Publisher Correction to: Computational investigation of a novel metal thickness measurement system with coaxial triple‑coil sensor for chemical mechanical polishing Article Swipe

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Chengxin Wang , Fangxin Tian , Tongqing Wang , Bangxu Liu , Xinchun Lu ·

YOU? · · 2024 · Open Access · · DOI: https://doi.org/10.1007/s00170-024-13777-4

Related Topics

Electromagnetic Coil

Materials Science

Mechanical Engineering

Composite Material

Engineering

Electrical Engineering

Concepts

Coaxial Polishing Electromagnetic coil Chemical-mechanical planarization Materials science Mechanical engineering Composite material Engineering Electrical engineering

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Type: article
Language: en
Landing Page: https://doi.org/10.1007/s00170-024-13777-4
PDF: https://link.springer.com/content/pdf/10.1007/s00170-024-13777-4.pdf
OA Status: bronze
Related Works: 10
OpenAlex ID: https://openalex.org/W4398177674

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OpenAlex ID: https://openalex.org/W4398177674

Canonical identifier for this work in OpenAlex
DOI: https://doi.org/10.1007/s00170-024-13777-4

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Title: Publisher Correction to: Computational investigation of a novel metal thickness measurement system with coaxial triple‑coil sensor for chemical mechanical polishing

Work title
Type: article

OpenAlex work type
Language: en

Primary language
Publication year: 2024

Year of publication
Publication date: 2024-05-21

Full publication date if available
Authors: Chengxin Wang, Fangxin Tian, Tongqing Wang, Bangxu Liu, Xinchun Lu

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Landing page: https://doi.org/10.1007/s00170-024-13777-4

Publisher landing page
PDF URL: https://link.springer.com/content/pdf/10.1007/s00170-024-13777-4.pdf

Direct link to full text PDF
Open access: Yes

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OA status: bronze

Open access status per OpenAlex
OA URL: https://link.springer.com/content/pdf/10.1007/s00170-024-13777-4.pdf

Direct OA link when available
Concepts: Coaxial, Polishing, Electromagnetic coil, Chemical-mechanical planarization, Materials science, Mechanical engineering, Composite material, Engineering, Electrical engineering

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Cited by: 0

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Related works (count): 10

Other works algorithmically related by OpenAlex

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