Stacking of Two-Dimensional Materials to Large-Area Heterostructures by Wafer Bonding Article Swipe
Arne Quellmalz
,
Simon Sawallich
,
Maximilian Prechtl
,
Oliver Hartwig
,
Siwei Luo
,
Stefan Wagner
,
Georg S. Duesberg
,
Max C. Lemme
,
Frank Niklaus
,
Kristinn B. Gylfason
·
YOU?
·
· 2021
· Open Access
·
· DOI: https://doi.org/10.1364/cleo_si.2021.sw3f.2
YOU?
·
· 2021
· Open Access
·
· DOI: https://doi.org/10.1364/cleo_si.2021.sw3f.2
The integration of 2D materials for photonic applications is not compatible with high-volume manufacturing. We report a generic methodology that uses only readily available semiconductor equipment and experimentally demonstrate the stacking of graphene and molybdenum disulfide (MoS 2 ).
Related Topics
Concepts
Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.1364/cleo_si.2021.sw3f.2
- https://opg.optica.org/viewmedia.cfm?uri=CLEO_SI-2021-SW3F.2&seq=0
- OA Status
- bronze
- Cited By
- 2
- References
- 9
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W3190040940
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
-
https://openalex.org/W3190040940Canonical identifier for this work in OpenAlex
- DOI
-
https://doi.org/10.1364/cleo_si.2021.sw3f.2Digital Object Identifier
- Title
-
Stacking of Two-Dimensional Materials to Large-Area Heterostructures by Wafer BondingWork title
- Type
-
articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
-
2021Year of publication
- Publication date
-
2021-01-01Full publication date if available
- Authors
-
Arne Quellmalz, Simon Sawallich, Maximilian Prechtl, Oliver Hartwig, Siwei Luo, Stefan Wagner, Georg S. Duesberg, Max C. Lemme, Frank Niklaus, Kristinn B. GylfasonList of authors in order
- Landing page
-
https://doi.org/10.1364/cleo_si.2021.sw3f.2Publisher landing page
- PDF URL
-
https://opg.optica.org/viewmedia.cfm?uri=CLEO_SI-2021-SW3F.2&seq=0Direct link to full text PDF
- Open access
-
YesWhether a free full text is available
- OA status
-
bronzeOpen access status per OpenAlex
- OA URL
-
https://opg.optica.org/viewmedia.cfm?uri=CLEO_SI-2021-SW3F.2&seq=0Direct OA link when available
- Concepts
-
Stacking, Wafer, Molybdenum disulfide, Materials science, Heterojunction, Wafer bonding, Graphene, Optoelectronics, Semiconductor, Photonics, Semiconductor device fabrication, Molybdenum, Nanotechnology, Engineering physics, Composite material, Metallurgy, Engineering, Chemistry, Organic chemistryTop concepts (fields/topics) attached by OpenAlex
- Cited by
-
2Total citation count in OpenAlex
- Citations by year (recent)
-
2021: 1, 2020: 1Per-year citation counts (last 5 years)
- References (count)
-
9Number of works referenced by this work
- Related works (count)
-
10Other works algorithmically related by OpenAlex
Full payload
| id | https://openalex.org/W3190040940 |
|---|---|
| doi | https://doi.org/10.1364/cleo_si.2021.sw3f.2 |
| ids.doi | https://doi.org/10.1364/cleo_si.2021.sw3f.2 |
| ids.mag | 3190040940 |
| ids.openalex | https://openalex.org/W3190040940 |
| fwci | 0.59268929 |
| type | article |
| title | Stacking of Two-Dimensional Materials to Large-Area Heterostructures by Wafer Bonding |
| biblio.issue | |
| biblio.volume | |
| biblio.last_page | SW3F.2 |
| biblio.first_page | SW3F.2 |
| topics[0].id | https://openalex.org/T10275 |
| topics[0].field.id | https://openalex.org/fields/25 |
| topics[0].field.display_name | Materials Science |
| topics[0].score | 0.9998000264167786 |
| topics[0].domain.id | https://openalex.org/domains/3 |
| topics[0].domain.display_name | Physical Sciences |
| topics[0].subfield.id | https://openalex.org/subfields/2505 |
| topics[0].subfield.display_name | Materials Chemistry |
| topics[0].display_name | 2D Materials and Applications |
| topics[1].id | https://openalex.org/T10299 |
| topics[1].field.id | https://openalex.org/fields/22 |
| topics[1].field.display_name | Engineering |
| topics[1].score | 0.9987999796867371 |
| topics[1].domain.id | https://openalex.org/domains/3 |
| topics[1].domain.display_name | Physical Sciences |
| topics[1].subfield.id | https://openalex.org/subfields/2208 |
| topics[1].subfield.display_name | Electrical and Electronic Engineering |
