Study of Gas Permeation Through Thin ta-C:H Films Article Swipe
YOU?
·
· 2015
· Open Access
·
· DOI: https://doi.org/10.12693/aphyspola.127.1236
· OA: W1170249662
Protective ultra-thin barrier lms gather increasing economic interest for controlling permeation and diusion from the biological surrounding in implanted sensor and electronic devices in future medicine.Thus, the aim of this work was the investigation of the lm thickness inuence on the gas permeation barrier of ultra-thin, cytocompatible tetrahedral amorphous carbon (ta-C:H) lms on polyimide (PI) foils.Plasma-activated chemical vapor deposition (direct deposition from an ion source) was applied to deposit these diamond-like carbon lms.The results indicate high barrier to hydrogen gas permeation by all lm thicknesses (<0.2% H2 permeation compared to uncoated PI).While the thickness of the ta-C:H layers has minor inuence, the number of layers, realized by one-or double-side deposition strongly impacts the barrier eect.Finally, tests under tensile stresses showed minor impact in the elasto-plastic deformation regime, but the expected strong increase of gas permeation after exceeding the tensile strength and lm fracture.
