Optimal Design of Micro/Nano Positioning Stage with Wide Range and High Speed Based on Flexure Structures Article Swipe
Yang Li
,
Bohua Yin
,
Junbiao Liu
,
Pengyun Jin
·
YOU?
·
· 2017
· Open Access
·
· DOI: https://doi.org/10.1088/1757-899x/274/1/012055
YOU?
·
· 2017
· Open Access
·
· DOI: https://doi.org/10.1088/1757-899x/274/1/012055
To meet the demand of large motion area and high natural frequency of the micro/nano positioning stage used in fast atomic force microscope(AFM), suitable material, actuator and displacement delivering mechanism were chosen and key factors that affected the performance such as input, output, and coupling displacement, driving force and natural frequency were simulated by finite element method(FEM). Finally, we manufactured the micro/nano positioning XY stage actuated by piezoelectric ceramics driver. Experimental results showed that natural frequency was 1.15kHz, maximum displacement was over 60μm along each axis and coupling rate was below 5%.
Related Topics
Concepts
Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.1088/1757-899x/274/1/012055
- https://iopscience.iop.org/article/10.1088/1757-899X/274/1/012055/pdf
- OA Status
- diamond
- References
- 4
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W2772656072
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
-
https://openalex.org/W2772656072Canonical identifier for this work in OpenAlex
- DOI
-
https://doi.org/10.1088/1757-899x/274/1/012055Digital Object Identifier
- Title
-
Optimal Design of Micro/Nano Positioning Stage with Wide Range and High Speed Based on Flexure StructuresWork title
- Type
-
articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
-
2017Year of publication
- Publication date
-
2017-12-01Full publication date if available
- Authors
-
Yang Li, Bohua Yin, Junbiao Liu, Pengyun JinList of authors in order
- Landing page
-
https://doi.org/10.1088/1757-899x/274/1/012055Publisher landing page
- PDF URL
-
https://iopscience.iop.org/article/10.1088/1757-899X/274/1/012055/pdfDirect link to full text PDF
- Open access
-
YesWhether a free full text is available
- OA status
-
diamondOpen access status per OpenAlex
- OA URL
-
https://iopscience.iop.org/article/10.1088/1757-899X/274/1/012055/pdfDirect OA link when available
- Concepts
-
Natural frequency, Displacement (psychology), Actuator, Finite element method, Materials science, Nano-, Coupling (piping), Piezoelectricity, Acoustics, Mechanical engineering, Structural engineering, Vibration, Composite material, Engineering, Physics, Electrical engineering, Psychotherapist, PsychologyTop concepts (fields/topics) attached by OpenAlex
- Cited by
-
0Total citation count in OpenAlex
- References (count)
-
4Number of works referenced by this work
- Related works (count)
-
10Other works algorithmically related by OpenAlex
Full payload
| id | https://openalex.org/W2772656072 |
|---|---|
| doi | https://doi.org/10.1088/1757-899x/274/1/012055 |
| ids.doi | https://doi.org/10.1088/1757-899x/274/1/012055 |
| ids.mag | 2772656072 |
| ids.openalex | https://openalex.org/W2772656072 |
| fwci | 0.0 |
| type | article |
| title | Optimal Design of Micro/Nano Positioning Stage with Wide Range and High Speed Based on Flexure Structures |
| biblio.issue | |
| biblio.volume | 274 |
| biblio.last_page | 012055 |
| biblio.first_page | 012055 |
| topics[0].id | https://openalex.org/T11525 |
| topics[0].field.id | https://openalex.org/fields/22 |
| topics[0].field.display_name | Engineering |
| topics[0].score | 0.9998999834060669 |
| topics[0].domain.id | https://openalex.org/domains/3 |
| topics[0].domain.display_name | Physical Sciences |
| topics[0].subfield.id | https://openalex.org/subfields/2207 |
| topics[0].subfield.display_name | Control and Systems Engineering |
| topics[0].display_name | Piezoelectric Actuators and Control |
| topics[1].id | https://openalex.org/T10923 |
| topics[1].field.id | https://openalex.org/fields/31 |
| topics[1].field.display_name | Physics and Astronomy |
