Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer Article Swipe

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Nathan Nakamura , Paul Szypryt , Amber L. Dagel , Bradley K. Alpert , D. A. Bennett , W. B. Doriese , Malcolm Durkin , Joseph W. Fowler , Dylan T. Fox , Johnathon D. Gard , Ryan N. Goodner , J. Zachariah Harris , G. C. Hilton , Edward S. Jimenez , Burke L. Kernen , Kurt W. Larson , Zachary H. Levine , Daniel McArthur , Kelsey M. Morgan , G. C. O’Neil , Nathan J. Ortiz , Christine G. Pappas , C. D. Reintsema , Daniel Schmidt , P. A. Schulz , Kyle Thompson , Joel N. Ullom , Leila R. Vale , Courtenay Vaughan , Christopher J. Walker , Joel C. Weber , Jason Wheeler , Daniel S. Swetz ·

YOU? · · 2022 · Open Access · · DOI: https://doi.org/10.48550/arxiv.2212.10591

X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but is difficult to implement due to competing requirements on X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while changing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot in a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with high signal-to-noise. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enable nanoscale, element-specific X-ray imaging in a compact footprint. The proof-of-concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in 6 layers of a Cu-SiO2 integrated circuit, and a path towards finer resolution and enhanced imaging capabilities is discussed.

Related Topics

Scanning Electron Microscope

Scanning Transmission Electron Microscopy

Physics

Nanotechnology

Computer Science

Artificial Intelligence

Bolometer

Concepts

Spectrometer Optics Microscope Transition edge sensor Materials science Nanoscopic scale Resolution (logic) Synchrotron Image resolution Microscopy Electron tomography Scanning electron microscope Scanning transmission electron microscopy Detector Physics Nanotechnology Computer science Artificial intelligence Bolometer

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Type: preprint
Language: en
Landing Page: http://arxiv.org/abs/2212.10591
PDF: https://arxiv.org/pdf/2212.10591
OA Status: green
Cited By: 3
Related Works: 10
OpenAlex ID: https://openalex.org/W4312107278

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DOI: https://doi.org/10.48550/arxiv.2212.10591

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Title: Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer

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Type: preprint

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Language: en

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Publication year: 2022

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Publication date: 2022-12-20

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Authors: Nathan Nakamura, Paul Szypryt, Amber L. Dagel, Bradley K. Alpert, D. A. Bennett, W. B. Doriese, Malcolm Durkin, Joseph W. Fowler, Dylan T. Fox, Johnathon D. Gard, Ryan N. Goodner, J. Zachariah Harris, G. C. Hilton, Edward S. Jimenez, Burke L. Kernen, Kurt W. Larson, Zachary H. Levine, Daniel McArthur, Kelsey M. Morgan, G. C. O’Neil, Nathan J. Ortiz, Christine G. Pappas, C. D. Reintsema, Daniel Schmidt, P. A. Schulz, Kyle Thompson, Joel N. Ullom, Leila R. Vale, Courtenay Vaughan, Christopher J. Walker, Joel C. Weber, Jason Wheeler, Daniel S. Swetz

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Landing page: https://arxiv.org/abs/2212.10591

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Concepts: Spectrometer, Optics, Microscope, Transition edge sensor, Materials science, Nanoscopic scale, Resolution (logic), Synchrotron, Image resolution, Microscopy, Electron tomography, Scanning electron microscope, Scanning transmission electron microscopy, Detector, Physics, Nanotechnology, Computer science, Artificial intelligence, Bolometer

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Cited by: 3

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Citations by year (recent): 2023: 2, 2022: 1

