Silicon nitride drum resonators with a top-gate capacitive coupling scheme Article Swipe
Xin Zhou
,
Srisaran Venkatachalam
,
Alok Pokharel
,
Andrew Fefferman
,
Eddy Collin
·
YOU?
·
· 2021
· Open Access
·
YOU?
·
· 2021
· Open Access
·
International audience
Related Topics
Concepts
Metadata
- Type
- article
- Language
- en
- Landing Page
- https://hal.science/hal-04415196
- OA Status
- green
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4391299048
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W4391299048Canonical identifier for this work in OpenAlex
- Title
-
Silicon nitride drum resonators with a top-gate capacitive coupling schemeWork title
- Type
-
articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
-
2021Year of publication
- Publication date
-
2021-09-20Full publication date if available
- Authors
-
Xin Zhou, Srisaran Venkatachalam, Alok Pokharel, Andrew Fefferman, Eddy CollinList of authors in order
- Landing page
-
https://hal.science/hal-04415196Publisher landing page
- Open access
-
YesWhether a free full text is available
- OA status
-
greenOpen access status per OpenAlex
- OA URL
-
https://hal.science/hal-04415196Direct OA link when available
- Concepts
-
Resonator, Capacitive sensing, Materials science, Optoelectronics, Capacitive coupling, Silicon nitride, Coupling (piping), Drum, Silicon, Electrical engineering, Electronic engineering, Engineering, Mechanical engineering, Composite material, VoltageTop concepts (fields/topics) attached by OpenAlex
- Cited by
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0Total citation count in OpenAlex
- Related works (count)
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10Other works algorithmically related by OpenAlex
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