| topics[1].score | 0.9991000294685364 |
| topics[1].domain.id | https://openalex.org/domains/3 |
| topics[1].domain.display_name | Physical Sciences |
| topics[1].subfield.id | https://openalex.org/subfields/3107 |
| topics[1].subfield.display_name | Atomic and Molecular Physics, and Optics |
| topics[1].display_name | Force Microscopy Techniques and Applications |
| topics[2].id | https://openalex.org/T10369 |
| topics[2].field.id | https://openalex.org/fields/22 |
| topics[2].field.display_name | Engineering |
| topics[2].score | 0.9962999820709229 |
| topics[2].domain.id | https://openalex.org/domains/3 |
| topics[2].domain.display_name | Physical Sciences |
| topics[2].subfield.id | https://openalex.org/subfields/2208 |
| topics[2].subfield.display_name | Electrical and Electronic Engineering |
| topics[2].display_name | Advanced MEMS and NEMS Technologies |
| is_xpac | False |
| apc_list | |
| apc_paid | |
| concepts[0].id | https://openalex.org/C78736273 |
| concepts[0].level | 3 |
| concepts[0].score | 0.7408254146575928 |
| concepts[0].wikidata | https://www.wikidata.org/wiki/Q946764 |
| concepts[0].display_name | Natural frequency |
| concepts[1].id | https://openalex.org/C107551265 |
| concepts[1].level | 2 |
| concepts[1].score | 0.7284907102584839 |
| concepts[1].wikidata | https://www.wikidata.org/wiki/Q1458245 |
| concepts[1].display_name | Displacement (psychology) |
| concepts[2].id | https://openalex.org/C172707124 |
| concepts[2].level | 2 |
| concepts[2].score | 0.6957570910453796 |
| concepts[2].wikidata | https://www.wikidata.org/wiki/Q423488 |
| concepts[2].display_name | Actuator |
| concepts[3].id | https://openalex.org/C135628077 |
| concepts[3].level | 2 |
| concepts[3].score | 0.6442086696624756 |
| concepts[3].wikidata | https://www.wikidata.org/wiki/Q220184 |
| concepts[3].display_name | Finite element method |
| concepts[4].id | https://openalex.org/C192562407 |
| concepts[4].level | 0 |
| concepts[4].score | 0.629002034664154 |
| concepts[4].wikidata | https://www.wikidata.org/wiki/Q228736 |
| concepts[4].display_name | Materials science |
| concepts[5].id | https://openalex.org/C2780357685 |
| concepts[5].level | 2 |
| concepts[5].score | 0.611679196357727 |
| concepts[5].wikidata | https://www.wikidata.org/wiki/Q154357 |
| concepts[5].display_name | Nano- |
| concepts[6].id | https://openalex.org/C131584629 |
| concepts[6].level | 2 |
| concepts[6].score | 0.6032892465591431 |
| concepts[6].wikidata | https://www.wikidata.org/wiki/Q4308705 |
| concepts[6].display_name | Coupling (piping) |
| concepts[7].id | https://openalex.org/C100082104 |
| concepts[7].level | 2 |
| concepts[7].score | 0.5621445775032043 |
| concepts[7].wikidata | https://www.wikidata.org/wiki/Q183759 |
| concepts[7].display_name | Piezoelectricity |
| concepts[8].id | https://openalex.org/C24890656 |
| concepts[8].level | 1 |
| concepts[8].score | 0.4021921753883362 |
| concepts[8].wikidata | https://www.wikidata.org/wiki/Q82811 |
| concepts[8].display_name | Acoustics |
| concepts[9].id | https://openalex.org/C78519656 |
| concepts[9].level | 1 |
| concepts[9].score | 0.3584238886833191 |
| concepts[9].wikidata | https://www.wikidata.org/wiki/Q101333 |
| concepts[9].display_name | Mechanical engineering |
| concepts[10].id | https://openalex.org/C66938386 |
| concepts[10].level | 1 |
| concepts[10].score | 0.33743762969970703 |
| concepts[10].wikidata | https://www.wikidata.org/wiki/Q633538 |
| concepts[10].display_name | Structural engineering |
| concepts[11].id | https://openalex.org/C198394728 |
| concepts[11].level | 2 |
| concepts[11].score | 0.28547796607017517 |
| concepts[11].wikidata | https://www.wikidata.org/wiki/Q3695508 |
| concepts[11].display_name | Vibration |
| concepts[12].id | https://openalex.org/C159985019 |
| concepts[12].level | 1 |
| concepts[12].score | 0.24870288372039795 |
| concepts[12].wikidata | https://www.wikidata.org/wiki/Q181790 |
| concepts[12].display_name | Composite material |