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Full payload

id	https://openalex.org/W4312107278
doi	https://doi.org/10.48550/arxiv.2212.10591
ids.doi	https://doi.org/10.48550/arxiv.2212.10591
ids.openalex	https://openalex.org/W4312107278
fwci
type	preprint
title	Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer
biblio.issue
biblio.volume
biblio.last_page
biblio.first_page
topics[0].id	https://openalex.org/T10037
topics[0].field.id	https://openalex.org/fields/31
topics[0].field.display_name	Physics and Astronomy
topics[0].score	1.0
topics[0].domain.id	https://openalex.org/domains/3
topics[0].domain.display_name	Physical Sciences
topics[0].subfield.id	https://openalex.org/subfields/3104
topics[0].subfield.display_name	Condensed Matter Physics
topics[0].display_name	Physics of Superconductivity and Magnetism
topics[1].id	https://openalex.org/T11803
topics[1].field.id	https://openalex.org/fields/31
topics[1].field.display_name	Physics and Astronomy
topics[1].score	0.9998000264167786
topics[1].domain.id	https://openalex.org/domains/3
topics[1].domain.display_name	Physical Sciences
topics[1].subfield.id	https://openalex.org/subfields/3103
topics[1].subfield.display_name	Astronomy and Astrophysics
topics[1].display_name	Superconducting and THz Device Technology
topics[2].id	https://openalex.org/T10049
topics[2].field.id	https://openalex.org/fields/31
topics[2].field.display_name	Physics and Astronomy
topics[2].score	0.9988999962806702
topics[2].domain.id	https://openalex.org/domains/3
topics[2].domain.display_name	Physical Sciences
topics[2].subfield.id	https://openalex.org/subfields/3107
topics[2].subfield.display_name	Atomic and Molecular Physics, and Optics
topics[2].display_name	Magnetic properties of thin films
is_xpac	False
apc_list
apc_paid
concepts[0].id	https://openalex.org/C33390570
concepts[0].level	2
concepts[0].score	0.6556448340415955
concepts[0].wikidata	https://www.wikidata.org/wiki/Q188463
concepts[0].display_name	Spectrometer
concepts[1].id	https://openalex.org/C120665830
concepts[1].level	1
concepts[1].score	0.6229775547981262
concepts[1].wikidata	https://www.wikidata.org/wiki/Q14620
concepts[1].display_name	Optics
concepts[2].id	https://openalex.org/C67649825
concepts[2].level	2
concepts[2].score	0.5335147380828857
concepts[2].wikidata	https://www.wikidata.org/wiki/Q196538
concepts[2].display_name	Microscope
concepts[3].id	https://openalex.org/C2778769035
concepts[3].level	4
concepts[3].score	0.5096251964569092
concepts[3].wikidata	https://www.wikidata.org/wiki/Q7834409
concepts[3].display_name	Transition edge sensor
concepts[4].id	https://openalex.org/C192562407
concepts[4].level	0
concepts[4].score	0.49869465827941895
concepts[4].wikidata	https://www.wikidata.org/wiki/Q228736
concepts[4].display_name	Materials science
concepts[5].id	https://openalex.org/C45206210
concepts[5].level	2
concepts[5].score	0.4978017807006836
concepts[5].wikidata	https://www.wikidata.org/wiki/Q2415817
concepts[5].display_name	Nanoscopic scale
concepts[6].id	https://openalex.org/C138268822
concepts[6].level	2
concepts[6].score	0.4833824038505554
concepts[6].wikidata	https://www.wikidata.org/wiki/Q1051925
concepts[6].display_name	Resolution (logic)
concepts[7].id	https://openalex.org/C21368211
concepts[7].level	2
concepts[7].score	0.47872114181518555
concepts[7].wikidata	https://www.wikidata.org/wiki/Q689863
concepts[7].display_name	Synchrotron
concepts[8].id	https://openalex.org/C205372480
concepts[8].level	2
concepts[8].score	0.44859257340431213
concepts[8].wikidata	https://www.wikidata.org/wiki/Q210521
concepts[8].display_name	Image resolution
concepts[9].id	https://openalex.org/C147080431
concepts[9].level	2
concepts[9].score	0.4381101429462433
concepts[9].wikidata	https://www.wikidata.org/wiki/Q1074953
concepts[9].display_name	Microscopy
concepts[10].id	https://openalex.org/C75806775
concepts[10].level	4
concepts[10].score	0.4211481809616089
concepts[10].wikidata	https://www.wikidata.org/wiki/Q5358194
