Intermediate pressure (0.2–6.0 Torr), radio frequency capacitive discharges are of increasing importance in the thin film processing industry. However, existing low pressure (<0.1Torr) discharge models are often used beyond their applicability in this pressure range. The authors performed one-dimensional particle-in-cell (PIC) simulations of a capacitive 2.5 cm gap argon discharge driven at 13.56 MHz with current density amplitude J0=50A/m2 over a wide range of gas pressures pg=0.04–20 Torr. For intermediat…