| concepts[13].id | https://openalex.org/C127413603 |
| concepts[13].level | 0 |
| concepts[13].score | 0.19498440623283386 |
| concepts[13].wikidata | https://www.wikidata.org/wiki/Q11023 |
| concepts[13].display_name | Engineering |
| concepts[14].id | https://openalex.org/C121332964 |
| concepts[14].level | 0 |
| concepts[14].score | 0.13284018635749817 |
| concepts[14].wikidata | https://www.wikidata.org/wiki/Q413 |
| concepts[14].display_name | Physics |
| concepts[15].id | https://openalex.org/C119599485 |
| concepts[15].level | 1 |
| concepts[15].score | 0.11566188931465149 |
| concepts[15].wikidata | https://www.wikidata.org/wiki/Q43035 |
| concepts[15].display_name | Electrical engineering |
| concepts[16].id | https://openalex.org/C542102704 |
| concepts[16].level | 1 |
| concepts[16].score | 0.0 |
| concepts[16].wikidata | https://www.wikidata.org/wiki/Q183257 |
| concepts[16].display_name | Psychotherapist |
| concepts[17].id | https://openalex.org/C15744967 |
| concepts[17].level | 0 |
| concepts[17].score | 0.0 |
| concepts[17].wikidata | https://www.wikidata.org/wiki/Q9418 |
| concepts[17].display_name | Psychology |
| keywords[0].id | https://openalex.org/keywords/natural-frequency |
| keywords[0].score | 0.7408254146575928 |
| keywords[0].display_name | Natural frequency |
| keywords[1].id | https://openalex.org/keywords/displacement |
| keywords[1].score | 0.7284907102584839 |
| keywords[1].display_name | Displacement (psychology) |
| keywords[2].id | https://openalex.org/keywords/actuator |
| keywords[2].score | 0.6957570910453796 |
| keywords[2].display_name | Actuator |
| keywords[3].id | https://openalex.org/keywords/finite-element-method |
| keywords[3].score | 0.6442086696624756 |
| keywords[3].display_name | Finite element method |
| keywords[4].id | https://openalex.org/keywords/materials-science |
| keywords[4].score | 0.629002034664154 |
| keywords[4].display_name | Materials science |
| keywords[5].id | https://openalex.org/keywords/nano |
| keywords[5].score | 0.611679196357727 |
| keywords[5].display_name | Nano- |
| keywords[6].id | https://openalex.org/keywords/coupling |
| keywords[6].score | 0.6032892465591431 |
| keywords[6].display_name | Coupling (piping) |
| keywords[7].id | https://openalex.org/keywords/piezoelectricity |
| keywords[7].score | 0.5621445775032043 |
| keywords[7].display_name | Piezoelectricity |
| keywords[8].id | https://openalex.org/keywords/acoustics |
| keywords[8].score | 0.4021921753883362 |
| keywords[8].display_name | Acoustics |
| keywords[9].id | https://openalex.org/keywords/mechanical-engineering |
| keywords[9].score | 0.3584238886833191 |
| keywords[9].display_name | Mechanical engineering |
| keywords[10].id | https://openalex.org/keywords/structural-engineering |
| keywords[10].score | 0.33743762969970703 |
| keywords[10].display_name | Structural engineering |
| keywords[11].id | https://openalex.org/keywords/vibration |
| keywords[11].score | 0.28547796607017517 |
| keywords[11].display_name | Vibration |
| keywords[12].id | https://openalex.org/keywords/composite-material |
| keywords[12].score | 0.24870288372039795 |
| keywords[12].display_name | Composite material |
| keywords[13].id | https://openalex.org/keywords/engineering |
| keywords[13].score | 0.19498440623283386 |
| keywords[13].display_name | Engineering |
| keywords[14].id | https://openalex.org/keywords/physics |
| keywords[14].score | 0.13284018635749817 |
| keywords[14].display_name | Physics |
| keywords[15].id | https://openalex.org/keywords/electrical-engineering |
| keywords[15].score | 0.11566188931465149 |
| keywords[15].display_name | Electrical engineering |
| language | en |
| locations[0].id | doi:10.1088/1757-899x/274/1/012055 |
| locations[0].is_oa | True |
| locations[0].source.id | https://openalex.org/S4210189194 |
| locations[0].source.issn | 1757-8981, 1757-899X |
| locations[0].source.type | conference |
| locations[0].source.is_oa | True |
