inverted_index.μm. | 56 |
| abstract_inverted_index.Force | 70 |
| abstract_inverted_index.after | 99 |
| abstract_inverted_index.could | 148 |
| abstract_inverted_index.model | 121 |
| abstract_inverted_index.study | 18, 123, 136 |
| abstract_inverted_index.those | 86 |
| abstract_inverted_index.using | 68 |
| abstract_inverted_index.vapor | 30 |
| abstract_inverted_index.which | 105 |
| abstract_inverted_index.(NEMS) | 15 |
| abstract_inverted_index.Atomic | 69 |
| abstract_inverted_index.films. | 35, 91 |
| abstract_inverted_index.higher | 84 |
| abstract_inverted_index.impact | 7 |
| abstract_inverted_index.length | 50 |
| abstract_inverted_index.moduli | 77 |
| abstract_inverted_index.stress | 61, 98, 112, 125 |
| abstract_inverted_index.system | 14 |
| abstract_inverted_index.Lastly, | 134 |
| abstract_inverted_index.between | 140 |
| abstract_inverted_index.device. | 16 |
| abstract_inverted_index.elastic | 58, 76, 128 |
| abstract_inverted_index.modulus | 59, 129 |
| abstract_inverted_index.nitride | 33, 42 |
| abstract_inverted_index.silicon | 32, 41 |
| abstract_inverted_index.stress. | 115 |
| abstract_inverted_index.thermal | 111 |
| abstract_inverted_index.varying | 51 |
| abstract_inverted_index.chemical | 29 |
| abstract_inverted_index.collapse | 149 |
| abstract_inverted_index.measured | 67 |
| abstract_inverted_index.observed | 93 |
| abstract_inverted_index.resonant | 12 |
| abstract_inverted_index.capillary | 138 |
| abstract_inverted_index.deposited | 31 |
| abstract_inverted_index.explained | 107 |
| abstract_inverted_index.intrinsic | 114 |
| abstract_inverted_index.membrane, | 104 |
| abstract_inverted_index.membrane. | 152 |
| abstract_inverted_index.membranes | 24, 39, 65, 81 |
| abstract_inverted_index.reduction | 95 |
| abstract_inverted_index.resonator | 5 |
| abstract_inverted_index.substrate | 146 |
| abstract_inverted_index.suspended | 23, 64, 80, 103, 144, 151 |
| abstract_inverted_index.thickness | 44 |
| abstract_inverted_index.ultrathin | 132 |
| abstract_inverted_index.Mechanical | 0 |
| abstract_inverted_index.Microscope | 71 |
| abstract_inverted_index.estimating | 109 |
| abstract_inverted_index.fabricated | 25, 37 |
| abstract_inverted_index.mechanical | 20 |
| abstract_inverted_index.membranes. | 133 |
| abstract_inverted_index.properties | 1, 21 |
| abstract_inverted_index.(AFM)-based | 72 |
| abstract_inverted_index.fabrication | 101 |
| abstract_inverted_index.membrane-Si | 145 |
| abstract_inverted_index.performance | 9 |
| abstract_inverted_index.low-pressure | 28 |
| abstract_inverted_index.mathematical | 120 |
| abstract_inverted_index.on-substrate | 89 |
| abstract_inverted_index.corresponding | 88 |
| abstract_inverted_index.significantly | 6, 83 |
| abstract_inverted_index.spectroscopy. | 74 |
| abstract_inverted_index.doubly-clamped | 38 |
| abstract_inverted_index.force-gradient | 139 |
| abstract_inverted_index.nanomechanical | 4, 73 |
| abstract_inverted_index.thickness-dependent | 127 |
| abstract_inverted_index.Nano-electromechanical | 13 |
| cited_by_percentile_year.max | 94 |
| cited_by_percentile_year.min | 89 |
| corresponding_author_ids | https://openalex.org/A5021027571 |
| countries_distinct_count | 1 |
| institutions_distinct_count | 3 |
| corresponding_institution_ids | https://openalex.org/I59270414 |
| citation_normalized_percentile.value | 0.66302354 |
| citation_normalized_percentile.is_in_top_1_percent | False |
| citation_normalized_percentile.is_in_top_10_percent | False |