| topics[1].display_name | Photonic and Optical Devices |
| topics[2].id | https://openalex.org/T10666 |
| topics[2].field.id | https://openalex.org/fields/31 |
| topics[2].field.display_name | Physics and Astronomy |
| topics[2].score | 0.9983999729156494 |
| topics[2].domain.id | https://openalex.org/domains/3 |
| topics[2].domain.display_name | Physical Sciences |
| topics[2].subfield.id | https://openalex.org/subfields/3107 |
| topics[2].subfield.display_name | Atomic and Molecular Physics, and Optics |
| topics[2].display_name | Photonic Crystals and Applications |
| is_xpac | False |
| apc_list | |
| apc_paid | |
| concepts[0].id | https://openalex.org/C33347731 |
| concepts[0].level | 2 |
| concepts[0].score | 0.9479671716690063 |
| concepts[0].wikidata | https://www.wikidata.org/wiki/Q285210 |
| concepts[0].display_name | Stacking |
| concepts[1].id | https://openalex.org/C160671074 |
| concepts[1].level | 2 |
| concepts[1].score | 0.7430232763290405 |
| concepts[1].wikidata | https://www.wikidata.org/wiki/Q267131 |
| concepts[1].display_name | Wafer |
| concepts[2].id | https://openalex.org/C2780423959 |
| concepts[2].level | 2 |
| concepts[2].score | 0.732701301574707 |
| concepts[2].wikidata | https://www.wikidata.org/wiki/Q424257 |
| concepts[2].display_name | Molybdenum disulfide |
| concepts[3].id | https://openalex.org/C192562407 |
| concepts[3].level | 0 |
| concepts[3].score | 0.6924901008605957 |
| concepts[3].wikidata | https://www.wikidata.org/wiki/Q228736 |
| concepts[3].display_name | Materials science |
| concepts[4].id | https://openalex.org/C79794668 |
| concepts[4].level | 2 |
| concepts[4].score | 0.6892204284667969 |
| concepts[4].wikidata | https://www.wikidata.org/wiki/Q1616270 |
| concepts[4].display_name | Heterojunction |
| concepts[5].id | https://openalex.org/C2779133538 |
| concepts[5].level | 3 |
| concepts[5].score | 0.613642692565918 |
| concepts[5].wikidata | https://www.wikidata.org/wiki/Q677010 |
| concepts[5].display_name | Wafer bonding |
| concepts[6].id | https://openalex.org/C30080830 |
| concepts[6].level | 2 |
| concepts[6].score | 0.5934898853302002 |
| concepts[6].wikidata | https://www.wikidata.org/wiki/Q169917 |
| concepts[6].display_name | Graphene |
| concepts[7].id | https://openalex.org/C49040817 |
| concepts[7].level | 1 |
| concepts[7].score | 0.5883930921554565 |
| concepts[7].wikidata | https://www.wikidata.org/wiki/Q193091 |
| concepts[7].display_name | Optoelectronics |
| concepts[8].id | https://openalex.org/C108225325 |
| concepts[8].level | 2 |
| concepts[8].score | 0.5403843522071838 |
| concepts[8].wikidata | https://www.wikidata.org/wiki/Q11456 |
| concepts[8].display_name | Semiconductor |
| concepts[9].id | https://openalex.org/C20788544 |
| concepts[9].level | 2 |
| concepts[9].score | 0.5091549754142761 |
| concepts[9].wikidata | https://www.wikidata.org/wiki/Q467054 |
| concepts[9].display_name | Photonics |
| concepts[10].id | https://openalex.org/C66018809 |
| concepts[10].level | 3 |
| concepts[10].score | 0.47198182344436646 |
| concepts[10].wikidata | https://www.wikidata.org/wiki/Q1570432 |
| concepts[10].display_name | Semiconductor device fabrication |
| concepts[11].id | https://openalex.org/C549387045 |
| concepts[11].level | 2 |
| concepts[11].score | 0.4367600083351135 |
| concepts[11].wikidata | https://www.wikidata.org/wiki/Q1053 |
| concepts[11].display_name | Molybdenum |
| concepts[12].id | https://openalex.org/C171250308 |
| concepts[12].level | 1 |
| concepts[12].score | 0.43091779947280884 |
| concepts[12].wikidata | https://www.wikidata.org/wiki/Q11468 |
| concepts[12].display_name | Nanotechnology |
| concepts[13].id | https://openalex.org/C61696701 |
| concepts[13].level | 1 |
| concepts[13].score | 0.39989426732063293 |
| concepts[13].wikidata | https://www.wikidata.org/wiki/Q770766 |
| concepts[13].display_name | Engineering physics |
| concepts[14].id | https://openalex.org/C159985019 |
| concepts[14].level | 1 |
| concepts[14].score | 0.19564256072044373 |
| concepts[14].wikidata | https://www.wikidata.org/wiki/Q181790 |