concepts[10].display_name	Electron tomography
concepts[11].id	https://openalex.org/C26771246
concepts[11].level	2
concepts[11].score	0.4118034839630127
concepts[11].wikidata	https://www.wikidata.org/wiki/Q321095
concepts[11].display_name	Scanning electron microscope
concepts[12].id	https://openalex.org/C193016168
concepts[12].level	3
concepts[12].score	0.38552331924438477
concepts[12].wikidata	https://www.wikidata.org/wiki/Q874835
concepts[12].display_name	Scanning transmission electron microscopy
concepts[13].id	https://openalex.org/C94915269
concepts[13].level	2
concepts[13].score	0.3555563688278198
concepts[13].wikidata	https://www.wikidata.org/wiki/Q1834857
concepts[13].display_name	Detector
concepts[14].id	https://openalex.org/C121332964
concepts[14].level	0
concepts[14].score	0.3360482156276703
concepts[14].wikidata	https://www.wikidata.org/wiki/Q413
concepts[14].display_name	Physics
concepts[15].id	https://openalex.org/C171250308
concepts[15].level	1
concepts[15].score	0.28855225443840027
concepts[15].wikidata	https://www.wikidata.org/wiki/Q11468
concepts[15].display_name	Nanotechnology
concepts[16].id	https://openalex.org/C41008148
concepts[16].level	0
concepts[16].score	0.09678110480308533
concepts[16].wikidata	https://www.wikidata.org/wiki/Q21198
concepts[16].display_name	Computer science
concepts[17].id	https://openalex.org/C154945302
concepts[17].level	1
concepts[17].score	0.0
concepts[17].wikidata	https://www.wikidata.org/wiki/Q11660
concepts[17].display_name	Artificial intelligence
concepts[18].id	https://openalex.org/C21028948
concepts[18].level	3
concepts[18].score	0.0
concepts[18].wikidata	https://www.wikidata.org/wiki/Q852212
concepts[18].display_name	Bolometer
keywords[0].id	https://openalex.org/keywords/spectrometer
keywords[0].score	0.6556448340415955
keywords[0].display_name	Spectrometer
keywords[1].id	https://openalex.org/keywords/optics
keywords[1].score	0.6229775547981262
keywords[1].display_name	Optics
keywords[2].id	https://openalex.org/keywords/microscope
keywords[2].score	0.5335147380828857
keywords[2].display_name	Microscope
keywords[3].id	https://openalex.org/keywords/transition-edge-sensor
keywords[3].score	0.5096251964569092
keywords[3].display_name	Transition edge sensor
keywords[4].id	https://openalex.org/keywords/materials-science
keywords[4].score	0.49869465827941895
keywords[4].display_name	Materials science
keywords[5].id	https://openalex.org/keywords/nanoscopic-scale
keywords[5].score	0.4978017807006836
keywords[5].display_name	Nanoscopic scale
keywords[6].id	https://openalex.org/keywords/resolution
keywords[6].score	0.4833824038505554
keywords[6].display_name	Resolution (logic)
keywords[7].id	https://openalex.org/keywords/synchrotron
keywords[7].score	0.47872114181518555
keywords[7].display_name	Synchrotron
keywords[8].id	https://openalex.org/keywords/image-resolution
keywords[8].score	0.44859257340431213
keywords[8].display_name	Image resolution
keywords[9].id	https://openalex.org/keywords/microscopy
keywords[9].score	0.4381101429462433
keywords[9].display_name	Microscopy
keywords[10].id	https://openalex.org/keywords/electron-tomography
keywords[10].score	0.4211481809616089
keywords[10].display_name	Electron tomography
keywords[11].id	https://openalex.org/keywords/scanning-electron-microscope
keywords[11].score	0.4118034839630127
keywords[11].display_name	Scanning electron microscope
keywords[12].id	https://openalex.org/keywords/scanning-transmission-electron-microscopy
keywords[12].score	0.38552331924438477
keywords[12].display_name	Scanning transmission electron microscopy
keywords[13].id	https://openalex.org/keywords/detector
keywords[13].score	0.3555563688278198
keywords[13].display_name	Detector
keywords[14].id	https://openalex.org/keywords/physics
keywords[14].score	0.3360482156276703
keywords[14].display_name	Physics
keywords[15].id	https://openalex.org/keywords/nanotechnology
keywords[15].score	0.28855225443840027
