Silicon‐based, low‐g microelectromechanical systems inertial switch for linear acceleration sensing application Article Swipe
Zhuang Xiong
,
Fengtian Zhang
,
Yingdong Pu
,
Bin Tang
,
Jie Yang
,
Chao Wang
·
YOU?
·
· 2015
· Open Access
·
· DOI: https://doi.org/10.1049/mnl.2015.0059
YOU?
·
· 2015
· Open Access
·
· DOI: https://doi.org/10.1049/mnl.2015.0059
Most of the microelectromechanical systems inertial switches developed in recent years are intended for shock and impact sensing above 40 g. These switches are fabricated based on non‐silicon surface micromachining with multiple steps of electroplating. In this reported work, a silicon‐based low‐g inertial switch typically used for linear acceleration sensing was conceived, designed and fabricated. The developed inertial switch consists of a high volume proof mass and low stiffness spiral spring, and is fabricated in a specially designed double‐buried layer silicon‐on‐insulator wafer, with standard silicon micromachining. The measurement results show that the threshold value is about 7.42 g and the stiffness is about 1.5 N/m, in accordance with the finite element method calculation.
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Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.1049/mnl.2015.0059
- https://onlinelibrary.wiley.com/doi/pdfdirect/10.1049/mnl.2015.0059
- OA Status
- bronze
- Cited By
- 4
- References
- 10
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W2247978126
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W2247978126Canonical identifier for this work in OpenAlex
- DOI
-
https://doi.org/10.1049/mnl.2015.0059Digital Object Identifier
- Title
-
Silicon‐based, low‐g microelectromechanical systems inertial switch for linear acceleration sensing applicationWork title
- Type
-
articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
-
2015Year of publication
- Publication date
-
2015-07-01Full publication date if available
- Authors
-
Zhuang Xiong, Fengtian Zhang, Yingdong Pu, Bin Tang, Jie Yang, Chao WangList of authors in order
- Landing page
-
https://doi.org/10.1049/mnl.2015.0059Publisher landing page
- PDF URL
-
https://onlinelibrary.wiley.com/doi/pdfdirect/10.1049/mnl.2015.0059Direct link to full text PDF
- Open access
-
YesWhether a free full text is available
- OA status
-
bronzeOpen access status per OpenAlex
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https://onlinelibrary.wiley.com/doi/pdfdirect/10.1049/mnl.2015.0059Direct OA link when available
- Concepts
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Acceleration, Microelectromechanical systems, Linear acceleration, Inertial frame of reference, Silicon, Accelerometer, Materials science, Inertial measurement unit, Physics, Optoelectronics, Aerospace engineering, Engineering, Classical mechanics, Quantum mechanicsTop concepts (fields/topics) attached by OpenAlex
- Cited by
-
4Total citation count in OpenAlex
- Citations by year (recent)
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2025: 1, 2024: 1, 2022: 1, 2017: 1Per-year citation counts (last 5 years)
- References (count)
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10Number of works referenced by this work
- Related works (count)
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10Other works algorithmically related by OpenAlex
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