| locations[0].source.issn_l | 1757-8981 |
| locations[0].source.is_core | False |
| locations[0].source.is_in_doaj | False |
| locations[0].source.display_name | IOP Conference Series Materials Science and Engineering |
| locations[0].source.host_organization | https://openalex.org/P4310320083 |
| locations[0].source.host_organization_name | IOP Publishing |
| locations[0].source.host_organization_lineage | https://openalex.org/P4310320083, https://openalex.org/P4310311669 |
| locations[0].source.host_organization_lineage_names | IOP Publishing, Institute of Physics |
| locations[0].license | cc-by |
| locations[0].pdf_url | https://iopscience.iop.org/article/10.1088/1757-899X/274/1/012055/pdf |
| locations[0].version | publishedVersion |
| locations[0].raw_type | journal-article |
| locations[0].license_id | https://openalex.org/licenses/cc-by |
| locations[0].is_accepted | True |
| locations[0].is_published | True |
| locations[0].raw_source_name | IOP Conference Series: Materials Science and Engineering |
| locations[0].landing_page_url | https://doi.org/10.1088/1757-899x/274/1/012055 |
| indexed_in | crossref |
| authorships[0].author.id | https://openalex.org/A5100421300 |
| authorships[0].author.orcid | https://orcid.org/0000-0001-6836-0350 |
| authorships[0].author.display_name | Yang Li |
| authorships[0].countries | CN |
| authorships[0].affiliations[0].institution_ids | https://openalex.org/I4210165038 |
| authorships[0].affiliations[0].raw_affiliation_string | University of Chinese Academy of Sciences, Beijing 100190, China |
| authorships[0].affiliations[1].institution_ids | https://openalex.org/I19820366, https://openalex.org/I4210128819 |
| authorships[0].affiliations[1].raw_affiliation_string | Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China |
| authorships[0].institutions[0].id | https://openalex.org/I19820366 |
| authorships[0].institutions[0].ror | https://ror.org/034t30j35 |
| authorships[0].institutions[0].type | government |
| authorships[0].institutions[0].lineage | https://openalex.org/I19820366 |
| authorships[0].institutions[0].country_code | CN |
| authorships[0].institutions[0].display_name | Chinese Academy of Sciences |
| authorships[0].institutions[1].id | https://openalex.org/I4210128819 |
| authorships[0].institutions[1].ror | https://ror.org/033js6g46 |
| authorships[0].institutions[1].type | facility |
| authorships[0].institutions[1].lineage | https://openalex.org/I19820366, https://openalex.org/I4210128819 |
| authorships[0].institutions[1].country_code | CN |
| authorships[0].institutions[1].display_name | Institute of Electrical Engineering |
| authorships[0].institutions[2].id | https://openalex.org/I4210165038 |
| authorships[0].institutions[2].ror | https://ror.org/05qbk4x57 |
| authorships[0].institutions[2].type | education |
| authorships[0].institutions[2].lineage | https://openalex.org/I19820366, https://openalex.org/I4210165038 |
| authorships[0].institutions[2].country_code | CN |
| authorships[0].institutions[2].display_name | University of Chinese Academy of Sciences |
| authorships[0].author_position | first |
| authorships[0].raw_author_name | Yang Li |
| authorships[0].is_corresponding | False |
| authorships[0].raw_affiliation_strings | Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China, University of Chinese Academy of Sciences, Beijing 100190, China |
| authorships[1].author.id | https://openalex.org/A5039564902 |
| authorships[1].author.orcid | https://orcid.org/0000-0002-2499-9969 |
| authorships[1].author.display_name | Bohua Yin |
| authorships[1].countries | CN |
| authorships[1].affiliations[0].institution_ids | https://openalex.org/I19820366, https://openalex.org/I4210128819 |
| authorships[1].affiliations[0].raw_affiliation_string | Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China |
| authorships[1].institutions[0].id | https://openalex.org/I19820366 |
| authorships[1].institutions[0].ror | https://ror.org/034t30j35 |
| authorships[1].institutions[0].type | government |
