Particle-in-cell simulations and passive bulk model of collisional capacitive discharge Article Swipe
Emi Kawamura
,
M. A. Lieberman
,
A. J. Lichtenberg
,
Pascal Chabert
·
YOU?
·
· 2020
· Open Access
·
· DOI: https://doi.org/10.1116/1.5135575
YOU?
·
· 2020
· Open Access
·
· DOI: https://doi.org/10.1116/1.5135575
Intermediate pressure (0.2–6.0 Torr), radio frequency capacitive discharges are of increasing importance in the thin film processing industry. However, existing low pressure (<0.1Torr) discharge models are often used beyond their applicability in this pressure range. The authors performed one-dimensional particle-in-cell (PIC) simulations of a capacitive 2.5 cm gap argon discharge driven at 13.56 MHz with current density amplitude J0=50A/m2 over a wide range of gas pressures pg=0.04–20 Torr. For intermediate pressures, the PIC results showed that most of the ionization occurs near the plasma-sheath edges with very little occurring within the central bulk region. This led us to develop a “passive bulk” model of the discharge in which bulk electron heating does not contribute to ionization, and all the ionization is due solely to the sheath-heated electrons. The model assumes a constant ion-neutral mean free path λi in the plasma bulk and either constant λi or constant ion mobility μi in the sheaths. The model is solved using an electron temperature iteration scheme. The PIC scalings of the discharge equilibrium parameters (e.g., electron density and temperature, sheath width, and voltage) with the input parameters pg and J0 showed good agreement with those of the passive bulk model. A constant μi sheath model showed the best agreement with the PIC results in the intermediate pressure regime of interest, but a constant λi model is simpler to implement and showed reasonable agreement over a wide pressure range.
Related Topics
Concepts
Ionization
Atomic physics
Plasma
Torr
Electron
Particle-in-cell
Argon
Ion
Range (aeronautics)
Capacitive sensing
Electron temperature
Mean free path
Electron density
Materials science
Chemistry
Physics
Electrical engineering
Thermodynamics
Organic chemistry
Engineering
Composite material
Quantum mechanics
Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.1116/1.5135575
- https://avs.scitation.org/doi/pdf/10.1116/1.5135575
- OA Status
- bronze
- Cited By
- 15
- References
- 11
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W2999815143
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W2999815143Canonical identifier for this work in OpenAlex
- DOI
-
https://doi.org/10.1116/1.5135575Digital Object Identifier
- Title
-
Particle-in-cell simulations and passive bulk model of collisional capacitive dischargeWork title
- Type
-
articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
-
2020Year of publication
- Publication date
-
2020-01-17Full publication date if available
- Authors
-
Emi Kawamura, M. A. Lieberman, A. J. Lichtenberg, Pascal ChabertList of authors in order
- Landing page
-
https://doi.org/10.1116/1.5135575Publisher landing page
- PDF URL
-
https://avs.scitation.org/doi/pdf/10.1116/1.5135575Direct link to full text PDF
- Open access
-
YesWhether a free full text is available
- OA status
-
bronzeOpen access status per OpenAlex
- OA URL
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https://avs.scitation.org/doi/pdf/10.1116/1.5135575Direct OA link when available
- Concepts
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Ionization, Atomic physics, Plasma, Torr, Electron, Particle-in-cell, Argon, Ion, Range (aeronautics), Capacitive sensing, Electron temperature, Mean free path, Electron density, Materials science, Chemistry, Physics, Electrical engineering, Thermodynamics, Organic chemistry, Engineering, Composite material, Quantum mechanicsTop concepts (fields/topics) attached by OpenAlex
- Cited by
-
15Total citation count in OpenAlex
- Citations by year (recent)
-
2024: 4, 2023: 2, 2022: 5, 2021: 3, 2020: 1Per-year citation counts (last 5 years)
- References (count)
-
11Number of works referenced by this work
- Related works (count)
-
10Other works algorithmically related by OpenAlex
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