Simulation of conformality of ALD growth inside lateral channels: comparison between a diffusion–reaction model and a ballistic transport–reaction model Article Swipe

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Jänis Järvilehto , Jorge Velasco , Jihong Yim , Christine Gonsalves , Riikka L. Puurunen ·

YOU? · · 2023 · Open Access · · DOI: https://doi.org/10.1039/d3cp01829f

Comparison of saturation profiles generated by a diffusion–reaction model and a ballistic transport–reaction model reveals similar qualitative trends and quantitative differences.

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Reaction–Diffusion System

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Reaction–diffusion system Diffusion Materials science Nanotechnology Chemistry Mechanics Chemical physics Physics Thermodynamics

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Type: article
Language: en
Landing Page: https://doi.org/10.1039/d3cp01829f
PDF: https://pubs.rsc.org/en/content/articlepdf/2023/cp/d3cp01829f
OA Status: hybrid
Cited By: 8
References: 41
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DOI: https://doi.org/10.1039/d3cp01829f

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Title: Simulation of conformality of ALD growth inside lateral channels: comparison between a diffusion–reaction model and a ballistic transport–reaction model

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Type: article

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Language: en

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Publication year: 2023

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Publication date: 2023-01-01

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Authors: Jänis Järvilehto, Jorge Velasco, Jihong Yim, Christine Gonsalves, Riikka L. Puurunen

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Landing page: https://doi.org/10.1039/d3cp01829f

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Concepts: Reaction–diffusion system, Diffusion, Materials science, Nanotechnology, Chemistry, Mechanics, Chemical physics, Physics, Thermodynamics

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Cited by: 8

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abstract_inverted_index.differences.	20
abstract_inverted_index.quantitative	19
abstract_inverted_index.diffusion–reaction	7
abstract_inverted_index.transport–reaction	12
cited_by_percentile_year.max	98
cited_by_percentile_year.min	97
countries_distinct_count	1
institutions_distinct_count	5
citation_normalized_percentile.value	0.79736304
citation_normalized_percentile.is_in_top_1_percent	False
citation_normalized_percentile.is_in_top_10_percent	False