| authorships[1].institutions[0].lineage | https://openalex.org/I19820366 |
| authorships[1].institutions[0].country_code | CN |
| authorships[1].institutions[0].display_name | Chinese Academy of Sciences |
| authorships[1].institutions[1].id | https://openalex.org/I4210128819 |
| authorships[1].institutions[1].ror | https://ror.org/033js6g46 |
| authorships[1].institutions[1].type | facility |
| authorships[1].institutions[1].lineage | https://openalex.org/I19820366, https://openalex.org/I4210128819 |
| authorships[1].institutions[1].country_code | CN |
| authorships[1].institutions[1].display_name | Institute of Electrical Engineering |
| authorships[1].author_position | middle |
| authorships[1].raw_author_name | Bohua Yin |
| authorships[1].is_corresponding | False |
| authorships[1].raw_affiliation_strings | Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China |
| authorships[2].author.id | https://openalex.org/A5079811980 |
| authorships[2].author.orcid | https://orcid.org/0000-0003-2896-5499 |
| authorships[2].author.display_name | Junbiao Liu |
| authorships[2].countries | CN |
| authorships[2].affiliations[0].institution_ids | https://openalex.org/I19820366, https://openalex.org/I4210128819 |
| authorships[2].affiliations[0].raw_affiliation_string | Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China |
| authorships[2].institutions[0].id | https://openalex.org/I19820366 |
| authorships[2].institutions[0].ror | https://ror.org/034t30j35 |
| authorships[2].institutions[0].type | government |
| authorships[2].institutions[0].lineage | https://openalex.org/I19820366 |
| authorships[2].institutions[0].country_code | CN |
| authorships[2].institutions[0].display_name | Chinese Academy of Sciences |
| authorships[2].institutions[1].id | https://openalex.org/I4210128819 |
| authorships[2].institutions[1].ror | https://ror.org/033js6g46 |
| authorships[2].institutions[1].type | facility |
| authorships[2].institutions[1].lineage | https://openalex.org/I19820366, https://openalex.org/I4210128819 |
| authorships[2].institutions[1].country_code | CN |
| authorships[2].institutions[1].display_name | Institute of Electrical Engineering |
| authorships[2].author_position | middle |
| authorships[2].raw_author_name | Junbiao Liu |
| authorships[2].is_corresponding | False |
| authorships[2].raw_affiliation_strings | Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China |
| authorships[3].author.id | https://openalex.org/A5012654693 |
| authorships[3].author.orcid | |
| authorships[3].author.display_name | Pengyun Jin |
| authorships[3].countries | CN |
| authorships[3].affiliations[0].institution_ids | https://openalex.org/I19820366, https://openalex.org/I4210128819 |
| authorships[3].affiliations[0].raw_affiliation_string | Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China |
| authorships[3].institutions[0].id | https://openalex.org/I19820366 |
| authorships[3].institutions[0].ror | https://ror.org/034t30j35 |
| authorships[3].institutions[0].type | government |
| authorships[3].institutions[0].lineage | https://openalex.org/I19820366 |
| authorships[3].institutions[0].country_code | CN |
| authorships[3].institutions[0].display_name | Chinese Academy of Sciences |
| authorships[3].institutions[1].id | https://openalex.org/I4210128819 |
| authorships[3].institutions[1].ror | https://ror.org/033js6g46 |
| authorships[3].institutions[1].type | facility |
| authorships[3].institutions[1].lineage | https://openalex.org/I19820366, https://openalex.org/I4210128819 |
| authorships[3].institutions[1].country_code | CN |
| authorships[3].institutions[1].display_name | Institute of Electrical Engineering |
| authorships[3].author_position | last |
| authorships[3].raw_author_name | Pengyun Jin |
| authorships[3].is_corresponding | False |
| authorships[3].raw_affiliation_strings | Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China |
| has_content.pdf | True |
| has_content.grobid_xml | True |