| concepts[14].display_name | Composite material |
| concepts[15].id | https://openalex.org/C191897082 |
| concepts[15].level | 1 |
| concepts[15].score | 0.1303240954875946 |
| concepts[15].wikidata | https://www.wikidata.org/wiki/Q11467 |
| concepts[15].display_name | Metallurgy |
| concepts[16].id | https://openalex.org/C127413603 |
| concepts[16].level | 0 |
| concepts[16].score | 0.12652015686035156 |
| concepts[16].wikidata | https://www.wikidata.org/wiki/Q11023 |
| concepts[16].display_name | Engineering |
| concepts[17].id | https://openalex.org/C185592680 |
| concepts[17].level | 0 |
| concepts[17].score | 0.07907626032829285 |
| concepts[17].wikidata | https://www.wikidata.org/wiki/Q2329 |
| concepts[17].display_name | Chemistry |
| concepts[18].id | https://openalex.org/C178790620 |
| concepts[18].level | 1 |
| concepts[18].score | 0.0 |
| concepts[18].wikidata | https://www.wikidata.org/wiki/Q11351 |
| concepts[18].display_name | Organic chemistry |
| keywords[0].id | https://openalex.org/keywords/stacking |
| keywords[0].score | 0.9479671716690063 |
| keywords[0].display_name | Stacking |
| keywords[1].id | https://openalex.org/keywords/wafer |
| keywords[1].score | 0.7430232763290405 |
| keywords[1].display_name | Wafer |
| keywords[2].id | https://openalex.org/keywords/molybdenum-disulfide |
| keywords[2].score | 0.732701301574707 |
| keywords[2].display_name | Molybdenum disulfide |
| keywords[3].id | https://openalex.org/keywords/materials-science |
| keywords[3].score | 0.6924901008605957 |
| keywords[3].display_name | Materials science |
| keywords[4].id | https://openalex.org/keywords/heterojunction |
| keywords[4].score | 0.6892204284667969 |
| keywords[4].display_name | Heterojunction |
| keywords[5].id | https://openalex.org/keywords/wafer-bonding |
| keywords[5].score | 0.613642692565918 |
| keywords[5].display_name | Wafer bonding |
| keywords[6].id | https://openalex.org/keywords/graphene |
| keywords[6].score | 0.5934898853302002 |
| keywords[6].display_name | Graphene |
| keywords[7].id | https://openalex.org/keywords/optoelectronics |
| keywords[7].score | 0.5883930921554565 |
| keywords[7].display_name | Optoelectronics |
| keywords[8].id | https://openalex.org/keywords/semiconductor |
| keywords[8].score | 0.5403843522071838 |
| keywords[8].display_name | Semiconductor |
| keywords[9].id | https://openalex.org/keywords/photonics |
| keywords[9].score | 0.5091549754142761 |
| keywords[9].display_name | Photonics |
| keywords[10].id | https://openalex.org/keywords/semiconductor-device-fabrication |
| keywords[10].score | 0.47198182344436646 |
| keywords[10].display_name | Semiconductor device fabrication |
| keywords[11].id | https://openalex.org/keywords/molybdenum |
| keywords[11].score | 0.4367600083351135 |
| keywords[11].display_name | Molybdenum |
| keywords[12].id | https://openalex.org/keywords/nanotechnology |
| keywords[12].score | 0.43091779947280884 |
| keywords[12].display_name | Nanotechnology |
| keywords[13].id | https://openalex.org/keywords/engineering-physics |
| keywords[13].score | 0.39989426732063293 |
| keywords[13].display_name | Engineering physics |
| keywords[14].id | https://openalex.org/keywords/composite-material |
| keywords[14].score | 0.19564256072044373 |
| keywords[14].display_name | Composite material |
| keywords[15].id | https://openalex.org/keywords/metallurgy |
| keywords[15].score | 0.1303240954875946 |
| keywords[15].display_name | Metallurgy |
| keywords[16].id | https://openalex.org/keywords/engineering |
| keywords[16].score | 0.12652015686035156 |
| keywords[16].display_name | Engineering |
| keywords[17].id | https://openalex.org/keywords/chemistry |
| keywords[17].score | 0.07907626032829285 |
| keywords[17].display_name | Chemistry |
| language | en |
| locations[0].id | doi:10.1364/cleo_si.2021.sw3f.2 |
| locations[0].is_oa | True |
| locations[0].source.id | https://openalex.org/S4306418073 |
| locations[0].source.issn | |
| locations[0].source.type | conference |
| locations[0].source.is_oa | False |
| locations[0].source.issn_l | |
| locations[0].source.is_core | False |
| locations[0].source.is_in_doaj | False |