keywords[15].display_name	Nanotechnology
keywords[16].id	https://openalex.org/keywords/computer-science
keywords[16].score	0.09678110480308533
keywords[16].display_name	Computer science
language	en
locations[0].id	pmh:oai:arXiv.org:2212.10591
locations[0].is_oa	True
locations[0].source.id	https://openalex.org/S4306400194
locations[0].source.issn
locations[0].source.type	repository
locations[0].source.is_oa	True
locations[0].source.issn_l
locations[0].source.is_core	False
locations[0].source.is_in_doaj	False
locations[0].source.display_name	arXiv (Cornell University)
locations[0].source.host_organization	https://openalex.org/I205783295
locations[0].source.host_organization_name	Cornell University
locations[0].source.host_organization_lineage	https://openalex.org/I205783295
locations[0].license
locations[0].pdf_url	https://arxiv.org/pdf/2212.10591
locations[0].version	submittedVersion
locations[0].raw_type
locations[0].license_id
locations[0].is_accepted	False
locations[0].is_published	False
locations[0].raw_source_name
locations[0].landing_page_url	http://arxiv.org/abs/2212.10591
locations[1].id	doi:10.48550/arxiv.2212.10591
locations[1].is_oa	True
locations[1].source.id	https://openalex.org/S4306400194
locations[1].source.issn
locations[1].source.type	repository
locations[1].source.is_oa	True
locations[1].source.issn_l
locations[1].source.is_core	False
locations[1].source.is_in_doaj	False
locations[1].source.display_name	arXiv (Cornell University)
locations[1].source.host_organization	https://openalex.org/I205783295
locations[1].source.host_organization_name	Cornell University
locations[1].source.host_organization_lineage	https://openalex.org/I205783295
locations[1].license
locations[1].pdf_url
locations[1].version
locations[1].raw_type	article
locations[1].license_id
locations[1].is_accepted	False
locations[1].is_published
locations[1].raw_source_name
locations[1].landing_page_url	https://doi.org/10.48550/arxiv.2212.10591
indexed_in	arxiv, datacite
authorships[0].author.id	https://openalex.org/A5042211462
authorships[0].author.orcid	https://orcid.org/0000-0001-8648-0524
authorships[0].author.display_name	Nathan Nakamura
authorships[0].author_position	first
authorships[0].raw_author_name	Nakamura, Nathan
authorships[0].is_corresponding	False
authorships[1].author.id	https://openalex.org/A5073552047
authorships[1].author.orcid	https://orcid.org/0000-0002-0184-3419
authorships[1].author.display_name	Paul Szypryt
authorships[1].author_position	middle
authorships[1].raw_author_name	Szypryt, Paul
authorships[1].is_corresponding	False
authorships[2].author.id	https://openalex.org/A5087564775
authorships[2].author.orcid	https://orcid.org/0000-0002-5882-1640
authorships[2].author.display_name	Amber L. Dagel
authorships[2].author_position	middle
authorships[2].raw_author_name	Dagel, Amber L.
authorships[2].is_corresponding	False
authorships[3].author.id	https://openalex.org/A5079742124
authorships[3].author.orcid	https://orcid.org/0000-0001-9765-9642
authorships[3].author.display_name	Bradley K. Alpert
authorships[3].author_position	middle
authorships[3].raw_author_name	Alpert, Bradley K.
authorships[3].is_corresponding	False
authorships[4].author.id	https://openalex.org/A5052612697
authorships[4].author.orcid	https://orcid.org/0000-0003-3011-3690
authorships[4].author.display_name	D. A. Bennett
authorships[4].author_position	middle
authorships[4].raw_author_name	Bennett, Douglas A.
authorships[4].is_corresponding	False
authorships[5].author.id	https://openalex.org/A5054880879
authorships[5].author.orcid	https://orcid.org/0000-0003-1107-6441
authorships[5].author.display_name	W. B. Doriese
authorships[5].author_position	middle
authorships[5].raw_author_name	Doriese, W. Bertrand
authorships[5].is_corresponding	False
authorships[6].author.id	https://openalex.org/A5036565983
authorships[6].author.orcid	https://orcid.org/0000-0001-5640-2525
authorships[6].author.display_name	Malcolm Durkin
authorships[6].author_position	middle