| is_paratext | False |
| open_access.is_oa | True |
| open_access.oa_url | https://iopscience.iop.org/article/10.1088/1757-899X/274/1/012055/pdf |
| open_access.oa_status | diamond |
| open_access.any_repository_has_fulltext | False |
| created_date | 2025-10-10T00:00:00 |
| display_name | Optimal Design of Micro/Nano Positioning Stage with Wide Range and High Speed Based on Flexure Structures |
| has_fulltext | False |
| is_retracted | False |
| updated_date | 2025-11-06T03:46:38.306776 |
| primary_topic.id | https://openalex.org/T11525 |
| primary_topic.field.id | https://openalex.org/fields/22 |
| primary_topic.field.display_name | Engineering |
| primary_topic.score | 0.9998999834060669 |
| primary_topic.domain.id | https://openalex.org/domains/3 |
| primary_topic.domain.display_name | Physical Sciences |
| primary_topic.subfield.id | https://openalex.org/subfields/2207 |
| primary_topic.subfield.display_name | Control and Systems Engineering |
| primary_topic.display_name | Piezoelectric Actuators and Control |
| related_works | https://openalex.org/W120386264, https://openalex.org/W2369514825, https://openalex.org/W4309764133, https://openalex.org/W2031123327, https://openalex.org/W3094386287, https://openalex.org/W4389328717, https://openalex.org/W2132160072, https://openalex.org/W2761298569, https://openalex.org/W3210408447, https://openalex.org/W2066459308 |
| cited_by_count | 0 |
| locations_count | 1 |
| best_oa_location.id | doi:10.1088/1757-899x/274/1/012055 |
| best_oa_location.is_oa | True |
| best_oa_location.source.id | https://openalex.org/S4210189194 |
| best_oa_location.source.issn | 1757-8981, 1757-899X |
| best_oa_location.source.type | conference |
| best_oa_location.source.is_oa | True |
| best_oa_location.source.issn_l | 1757-8981 |
| best_oa_location.source.is_core | False |
| best_oa_location.source.is_in_doaj | False |
| best_oa_location.source.display_name | IOP Conference Series Materials Science and Engineering |
| best_oa_location.source.host_organization | https://openalex.org/P4310320083 |
| best_oa_location.source.host_organization_name | IOP Publishing |
| best_oa_location.source.host_organization_lineage | https://openalex.org/P4310320083, https://openalex.org/P4310311669 |
| best_oa_location.source.host_organization_lineage_names | IOP Publishing, Institute of Physics |
| best_oa_location.license | cc-by |
| best_oa_location.pdf_url | https://iopscience.iop.org/article/10.1088/1757-899X/274/1/012055/pdf |
| best_oa_location.version | publishedVersion |
| best_oa_location.raw_type | journal-article |
| best_oa_location.license_id | https://openalex.org/licenses/cc-by |
| best_oa_location.is_accepted | True |
| best_oa_location.is_published | True |
| best_oa_location.raw_source_name | IOP Conference Series: Materials Science and Engineering |
| best_oa_location.landing_page_url | https://doi.org/10.1088/1757-899x/274/1/012055 |
| primary_location.id | doi:10.1088/1757-899x/274/1/012055 |
| primary_location.is_oa | True |
| primary_location.source.id | https://openalex.org/S4210189194 |
| primary_location.source.issn | 1757-8981, 1757-899X |
| primary_location.source.type | conference |
| primary_location.source.is_oa | True |
| primary_location.source.issn_l | 1757-8981 |
| primary_location.source.is_core | False |
| primary_location.source.is_in_doaj | False |
| primary_location.source.display_name | IOP Conference Series Materials Science and Engineering |
| primary_location.source.host_organization | https://openalex.org/P4310320083 |
| primary_location.source.host_organization_name | IOP Publishing |
| primary_location.source.host_organization_lineage | https://openalex.org/P4310320083, https://openalex.org/P4310311669 |
| primary_location.source.host_organization_lineage_names | IOP Publishing, Institute of Physics |
| primary_location.license | cc-by |
| primary_location.pdf_url | https://iopscience.iop.org/article/10.1088/1757-899X/274/1/012055/pdf |