| locations[0].source.display_name | Conference on Lasers and Electro-Optics |
| locations[0].source.host_organization | |
| locations[0].source.host_organization_name | |
| locations[0].license | |
| locations[0].pdf_url | https://opg.optica.org/viewmedia.cfm?uri=CLEO_SI-2021-SW3F.2&seq=0 |
| locations[0].version | publishedVersion |
| locations[0].raw_type | proceedings-article |
| locations[0].license_id | |
| locations[0].is_accepted | True |
| locations[0].is_published | True |
| locations[0].raw_source_name | Conference on Lasers and Electro-Optics |
| locations[0].landing_page_url | https://doi.org/10.1364/cleo_si.2021.sw3f.2 |
| locations[1].id | pmh:oai:DiVA.org:kth-302523 |
| locations[1].is_oa | True |
| locations[1].source.id | https://openalex.org/S4306400013 |
| locations[1].source.issn | |
| locations[1].source.type | repository |
| locations[1].source.is_oa | False |
| locations[1].source.issn_l | |
| locations[1].source.is_core | False |
| locations[1].source.is_in_doaj | False |
| locations[1].source.display_name | Publications (Konstfack University of Arts, Crafts, and Design) |
| locations[1].source.host_organization | https://openalex.org/I218177685 |
| locations[1].source.host_organization_name | University College of Arts Crafts and Design |
| locations[1].source.host_organization_lineage | https://openalex.org/I218177685 |
| locations[1].license | other-oa |
| locations[1].pdf_url | |
| locations[1].version | submittedVersion |
| locations[1].raw_type | text |
| locations[1].license_id | https://openalex.org/licenses/other-oa |
| locations[1].is_accepted | False |
| locations[1].is_published | False |
| locations[1].raw_source_name | |
| locations[1].landing_page_url | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-302523 |
| indexed_in | crossref |
| authorships[0].author.id | https://openalex.org/A5039326045 |
| authorships[0].author.orcid | https://orcid.org/0000-0003-3936-818X |
| authorships[0].author.display_name | Arne Quellmalz |
| authorships[0].countries | SE |
| authorships[0].affiliations[0].institution_ids | https://openalex.org/I86987016 |
| authorships[0].affiliations[0].raw_affiliation_string | Micro and Nanosystems, KTH Royal Institute of Technology, Malvinas väg 10, 10044 Stockholm, Sweden |
| authorships[0].institutions[0].id | https://openalex.org/I86987016 |
| authorships[0].institutions[0].ror | https://ror.org/026vcq606 |
| authorships[0].institutions[0].type | education |
| authorships[0].institutions[0].lineage | https://openalex.org/I86987016 |
| authorships[0].institutions[0].country_code | SE |
| authorships[0].institutions[0].display_name | KTH Royal Institute of Technology |
| authorships[0].author_position | first |
| authorships[0].raw_author_name | Arne Quellmalz |
| authorships[0].is_corresponding | False |
| authorships[0].raw_affiliation_strings | Micro and Nanosystems, KTH Royal Institute of Technology, Malvinas väg 10, 10044 Stockholm, Sweden |
| authorships[1].author.id | https://openalex.org/A5045933589 |
| authorships[1].author.orcid | https://orcid.org/0000-0002-7702-0005 |
| authorships[1].author.display_name | Simon Sawallich |
| authorships[1].countries | DE |
| authorships[1].affiliations[0].institution_ids | https://openalex.org/I4210164045 |
| authorships[1].affiliations[0].raw_affiliation_string | Protemics GmbH, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany |
| authorships[1].affiliations[1].institution_ids | https://openalex.org/I887968799 |
| authorships[1].affiliations[1].raw_affiliation_string | Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 2, 52074 Aachen, Germany |
| authorships[1].institutions[0].id | https://openalex.org/I4210164045 |
| authorships[1].institutions[0].ror | https://ror.org/05f12dd47 |
| authorships[1].institutions[0].type | company |
| authorships[1].institutions[0].lineage | https://openalex.org/I4210164045 |
| authorships[1].institutions[0].country_code | DE |
| authorships[1].institutions[0].display_name | Protemics (Germany) |
| authorships[1].institutions[1].id | https://openalex.org/I887968799 |