authorships[6].raw_author_name	Durkin, Malcolm
authorships[6].is_corresponding	False
authorships[7].author.id	https://openalex.org/A5078796710
authorships[7].author.orcid	https://orcid.org/0000-0001-5679-2236
authorships[7].author.display_name	Joseph W. Fowler
authorships[7].author_position	middle
authorships[7].raw_author_name	Fowler, Joseph W.
authorships[7].is_corresponding	False
authorships[8].author.id	https://openalex.org/A5090535850
authorships[8].author.orcid
authorships[8].author.display_name	Dylan T. Fox
authorships[8].author_position	middle
authorships[8].raw_author_name	Fox, Dylan T.
authorships[8].is_corresponding	False
authorships[9].author.id	https://openalex.org/A5078458803
authorships[9].author.orcid	https://orcid.org/0000-0003-4195-9544
authorships[9].author.display_name	Johnathon D. Gard
authorships[9].author_position	middle
authorships[9].raw_author_name	Gard, Johnathon D.
authorships[9].is_corresponding	False
authorships[10].author.id	https://openalex.org/A5066369982
authorships[10].author.orcid
authorships[10].author.display_name	Ryan N. Goodner
authorships[10].author_position	middle
authorships[10].raw_author_name	Goodner, Ryan N.
authorships[10].is_corresponding	False
authorships[11].author.id	https://openalex.org/A5053148775
authorships[11].author.orcid
authorships[11].author.display_name	J. Zachariah Harris
authorships[11].author_position	middle
authorships[11].raw_author_name	Harris, J. Zachariah
authorships[11].is_corresponding	False
authorships[12].author.id	https://openalex.org/A5009147998
authorships[12].author.orcid	https://orcid.org/0000-0003-4247-467X
authorships[12].author.display_name	G. C. Hilton
authorships[12].author_position	middle
authorships[12].raw_author_name	Hilton, Gene C.
authorships[12].is_corresponding	False
authorships[13].author.id	https://openalex.org/A5037135833
authorships[13].author.orcid	https://orcid.org/0009-0002-4647-7309
authorships[13].author.display_name	Edward S. Jimenez
authorships[13].author_position	middle
authorships[13].raw_author_name	Jimenez, Edward S.
authorships[13].is_corresponding	False
authorships[14].author.id	https://openalex.org/A5052171582
authorships[14].author.orcid
authorships[14].author.display_name	Burke L. Kernen
authorships[14].author_position	middle
authorships[14].raw_author_name	Kernen, Burke L.
authorships[14].is_corresponding	False
authorships[15].author.id	https://openalex.org/A5110323323
authorships[15].author.orcid
authorships[15].author.display_name	Kurt W. Larson
authorships[15].author_position	middle
authorships[15].raw_author_name	Larson, Kurt W.
authorships[15].is_corresponding	False
authorships[16].author.id	https://openalex.org/A5108191195
authorships[16].author.orcid
authorships[16].author.display_name	Zachary H. Levine
authorships[16].author_position	middle
authorships[16].raw_author_name	Levine, Zachary H.
authorships[16].is_corresponding	False
authorships[17].author.id	https://openalex.org/A5047750530
authorships[17].author.orcid	https://orcid.org/0000-0002-7310-9897
authorships[17].author.display_name	Daniel McArthur
authorships[17].author_position	middle
authorships[17].raw_author_name	McArthur, Daniel
authorships[17].is_corresponding	False
authorships[18].author.id	https://openalex.org/A5104384839
authorships[18].author.orcid	https://orcid.org/0000-0002-6597-1030
authorships[18].author.display_name	Kelsey M. Morgan
authorships[18].author_position	middle
authorships[18].raw_author_name	Morgan, Kelsey M.
authorships[18].is_corresponding	False
authorships[19].author.id	https://openalex.org/A5075621959
authorships[19].author.orcid	https://orcid.org/0000-0003-3450-2263
authorships[19].author.display_name	G. C. O’Neil
authorships[19].author_position	middle
authorships[19].raw_author_name	O'Neil, Galen C.
authorships[19].is_corresponding	False
authorships[20].author.id	https://openalex.org/A5074683622
authorships[20].author.orcid
authorships[20].author.display_name	Nathan J. Ortiz
