Status analysis on sputtering and erosion evaluation methods of ion optic systems Article Swipe

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Long Miao , Tongxun YANG , Zhengxi Zhu , Chang Lu , Zhiwen Wu , Ningfei Wang ·

YOU? · · 2024 · Open Access · · DOI: https://doi.org/10.1016/j.cja.2024.08.016

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Environmental Science

Concepts

Sputtering Erosion Materials science Ion Remote sensing Environmental science Geology Nanotechnology Physics Geomorphology Thin film Quantum mechanics

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Type: article
Language: en
Landing Page: https://doi.org/10.1016/j.cja.2024.08.016
OA Status: hybrid
Cited By: 4
References: 82
Related Works: 10
OpenAlex ID: https://openalex.org/W4401582749

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OpenAlex ID: https://openalex.org/W4401582749

Canonical identifier for this work in OpenAlex
DOI: https://doi.org/10.1016/j.cja.2024.08.016

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Title: Status analysis on sputtering and erosion evaluation methods of ion optic systems

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Type: article

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Language: en

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Publication year: 2024

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Publication date: 2024-08-14

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Authors: Long Miao, Tongxun YANG, Zhengxi Zhu, Chang Lu, Zhiwen Wu, Ningfei Wang

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Landing page: https://doi.org/10.1016/j.cja.2024.08.016

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Open access: Yes

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OA status: hybrid

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OA URL: https://doi.org/10.1016/j.cja.2024.08.016

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Concepts: Sputtering, Erosion, Materials science, Ion, Remote sensing, Environmental science, Geology, Nanotechnology, Physics, Geomorphology, Thin film, Quantum mechanics

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Cited by: 4

Total citation count in OpenAlex
Citations by year (recent): 2025: 4

Per-year citation counts (last 5 years)
References (count): 82

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Related works (count): 10

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