| authorships[1].institutions[1].ror | https://ror.org/04xfq0f34 |
| authorships[1].institutions[1].type | education |
| authorships[1].institutions[1].lineage | https://openalex.org/I887968799 |
| authorships[1].institutions[1].country_code | DE |
| authorships[1].institutions[1].display_name | RWTH Aachen University |
| authorships[1].author_position | middle |
| authorships[1].raw_author_name | Simon Sawallich |
| authorships[1].is_corresponding | False |
| authorships[1].raw_affiliation_strings | Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 2, 52074 Aachen, Germany, Protemics GmbH, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany |
| authorships[2].author.id | https://openalex.org/A5032499522 |
| authorships[2].author.orcid | https://orcid.org/0000-0001-9362-1911 |
| authorships[2].author.display_name | Maximilian Prechtl |
| authorships[2].countries | DE |
| authorships[2].affiliations[0].institution_ids | https://openalex.org/I40527276 |
| authorships[2].affiliations[0].raw_affiliation_string | Institute of Physics, Universität der Bundeswehr München, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany |
| authorships[2].institutions[0].id | https://openalex.org/I40527276 |
| authorships[2].institutions[0].ror | https://ror.org/05kkv3f82 |
| authorships[2].institutions[0].type | education |
| authorships[2].institutions[0].lineage | https://openalex.org/I1315109972, https://openalex.org/I40527276, https://openalex.org/I4387152969 |
| authorships[2].institutions[0].country_code | DE |
| authorships[2].institutions[0].display_name | Universität der Bundeswehr München |
| authorships[2].author_position | middle |
| authorships[2].raw_author_name | Maximilian Prechtl |
| authorships[2].is_corresponding | False |
| authorships[2].raw_affiliation_strings | Institute of Physics, Universität der Bundeswehr München, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany |
| authorships[3].author.id | https://openalex.org/A5012882741 |
| authorships[3].author.orcid | https://orcid.org/0000-0002-5409-4124 |
| authorships[3].author.display_name | Oliver Hartwig |
| authorships[3].countries | DE |
| authorships[3].affiliations[0].institution_ids | https://openalex.org/I40527276 |
| authorships[3].affiliations[0].raw_affiliation_string | Institute of Physics, Universität der Bundeswehr München, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany |
| authorships[3].institutions[0].id | https://openalex.org/I40527276 |
| authorships[3].institutions[0].ror | https://ror.org/05kkv3f82 |
| authorships[3].institutions[0].type | education |
| authorships[3].institutions[0].lineage | https://openalex.org/I1315109972, https://openalex.org/I40527276, https://openalex.org/I4387152969 |
| authorships[3].institutions[0].country_code | DE |
| authorships[3].institutions[0].display_name | Universität der Bundeswehr München |
| authorships[3].author_position | middle |
| authorships[3].raw_author_name | Oliver Hartwig |
| authorships[3].is_corresponding | False |
| authorships[3].raw_affiliation_strings | Institute of Physics, Universität der Bundeswehr München, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany |
| authorships[4].author.id | https://openalex.org/A5103116973 |
| authorships[4].author.orcid | https://orcid.org/0000-0002-0191-8222 |
| authorships[4].author.display_name | Siwei Luo |
| authorships[4].countries | DE |
| authorships[4].affiliations[0].institution_ids | https://openalex.org/I40527276 |
| authorships[4].affiliations[0].raw_affiliation_string | Institute of Physics, Universität der Bundeswehr München, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany |
| authorships[4].institutions[0].id | https://openalex.org/I40527276 |
| authorships[4].institutions[0].ror | https://ror.org/05kkv3f82 |
| authorships[4].institutions[0].type | education |
| authorships[4].institutions[0].lineage | https://openalex.org/I1315109972, https://openalex.org/I40527276, https://openalex.org/I4387152969 |
| authorships[4].institutions[0].country_code | DE |
| authorships[4].institutions[0].display_name | Universität der Bundeswehr München |
| authorships[4].author_position | middle |
