Phase-probability shaping for speckle-free holographic lithography Article Swipe

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Dong Zhao , Weiwei Fu , Jun He , Ziqin Li , Fang‐Wen Sun , Kun Huang ·

YOU? · · 2025 · Open Access · · DOI: https://doi.org/10.1038/s41467-025-64554-0

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Type: article
Language: en
Landing Page: https://doi.org/10.1038/s41467-025-64554-0
PDF: https://www.nature.com/articles/s41467-025-64554-0.pdf
OA Status: gold
References: 52
OpenAlex ID: https://openalex.org/W4415502909

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DOI: https://doi.org/10.1038/s41467-025-64554-0

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Title: Phase-probability shaping for speckle-free holographic lithography

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Type: article

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Language: en

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Publication year: 2025

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Publication date: 2025-10-24

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Authors: Dong Zhao, Weiwei Fu, Jun He, Ziqin Li, Fang‐Wen Sun, Kun Huang

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Landing page: https://doi.org/10.1038/s41467-025-64554-0

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PDF URL: https://www.nature.com/articles/s41467-025-64554-0.pdf

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