authorships[20].author_position	middle
authorships[20].raw_author_name	Ortiz, Nathan J.
authorships[20].is_corresponding	False
authorships[21].author.id	https://openalex.org/A5083583543
authorships[21].author.orcid	https://orcid.org/0000-0001-7759-5944
authorships[21].author.display_name	Christine G. Pappas
authorships[21].author_position	middle
authorships[21].raw_author_name	Pappas, Christine G.
authorships[21].is_corresponding	False
authorships[22].author.id	https://openalex.org/A5076208964
authorships[22].author.orcid	https://orcid.org/0000-0001-8505-4638
authorships[22].author.display_name	C. D. Reintsema
authorships[22].author_position	middle
authorships[22].raw_author_name	Reintsema, Carl D.
authorships[22].is_corresponding	False
authorships[23].author.id	https://openalex.org/A5103057597
authorships[23].author.orcid	https://orcid.org/0009-0009-1627-5790
authorships[23].author.display_name	Daniel Schmidt
authorships[23].author_position	middle
authorships[23].raw_author_name	Schmidt, Daniel R.
authorships[23].is_corresponding	False
authorships[24].author.id	https://openalex.org/A5019941453
authorships[24].author.orcid	https://orcid.org/0000-0002-3147-1185
authorships[24].author.display_name	P. A. Schulz
authorships[24].author_position	middle
authorships[24].raw_author_name	Schulz, Peter A.
authorships[24].is_corresponding	False
authorships[25].author.id	https://openalex.org/A5026665625
authorships[25].author.orcid	https://orcid.org/0000-0002-2868-7612
authorships[25].author.display_name	Kyle Thompson
authorships[25].author_position	middle
authorships[25].raw_author_name	Thompson, Kyle R.
authorships[25].is_corresponding	False
authorships[26].author.id	https://openalex.org/A5062323724
authorships[26].author.orcid	https://orcid.org/0000-0003-2486-4025
authorships[26].author.display_name	Joel N. Ullom
authorships[26].author_position	middle
authorships[26].raw_author_name	Ullom, Joel N.
authorships[26].is_corresponding	False
authorships[27].author.id	https://openalex.org/A5063761705
authorships[27].author.orcid	https://orcid.org/0000-0001-8561-2580
authorships[27].author.display_name	Leila R. Vale
authorships[27].author_position	middle
authorships[27].raw_author_name	Vale, Leila
authorships[27].is_corresponding	False
authorships[28].author.id	https://openalex.org/A5081059242
authorships[28].author.orcid
authorships[28].author.display_name	Courtenay Vaughan
authorships[28].author_position	middle
authorships[28].raw_author_name	Vaughan, Courtenay T.
authorships[28].is_corresponding	False
authorships[29].author.id	https://openalex.org/A5015187893
authorships[29].author.orcid	https://orcid.org/0000-0002-1819-7388
authorships[29].author.display_name	Christopher J. Walker
authorships[29].author_position	middle
authorships[29].raw_author_name	Walker, Christopher
authorships[29].is_corresponding	False
authorships[30].author.id	https://openalex.org/A5077881817
authorships[30].author.orcid	https://orcid.org/0000-0001-9972-0208
authorships[30].author.display_name	Joel C. Weber
authorships[30].author_position	middle
authorships[30].raw_author_name	Weber, Joel C.
authorships[30].is_corresponding	False
authorships[31].author.id	https://openalex.org/A5110444327
authorships[31].author.orcid
authorships[31].author.display_name	Jason Wheeler
authorships[31].author_position	middle
authorships[31].raw_author_name	Wheeler, Jason W.
authorships[31].is_corresponding	False
authorships[32].author.id	https://openalex.org/A5053610594
authorships[32].author.orcid	https://orcid.org/0000-0002-8192-2175
authorships[32].author.display_name	Daniel S. Swetz
authorships[32].author_position	last
authorships[32].raw_author_name	Swetz, Daniel S.
authorships[32].is_corresponding	False
has_content.pdf	False
has_content.grobid_xml	False
is_paratext	False
open_access.is_oa	True
open_access.oa_url	https://arxiv.org/pdf/2212.10591
open_access.oa_status	green
open_access.any_repository_has_fulltext	False
created_date	2023-01-04T00:00:00