| authorships[4].raw_author_name | Siwei Luo |
| authorships[4].is_corresponding | False |
| authorships[4].raw_affiliation_strings | Institute of Physics, Universität der Bundeswehr München, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany |
| authorships[5].author.id | https://openalex.org/A5101541891 |
| authorships[5].author.orcid | https://orcid.org/0000-0002-6799-6709 |
| authorships[5].author.display_name | Stefan Wagner |
| authorships[5].countries | DE |
| authorships[5].affiliations[0].institution_ids | https://openalex.org/I4210108354 |
| authorships[5].affiliations[0].raw_affiliation_string | AMO GmbH, Advanced Microelectronic Center Aachen (AMICA), Otto-Blumenthal-Str. 25, 52074 Aachen, Germany |
| authorships[5].institutions[0].id | https://openalex.org/I4210108354 |
| authorships[5].institutions[0].ror | https://ror.org/01sd0e661 |
| authorships[5].institutions[0].type | company |
| authorships[5].institutions[0].lineage | https://openalex.org/I4210108354 |
| authorships[5].institutions[0].country_code | DE |
| authorships[5].institutions[0].display_name | AMO (Germany) |
| authorships[5].author_position | middle |
| authorships[5].raw_author_name | Stefan Wagner |
| authorships[5].is_corresponding | False |
| authorships[5].raw_affiliation_strings | AMO GmbH, Advanced Microelectronic Center Aachen (AMICA), Otto-Blumenthal-Str. 25, 52074 Aachen, Germany |
| authorships[6].author.id | https://openalex.org/A5020944869 |
| authorships[6].author.orcid | https://orcid.org/0000-0002-7412-700X |
| authorships[6].author.display_name | Georg S. Duesberg |
| authorships[6].countries | DE |
| authorships[6].affiliations[0].institution_ids | https://openalex.org/I40527276 |
| authorships[6].affiliations[0].raw_affiliation_string | Institute of Physics, Universität der Bundeswehr München, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany |
| authorships[6].institutions[0].id | https://openalex.org/I40527276 |
| authorships[6].institutions[0].ror | https://ror.org/05kkv3f82 |
| authorships[6].institutions[0].type | education |
| authorships[6].institutions[0].lineage | https://openalex.org/I1315109972, https://openalex.org/I40527276, https://openalex.org/I4387152969 |
| authorships[6].institutions[0].country_code | DE |
| authorships[6].institutions[0].display_name | Universität der Bundeswehr München |
| authorships[6].author_position | middle |
| authorships[6].raw_author_name | Georg S. Duesberg |
| authorships[6].is_corresponding | False |
| authorships[6].raw_affiliation_strings | Institute of Physics, Universität der Bundeswehr München, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany |
| authorships[7].author.id | https://openalex.org/A5087833312 |
| authorships[7].author.orcid | https://orcid.org/0000-0003-4552-2411 |
| authorships[7].author.display_name | Max C. Lemme |
| authorships[7].countries | DE |
| authorships[7].affiliations[0].institution_ids | https://openalex.org/I4210108354 |
| authorships[7].affiliations[0].raw_affiliation_string | AMO GmbH, Advanced Microelectronic Center Aachen (AMICA), Otto-Blumenthal-Str. 25, 52074 Aachen, Germany |
| authorships[7].institutions[0].id | https://openalex.org/I4210108354 |
| authorships[7].institutions[0].ror | https://ror.org/01sd0e661 |
| authorships[7].institutions[0].type | company |
| authorships[7].institutions[0].lineage | https://openalex.org/I4210108354 |
| authorships[7].institutions[0].country_code | DE |
| authorships[7].institutions[0].display_name | AMO (Germany) |
| authorships[7].author_position | middle |
| authorships[7].raw_author_name | Max C. Lemme |
| authorships[7].is_corresponding | False |
| authorships[7].raw_affiliation_strings | AMO GmbH, Advanced Microelectronic Center Aachen (AMICA), Otto-Blumenthal-Str. 25, 52074 Aachen, Germany |
| authorships[8].author.id | https://openalex.org/A5085711393 |
| authorships[8].author.orcid | https://orcid.org/0000-0002-0525-8647 |
| authorships[8].author.display_name | Frank Niklaus |
| authorships[8].countries | SE |
| authorships[8].affiliations[0].institution_ids | https://openalex.org/I86987016 |
