Progress in atomic layer deposited [alpha]-Ga2O3 materials and solar-blind detectors Article Swipe
Fabien Massabuau
,
Joseph W. Roberts
,
David G. Nicol
,
P. R. Edwards
,
Michael K. McLelland
,
G. Dallas
,
Daniel. A. Hunter
,
Ewan Nicolson
,
John Jarman
,
András Kovács
,
Robert Martin
,
Rachel A. Oliver
,
Paul R. Chalker
·
YOU?
·
· 2021
· Open Access
·
· DOI: https://doi.org/10.1117/12.2588729
YOU?
·
· 2021
· Open Access
·
· DOI: https://doi.org/10.1117/12.2588729
Atomic layer deposition (ALD) offers a low thermal budget method for producing α-Ga2O3 films on sapphire substrate. In this paper we review the recent progress on plasma-enhanced ALD growth of α-Ga2O3 and present the optical and photoconductive properties of the deposited films. We show that the deposited material exhibits an epitaxial relationship with the sapphire substrate, and with an atomically sharp film-substrate interface. The α-Ga2O3 films had an optical bandgap energy measured at 5.11 eV, and exhibited a broad luminescence spectrum dominated by ultraviolet, blue and green bands, in line with current literature. We finally demonstrate the suitability of the material for solar-blind photodetection.
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Metadata
- Type
- article
- Language
- en
- Landing Page
- http://doi.org/10.1117/12.2588729
- OA Status
- green
- Cited By
- 7
- References
- 8
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W3134178929
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W3134178929Canonical identifier for this work in OpenAlex
- DOI
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https://doi.org/10.1117/12.2588729Digital Object Identifier
- Title
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Progress in atomic layer deposited [alpha]-Ga2O3 materials and solar-blind detectorsWork title
- Type
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articleOpenAlex work type
- Language
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enPrimary language
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2021Year of publication
- Publication date
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2021-03-03Full publication date if available
- Authors
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Fabien Massabuau, Joseph W. Roberts, David G. Nicol, P. R. Edwards, Michael K. McLelland, G. Dallas, Daniel. A. Hunter, Ewan Nicolson, John Jarman, András Kovács, Robert Martin, Rachel A. Oliver, Paul R. ChalkerList of authors in order
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https://doi.org/10.1117/12.2588729Publisher landing page
- Open access
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YesWhether a free full text is available
- OA status
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greenOpen access status per OpenAlex
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https://doi.org/10.1117/12.2588729Direct OA link when available
- Concepts
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Atomic layer deposition, Materials science, Sapphire, Optoelectronics, Substrate (aquarium), Photoconductivity, Epitaxy, Band gap, Layer (electronics), Luminescence, Optics, Nanotechnology, Physics, Laser, Oceanography, GeologyTop concepts (fields/topics) attached by OpenAlex
- Cited by
-
7Total citation count in OpenAlex
- Citations by year (recent)
-
2025: 1, 2024: 1, 2023: 3, 2022: 1, 2021: 1Per-year citation counts (last 5 years)
- References (count)
-
8Number of works referenced by this work
- Related works (count)
-
10Other works algorithmically related by OpenAlex
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