Accurate modeling of interconnect conductivity is important for performance evaluation of chips in advanced technologies. Surface scattering in interconnects is usually treated by using Fuchs-Sondheimer (FS) approach. While the FS model offer explicit inclusion of the physical parameters, it lacks spatial dependence of conductivity across the interconnect cross-section. To capture the space-dependency of conductivity, an empirical modeling approach based on "cosh" function has been proposed, but it lacks physical …