| authorships[8].affiliations[0].raw_affiliation_string | Micro and Nanosystems, KTH Royal Institute of Technology, Malvinas väg 10, 10044 Stockholm, Sweden |
| authorships[8].institutions[0].id | https://openalex.org/I86987016 |
| authorships[8].institutions[0].ror | https://ror.org/026vcq606 |
| authorships[8].institutions[0].type | education |
| authorships[8].institutions[0].lineage | https://openalex.org/I86987016 |
| authorships[8].institutions[0].country_code | SE |
| authorships[8].institutions[0].display_name | KTH Royal Institute of Technology |
| authorships[8].author_position | middle |
| authorships[8].raw_author_name | Frank Niklaus |
| authorships[8].is_corresponding | False |
| authorships[8].raw_affiliation_strings | Micro and Nanosystems, KTH Royal Institute of Technology, Malvinas väg 10, 10044 Stockholm, Sweden |
| authorships[9].author.id | https://openalex.org/A5027030035 |
| authorships[9].author.orcid | https://orcid.org/0000-0001-9008-8402 |
| authorships[9].author.display_name | Kristinn B. Gylfason |
| authorships[9].countries | SE |
| authorships[9].affiliations[0].institution_ids | https://openalex.org/I86987016 |
| authorships[9].affiliations[0].raw_affiliation_string | Micro and Nanosystems, KTH Royal Institute of Technology, Malvinas väg 10, 10044 Stockholm, Sweden |
| authorships[9].institutions[0].id | https://openalex.org/I86987016 |
| authorships[9].institutions[0].ror | https://ror.org/026vcq606 |
| authorships[9].institutions[0].type | education |
| authorships[9].institutions[0].lineage | https://openalex.org/I86987016 |
| authorships[9].institutions[0].country_code | SE |
| authorships[9].institutions[0].display_name | KTH Royal Institute of Technology |
| authorships[9].author_position | last |
| authorships[9].raw_author_name | Kristinn B. Gylfason |
| authorships[9].is_corresponding | False |
| authorships[9].raw_affiliation_strings | Micro and Nanosystems, KTH Royal Institute of Technology, Malvinas väg 10, 10044 Stockholm, Sweden |
| has_content.pdf | True |
| has_content.grobid_xml | True |
| is_paratext | False |
| open_access.is_oa | True |
| open_access.oa_url | https://opg.optica.org/viewmedia.cfm?uri=CLEO_SI-2021-SW3F.2&seq=0 |
| open_access.oa_status | bronze |
| open_access.any_repository_has_fulltext | False |
| created_date | 2025-10-10T00:00:00 |
| display_name | Stacking of Two-Dimensional Materials to Large-Area Heterostructures by Wafer Bonding |
| has_fulltext | True |
| is_retracted | False |
| updated_date | 2025-11-06T03:46:38.306776 |
| primary_topic.id | https://openalex.org/T10275 |
| primary_topic.field.id | https://openalex.org/fields/25 |
| primary_topic.field.display_name | Materials Science |
| primary_topic.score | 0.9998000264167786 |
| primary_topic.domain.id | https://openalex.org/domains/3 |
| primary_topic.domain.display_name | Physical Sciences |
| primary_topic.subfield.id | https://openalex.org/subfields/2505 |
| primary_topic.subfield.display_name | Materials Chemistry |
| primary_topic.display_name | 2D Materials and Applications |
| related_works | https://openalex.org/W2035329725, https://openalex.org/W2992369614, https://openalex.org/W335291211, https://openalex.org/W4376641153, https://openalex.org/W4252692220, https://openalex.org/W3005194388, https://openalex.org/W1982212552, https://openalex.org/W2040198431, https://openalex.org/W376549687, https://openalex.org/W4389543080 |
| cited_by_count | 2 |
| counts_by_year[0].year | 2021 |
| counts_by_year[0].cited_by_count | 1 |
| counts_by_year[1].year | 2020 |
| counts_by_year[1].cited_by_count | 1 |
| locations_count | 2 |
| best_oa_location.id | doi:10.1364/cleo_si.2021.sw3f.2 |
| best_oa_location.is_oa | True |
| best_oa_location.source.id | https://openalex.org/S4306418073 |
| best_oa_location.source.issn | |
| best_oa_location.source.type | conference |
| best_oa_location.source.is_oa | False |
| best_oa_location.source.issn_l | |
| best_oa_location.source.is_core | False |
| best_oa_location.source.is_in_doaj | False |
| best_oa_location.source.display_name | Conference on Lasers and Electro-Optics |
| best_oa_location.source.host_organization | |
