Sputter-deposited PZT-on-Silicon Optimization for C-band Electro-Optic Modulation Article Swipe
Suraj Suraj
,
Shankar Kumar Selvaraja
·
YOU?
·
· 2023
· Open Access
·
· DOI: https://doi.org/10.48550/arxiv.2305.13263
YOU?
·
· 2023
· Open Access
·
· DOI: https://doi.org/10.48550/arxiv.2305.13263
Ferroelectric materials exhibit interesting electric, mechanical and optical properties. Particularly,tin-film lead zirconium titanate (PZT) has been used as a standard piezo-electric material in micro-electro-mechanical systems. Interestingly, it has one of the highest electro-optic properties that can be exploited to make high-speed on-chip light modulators. In this work, we demonstrate sputter-deposited PZT on silicon-on-insulator wafers. Desired phase and film morphology is achieved through process and buffer layer engineering. We present results on buffer layer screening between MgO, TiO2 and Pt. MgO is identified as a suitable buffer layer from an optical and film growth perspective. We achieve a measured coercive field for PZT/MgO and PZT/Pt film is 50 kV/cm and 30 kV/cm, respectively. We use a PZT-loaded ring modulator with an electro-optic response of 14 pm/V.
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Metadata
- Type
- preprint
- Language
- en
- Landing Page
- http://arxiv.org/abs/2305.13263
- https://arxiv.org/pdf/2305.13263
- OA Status
- green
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4377865961
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W4377865961Canonical identifier for this work in OpenAlex
- DOI
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https://doi.org/10.48550/arxiv.2305.13263Digital Object Identifier
- Title
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Sputter-deposited PZT-on-Silicon Optimization for C-band Electro-Optic ModulationWork title
- Type
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preprintOpenAlex work type
- Language
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enPrimary language
- Publication year
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2023Year of publication
- Publication date
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2023-05-05Full publication date if available
- Authors
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Suraj Suraj, Shankar Kumar SelvarajaList of authors in order
- Landing page
-
https://arxiv.org/abs/2305.13263Publisher landing page
- PDF URL
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https://arxiv.org/pdf/2305.13263Direct link to full text PDF
- Open access
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YesWhether a free full text is available
- OA status
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greenOpen access status per OpenAlex
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https://arxiv.org/pdf/2305.13263Direct OA link when available
- Concepts
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Materials science, Optoelectronics, Wafer, Ferroelectricity, Buffer (optical fiber), Layer (electronics), Sputter deposition, Sputtering, Silicon, Electric field, Dielectric, Thin film, Composite material, Nanotechnology, Electrical engineering, Engineering, Physics, Quantum mechanicsTop concepts (fields/topics) attached by OpenAlex
- Cited by
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0Total citation count in OpenAlex
- Related works (count)
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10Other works algorithmically related by OpenAlex
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| abstract_inverted_index.demonstrate | 48 |
| abstract_inverted_index.interesting | 3 |
| abstract_inverted_index.modulators. | 43 |
| abstract_inverted_index.properties. | 8 |
| abstract_inverted_index.engineering. | 66 |
| abstract_inverted_index.perspective. | 93 |
| abstract_inverted_index.Ferroelectric | 0 |
| abstract_inverted_index.electro-optic | 32, 120 |
| abstract_inverted_index.respectively. | 111 |
| abstract_inverted_index.Interestingly, | 25 |
| abstract_inverted_index.piezo-electric | 20 |
| abstract_inverted_index.sputter-deposited | 49 |
| abstract_inverted_index.silicon-on-insulator | 52 |
| abstract_inverted_index.Particularly,tin-film | 9 |
| abstract_inverted_index.micro-electro-mechanical | 23 |
| cited_by_percentile_year | |
| countries_distinct_count | 0 |
| institutions_distinct_count | 2 |
| citation_normalized_percentile |