display_name	Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer
has_fulltext	False
is_retracted	False
updated_date	2025-11-06T06:51:31.235846
primary_topic.id	https://openalex.org/T10037
primary_topic.field.id	https://openalex.org/fields/31
primary_topic.field.display_name	Physics and Astronomy
primary_topic.score	1.0
primary_topic.domain.id	https://openalex.org/domains/3
primary_topic.domain.display_name	Physical Sciences
primary_topic.subfield.id	https://openalex.org/subfields/3104
primary_topic.subfield.display_name	Condensed Matter Physics
primary_topic.display_name	Physics of Superconductivity and Magnetism
related_works	https://openalex.org/W2028347506, https://openalex.org/W2054392061, https://openalex.org/W4389558632, https://openalex.org/W4387826508, https://openalex.org/W2062638405, https://openalex.org/W4377020178, https://openalex.org/W2561057200, https://openalex.org/W2054825880, https://openalex.org/W2087032394, https://openalex.org/W2079525512
cited_by_count	3
counts_by_year[0].year	2023
counts_by_year[0].cited_by_count	2
counts_by_year[1].year	2022
counts_by_year[1].cited_by_count	1
locations_count	2
best_oa_location.id	pmh:oai:arXiv.org:2212.10591
best_oa_location.is_oa	True
best_oa_location.source.id	https://openalex.org/S4306400194
best_oa_location.source.issn
best_oa_location.source.type	repository
best_oa_location.source.is_oa	True
best_oa_location.source.issn_l
best_oa_location.source.is_core	False
best_oa_location.source.is_in_doaj	False
best_oa_location.source.display_name	arXiv (Cornell University)
best_oa_location.source.host_organization	https://openalex.org/I205783295
best_oa_location.source.host_organization_name	Cornell University
best_oa_location.source.host_organization_lineage	https://openalex.org/I205783295
best_oa_location.license
best_oa_location.pdf_url	https://arxiv.org/pdf/2212.10591
best_oa_location.version	submittedVersion
best_oa_location.raw_type
best_oa_location.license_id
best_oa_location.is_accepted	False
best_oa_location.is_published	False
best_oa_location.raw_source_name
best_oa_location.landing_page_url	http://arxiv.org/abs/2212.10591
primary_location.id	pmh:oai:arXiv.org:2212.10591
primary_location.is_oa	True
primary_location.source.id	https://openalex.org/S4306400194
primary_location.source.issn
primary_location.source.type	repository
primary_location.source.is_oa	True
primary_location.source.issn_l
primary_location.source.is_core	False
primary_location.source.is_in_doaj	False
primary_location.source.display_name	arXiv (Cornell University)
primary_location.source.host_organization	https://openalex.org/I205783295
primary_location.source.host_organization_name	Cornell University
primary_location.source.host_organization_lineage	https://openalex.org/I205783295
primary_location.license
primary_location.pdf_url	https://arxiv.org/pdf/2212.10591
primary_location.version	submittedVersion
primary_location.raw_type
primary_location.license_id
primary_location.is_accepted	False
primary_location.is_published	False
primary_location.raw_source_name
primary_location.landing_page_url	http://arxiv.org/abs/2212.10591
publication_date	2022-12-20
publication_year	2022
referenced_works_count	0
abstract_inverted_index.6	159
abstract_inverted_index.a	3, 44, 68, 80, 90, 96, 120, 137, 162, 167
abstract_inverted_index.We	42
abstract_inverted_index.at	38
abstract_inverted_index.by	150
abstract_inverted_index.in	95, 136, 155, 158
abstract_inverted_index.is	2, 15, 35, 148, 176
abstract_inverted_index.nm	153
abstract_inverted_index.of	9, 57, 67, 79, 105, 119, 161
abstract_inverted_index.on	23
abstract_inverted_index.to	17, 20, 30, 145
abstract_inverted_index.160	152
abstract_inverted_index.Due	29
abstract_inverted_index.TES	109
abstract_inverted_index.The	61, 86, 140
abstract_inverted_index.and	12, 26, 127, 166, 172
abstract_inverted_index.but	14
abstract_inverted_index.due	19
abstract_inverted_index.for	6, 142
abstract_inverted_index.the	7, 55, 64, 74, 103, 108
abstract_inverted_index.This	117