| best_oa_location.source.host_organization_name | |
| best_oa_location.license | |
| best_oa_location.pdf_url | https://opg.optica.org/viewmedia.cfm?uri=CLEO_SI-2021-SW3F.2&seq=0 |
| best_oa_location.version | publishedVersion |
| best_oa_location.raw_type | proceedings-article |
| best_oa_location.license_id | |
| best_oa_location.is_accepted | True |
| best_oa_location.is_published | True |
| best_oa_location.raw_source_name | Conference on Lasers and Electro-Optics |
| best_oa_location.landing_page_url | https://doi.org/10.1364/cleo_si.2021.sw3f.2 |
| primary_location.id | doi:10.1364/cleo_si.2021.sw3f.2 |
| primary_location.is_oa | True |
| primary_location.source.id | https://openalex.org/S4306418073 |
| primary_location.source.issn | |
| primary_location.source.type | conference |
| primary_location.source.is_oa | False |
| primary_location.source.issn_l | |
| primary_location.source.is_core | False |
| primary_location.source.is_in_doaj | False |
| primary_location.source.display_name | Conference on Lasers and Electro-Optics |
| primary_location.source.host_organization | |
| primary_location.source.host_organization_name | |
| primary_location.license | |
| primary_location.pdf_url | https://opg.optica.org/viewmedia.cfm?uri=CLEO_SI-2021-SW3F.2&seq=0 |
| primary_location.version | publishedVersion |
| primary_location.raw_type | proceedings-article |
| primary_location.license_id | |
| primary_location.is_accepted | True |
| primary_location.is_published | True |
| primary_location.raw_source_name | Conference on Lasers and Electro-Optics |
| primary_location.landing_page_url | https://doi.org/10.1364/cleo_si.2021.sw3f.2 |
| publication_date | 2021-01-01 |
| publication_year | 2021 |
| referenced_works | https://openalex.org/W2895305195, https://openalex.org/W2335370736, https://openalex.org/W2793369479, https://openalex.org/W2963494765, https://openalex.org/W2972241500, https://openalex.org/W2051901075, https://openalex.org/W3102814064, https://openalex.org/W3012642646, https://openalex.org/W3104963128 |
| referenced_works_count | 9 |
| abstract_inverted_index.2 | 37 |
| abstract_inverted_index.a | 16 |
| abstract_inverted_index.). | 38 |
| abstract_inverted_index.2D | 3 |
| abstract_inverted_index.We | 14 |
| abstract_inverted_index.is | 8 |
| abstract_inverted_index.of | 2, 31 |
| abstract_inverted_index.The | 0 |
| abstract_inverted_index.and | 26, 33 |
| abstract_inverted_index.for | 5 |
| abstract_inverted_index.not | 9 |
| abstract_inverted_index.the | 29 |
| abstract_inverted_index.(MoS | 36 |
| abstract_inverted_index.only | 21 |
| abstract_inverted_index.that | 19 |
| abstract_inverted_index.uses | 20 |
| abstract_inverted_index.with | 11 |
| abstract_inverted_index.report | 15 |
| abstract_inverted_index.generic | 17 |
| abstract_inverted_index.readily | 22 |
| abstract_inverted_index.graphene | 32 |
| abstract_inverted_index.photonic | 6 |
| abstract_inverted_index.stacking | 30 |
| abstract_inverted_index.available | 23 |
| abstract_inverted_index.disulfide | 35 |
| abstract_inverted_index.equipment | 25 |
| abstract_inverted_index.materials | 4 |
| abstract_inverted_index.compatible | 10 |
| abstract_inverted_index.molybdenum | 34 |
| abstract_inverted_index.demonstrate | 28 |
| abstract_inverted_index.high-volume | 12 |
| abstract_inverted_index.integration | 1 |
| abstract_inverted_index.methodology | 18 |
| abstract_inverted_index.applications | 7 |
| abstract_inverted_index.semiconductor | 24 |
| abstract_inverted_index.experimentally | 27 |
| abstract_inverted_index.manufacturing. | 13 |
| cited_by_percentile_year.max | 94 |
| cited_by_percentile_year.min | 89 |
| countries_distinct_count | 2 |
| institutions_distinct_count | 10 |
| sustainable_development_goals[0].id | https://metadata.un.org/sdg/9 |
| sustainable_development_goals[0].score | 0.49000000953674316 |
| sustainable_development_goals[0].display_name | Industry, innovation and infrastructure |
| citation_normalized_percentile.value | 0.55616438 |
| citation_normalized_percentile.is_in_top_1_percent | False |
| citation_normalized_percentile.is_in_top_10_percent | False |