Observation of SiO2Nanoparticle Formation via UV Pulsed Laser Ablation in a Background Gas Article Swipe
YOU?
·
· 2021
· Open Access
·
· DOI: https://doi.org/10.2961/jlmn.2021.03.2006
SiO2 nanoporous films have recently gained significant popularity as low-k dielectric constant insulating films.In this study, we demonstrated the fabrication of a low-k SiO 2 nanoporous film consisting of SiO2 nanoparticles by pulsed laser deposition.However, to optimize the growth conditions of nanoporous films, it is important to understand the spatial and size distribution of nanoparticles produced by laser ablation.Here, we visualized laser-ablated SiO2 nanoparticles using a two-dimensional laser scattering imaging technique and investigated the influence of gas species and pressure on the spatial distribution of the nanoparticles in the gas phase.After the decay of the plasma emission within several microseconds, a spherical-shaped scattering image depicting the spatial distribution of SiO2 nanoparticles was obtained from a delay time of approximately 10 ms.In Ar gas, the sphericalshaped distribution of SiO 2 nanoparticles changed to an ellipsoidal shape with increasing pressure, whereas in O2 gas, it changed a mushroom-like shape.These results show that the gas species and pressure are dominant parameters affecting the spatial distribution of nanoparticle formation.
Related Topics
- Type
- article
- Language
- en
- Landing Page
- http://doi.org/10.2961/jlmn.2021.03.2006
- https://doi.org/10.2961/jlmn.2021.03.2006
- OA Status
- diamond
- Cited By
- 1
- Related Works
- 10
- OpenAlex ID
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Raw OpenAlex JSON
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https://openalex.org/W4205087168Canonical identifier for this work in OpenAlex
- DOI
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https://doi.org/10.2961/jlmn.2021.03.2006Digital Object Identifier
- Title
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Observation of SiO2Nanoparticle Formation via UV Pulsed Laser Ablation in a Background GasWork title
- Type
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articleOpenAlex work type
- Language
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enPrimary language
- Publication year
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2021Year of publication
- Publication date
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2021-12-01Full publication date if available
- Authors
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Reiji Koike, Rio Suzuki, Keita Katayama, Mitsuhiro Higashihata, Hiroshi Ikenoue, Daisuke NakamuraList of authors in order
- Landing page
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https://doi.org/10.2961/jlmn.2021.03.2006Publisher landing page
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https://doi.org/10.2961/jlmn.2021.03.2006Direct link to full text PDF
- Open access
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YesWhether a free full text is available
- OA status
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diamondOpen access status per OpenAlex
- OA URL
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https://doi.org/10.2961/jlmn.2021.03.2006Direct OA link when available
- Concepts
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Materials science, Ablation, Laser ablation, Laser, Optoelectronics, Optics, Physics, Aerospace engineering, EngineeringTop concepts (fields/topics) attached by OpenAlex
- Cited by
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1Total citation count in OpenAlex
- Citations by year (recent)
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2022: 1Per-year citation counts (last 5 years)
- Related works (count)
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10Other works algorithmically related by OpenAlex
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| abstract_inverted_index.increasing | 136 |
| abstract_inverted_index.insulating | 12 |
| abstract_inverted_index.nanoporous | 1, 25, 41 |
| abstract_inverted_index.parameters | 157 |
| abstract_inverted_index.popularity | 7 |
| abstract_inverted_index.scattering | 68, 102 |
| abstract_inverted_index.understand | 47 |
| abstract_inverted_index.visualized | 60 |
| abstract_inverted_index.ellipsoidal | 133 |
| abstract_inverted_index.fabrication | 19 |
| abstract_inverted_index.phase.After | 90 |
| abstract_inverted_index.shape.These | 146 |
| abstract_inverted_index.significant | 6 |
| abstract_inverted_index.demonstrated | 17 |
| abstract_inverted_index.distribution | 52, 83, 107, 125, 161 |
| abstract_inverted_index.investigated | 72 |
| abstract_inverted_index.nanoparticle | 163 |
| abstract_inverted_index.approximately | 118 |
| abstract_inverted_index.laser-ablated | 61 |
| abstract_inverted_index.microseconds, | 99 |
| abstract_inverted_index.mushroom-like | 145 |
| abstract_inverted_index.nanoparticles | 30, 54, 63, 86, 110, 129 |
| abstract_inverted_index.ablation.Here, | 58 |
| abstract_inverted_index.sphericalshaped | 124 |
| abstract_inverted_index.two-dimensional | 66 |
| abstract_inverted_index.spherical-shaped | 101 |
| abstract_inverted_index.deposition.However, | 34 |
| cited_by_percentile_year.max | 94 |
| cited_by_percentile_year.min | 89 |
| corresponding_author_ids | https://openalex.org/A5065627883 |
| countries_distinct_count | 1 |
| institutions_distinct_count | 6 |
| corresponding_institution_ids | https://openalex.org/I135598925 |
| citation_normalized_percentile.value | 0.45505785 |
| citation_normalized_percentile.is_in_top_1_percent | False |
| citation_normalized_percentile.is_in_top_10_percent | False |