| primary_location.version | publishedVersion |
| primary_location.raw_type | journal-article |
| primary_location.license_id | https://openalex.org/licenses/cc-by |
| primary_location.is_accepted | True |
| primary_location.is_published | True |
| primary_location.raw_source_name | IOP Conference Series: Materials Science and Engineering |
| primary_location.landing_page_url | https://doi.org/10.1088/1757-899x/274/1/012055 |
| publication_date | 2017-12-01 |
| publication_year | 2017 |
| referenced_works | https://openalex.org/W2314450581, https://openalex.org/W2005920501, https://openalex.org/W2021981473, https://openalex.org/W2080709690 |
| referenced_works_count | 4 |
| abstract_inverted_index.To | 0 |
| abstract_inverted_index.XY | 63 |
| abstract_inverted_index.as | 40 |
| abstract_inverted_index.by | 53, 66 |
| abstract_inverted_index.in | 18 |
| abstract_inverted_index.of | 4, 12 |
| abstract_inverted_index.we | 58 |
| abstract_inverted_index.5%. | 91 |
| abstract_inverted_index.and | 8, 26, 32, 43, 48, 86 |
| abstract_inverted_index.key | 33 |
| abstract_inverted_index.the | 2, 13, 37, 60 |
| abstract_inverted_index.was | 76, 80, 89 |
| abstract_inverted_index.area | 7 |
| abstract_inverted_index.axis | 85 |
| abstract_inverted_index.each | 84 |
| abstract_inverted_index.fast | 19 |
| abstract_inverted_index.high | 9 |
| abstract_inverted_index.meet | 1 |
| abstract_inverted_index.over | 81 |
| abstract_inverted_index.rate | 88 |
| abstract_inverted_index.such | 39 |
| abstract_inverted_index.that | 35, 73 |
| abstract_inverted_index.used | 17 |
| abstract_inverted_index.were | 30, 51 |
| abstract_inverted_index.60μm | 82 |
| abstract_inverted_index.along | 83 |
| abstract_inverted_index.below | 90 |
| abstract_inverted_index.force | 21, 47 |
| abstract_inverted_index.large | 5 |
| abstract_inverted_index.stage | 16, 64 |
| abstract_inverted_index.atomic | 20 |
| abstract_inverted_index.chosen | 31 |
| abstract_inverted_index.demand | 3 |
| abstract_inverted_index.finite | 54 |
| abstract_inverted_index.input, | 41 |
| abstract_inverted_index.motion | 6 |
| abstract_inverted_index.showed | 72 |
| abstract_inverted_index.driver. | 69 |
| abstract_inverted_index.driving | 46 |
| abstract_inverted_index.element | 55 |
| abstract_inverted_index.factors | 34 |
| abstract_inverted_index.maximum | 78 |
| abstract_inverted_index.natural | 10, 49, 74 |
| abstract_inverted_index.output, | 42 |
| abstract_inverted_index.results | 71 |
| abstract_inverted_index.1.15kHz, | 77 |
| abstract_inverted_index.Finally, | 57 |
| abstract_inverted_index.actuated | 65 |
| abstract_inverted_index.actuator | 25 |
| abstract_inverted_index.affected | 36 |
| abstract_inverted_index.ceramics | 68 |
| abstract_inverted_index.coupling | 44, 87 |
| abstract_inverted_index.suitable | 23 |
| abstract_inverted_index.frequency | 11, 50, 75 |
| abstract_inverted_index.material, | 24 |
| abstract_inverted_index.mechanism | 29 |
| abstract_inverted_index.simulated | 52 |
| abstract_inverted_index.delivering | 28 |
| abstract_inverted_index.micro/nano | 14, 61 |
| abstract_inverted_index.performance | 38 |
| abstract_inverted_index.positioning | 15, 62 |
| abstract_inverted_index.Experimental | 70 |
| abstract_inverted_index.displacement | 27, 79 |
| abstract_inverted_index.manufactured | 59 |
| abstract_inverted_index.method(FEM). | 56 |
| abstract_inverted_index.displacement, | 45 |
| abstract_inverted_index.piezoelectric | 67 |
| abstract_inverted_index.microscope(AFM), | 22 |
| cited_by_percentile_year | |
| countries_distinct_count | 1 |
| institutions_distinct_count | 4 |
| sustainable_development_goals[0].id | https://metadata.un.org/sdg/7 |
| sustainable_development_goals[0].score | 0.6800000071525574 |
| sustainable_development_goals[0].display_name | Affordable and clean energy |
| citation_normalized_percentile.value | 0.19778416 |
| citation_normalized_percentile.is_in_top_1_percent | False |
| citation_normalized_percentile.is_in_top_10_percent | False |