abstract_inverted_index.away	101
abstract_inverted_index.beam	66, 88
abstract_inverted_index.flux	25
abstract_inverted_index.from	102
abstract_inverted_index.held	99
abstract_inverted_index.high	115
abstract_inverted_index.path	168
abstract_inverted_index.spot	27, 94
abstract_inverted_index.that	48
abstract_inverted_index.this	31, 143
abstract_inverted_index.tool	5
abstract_inverted_index.with	73, 114
abstract_inverted_index.(SEM)	72
abstract_inverted_index.(TES)	84
abstract_inverted_index.X-ray	0, 24, 77, 93, 122, 125, 134, 146
abstract_inverted_index.finer	170
abstract_inverted_index.large	39
abstract_inverted_index.metal	97
abstract_inverted_index.size.	28
abstract_inverted_index.spot,	123
abstract_inverted_index.three	156
abstract_inverted_index.while	53, 107
abstract_inverted_index.enable	131
abstract_inverted_index.highly	91
abstract_inverted_index.layers	160
abstract_inverted_index.sample	104
abstract_inverted_index.sensor	83
abstract_inverted_index.system	129
abstract_inverted_index.target	98, 112
abstract_inverted_index.tools.	60
abstract_inverted_index.unique	128
abstract_inverted_index.Cu-SiO2	163
abstract_inverted_index.compact	138
abstract_inverted_index.focused	92, 121
abstract_inverted_index.imaging	135, 151, 174
abstract_inverted_index.photons	113
abstract_inverted_index.present	43
abstract_inverted_index.spatial	51
abstract_inverted_index.towards	169
abstract_inverted_index.achieves	49
abstract_inverted_index.approach	144
abstract_inverted_index.changing	54
abstract_inverted_index.circuit,	165
abstract_inverted_index.combines	63
abstract_inverted_index.electron	65, 70, 87
abstract_inverted_index.enhanced	173
abstract_inverted_index.features	154
abstract_inverted_index.geometry	130
abstract_inverted_index.isolates	111
abstract_inverted_index.powerful	4
abstract_inverted_index.precise,	75
abstract_inverted_index.scanning	69
abstract_inverted_index.broadband	76
abstract_inverted_index.competing	21
abstract_inverted_index.detection	78
abstract_inverted_index.difficult	16
abstract_inverted_index.generates	89
abstract_inverted_index.implement	18
abstract_inverted_index.interest,	106
abstract_inverted_index.materials	11
abstract_inverted_index.nanoscale	10, 50
abstract_inverted_index.performed	37
abstract_inverted_index.detection,	126
abstract_inverted_index.dimensions	157
abstract_inverted_index.discussed.	177
abstract_inverted_index.footprint.	139
abstract_inverted_index.instrument	47, 62
abstract_inverted_index.integrated	164
abstract_inverted_index.microscope	71
abstract_inverted_index.nanoscale,	132
abstract_inverted_index.resolution	52, 171
abstract_inverted_index.tomography	59
abstract_inverted_index.combination	118
abstract_inverted_index.constraint,	32
abstract_inverted_index.facilities.	41
abstract_inverted_index.limitations	56
abstract_inverted_index.micrometers	100
abstract_inverted_index.structures,	13
abstract_inverted_index.synchrotron	40
abstract_inverted_index.capabilities	175
abstract_inverted_index.conventional	58
abstract_inverted_index.demonstrated	149
abstract_inverted_index.requirements	22
abstract_inverted_index.spectrometer	110
abstract_inverted_index.predominantly	36
abstract_inverted_index.nanotomography	1, 34, 46, 147
abstract_inverted_index.energy-resolved	124
abstract_inverted_index.superconducting	81
abstract_inverted_index.transition-edge	82
abstract_inverted_index.characterization	8
abstract_inverted_index.element-specific	133
abstract_inverted_index.laboratory-scale	45
abstract_inverted_index.proof-of-concept	141
abstract_inverted_index.signal-to-noise.	116
abstract_inverted_index.state-of-the-art	33
abstract_inverted_index.microcalorimeter.	85
cited_by_percentile_year
countries_distinct_count	0
institutions_distinct_count	33
sustainable_development_goals[0].id	https://metadata.un.org/sdg/7
sustainable_development_goals[0].score	0.5
sustainable_development_goals[0].display_name	Affordable and clean energy
citation_normalized_percentile