SYSTEMATIC DESIGN OF MEMS RESONATORS FOR OPTIMAL NONLINEAR DYNAMIC RESPONSE Article Swipe
L.L. Li
,
Pavel Polunin
,
Suguang Dou
,
Oriel Shoshani
,
B. Scott Strachan
,
Jakob Søndergaard Jensen
,
Steven W. Shaw
,
Kimberly L. Turner
·
YOU?
·
· 2016
· Open Access
·
· DOI: https://doi.org/10.31438/trf.hh2016.118
YOU?
·
· 2016
· Open Access
·
· DOI: https://doi.org/10.31438/trf.hh2016.118
We report on the first experimental demonstration of an effective and systematic control over the mechanical contribution to the Duffing nonlinearity in microelectromechanical (MEMS) resonators using nonlinear shape optimization methods.A set of microbeams with selected variable geometry profiles optimized for in-plane vibrations was designed and characterized.Experimental results have demonstrated that these shape changes result in more than a three-fold increase and a two-fold reduction in the Duffing nonlinearity due to resonator mid-line stretching.The minimization of the cubic term in the resonator stiffness resulted in a substantial increase of the resonator linear range.
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- Type
- article
- Language
- en
- Landing Page
- http://doi.org/10.31438/trf.hh2016.118
- https://doi.org/10.31438/trf.hh2016.118
- OA Status
- bronze
- References
- 25
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W2930789780
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- OpenAlex ID
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https://openalex.org/W2930789780Canonical identifier for this work in OpenAlex
- DOI
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https://doi.org/10.31438/trf.hh2016.118Digital Object Identifier
- Title
-
SYSTEMATIC DESIGN OF MEMS RESONATORS FOR OPTIMAL NONLINEAR DYNAMIC RESPONSEWork title
- Type
-
articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
-
2016Year of publication
- Publication date
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2016-05-26Full publication date if available
- Authors
-
L.L. Li, Pavel Polunin, Suguang Dou, Oriel Shoshani, B. Scott Strachan, Jakob Søndergaard Jensen, Steven W. Shaw, Kimberly L. TurnerList of authors in order
- Landing page
-
https://doi.org/10.31438/trf.hh2016.118Publisher landing page
- PDF URL
-
https://doi.org/10.31438/trf.hh2016.118Direct link to full text PDF
- Open access
-
YesWhether a free full text is available
- OA status
-
bronzeOpen access status per OpenAlex
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https://doi.org/10.31438/trf.hh2016.118Direct OA link when available
- Concepts
-
Resonator, Microelectromechanical systems, Nonlinear system, Stiffness, Vibration, Materials science, Control theory (sociology), Acoustics, Duffing equation, Physics, Computer science, Optoelectronics, Quantum mechanics, Artificial intelligence, Composite material, Control (management)Top concepts (fields/topics) attached by OpenAlex
- Cited by
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0Total citation count in OpenAlex
- References (count)
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25Number of works referenced by this work
- Related works (count)
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10Other works algorithmically related by OpenAlex
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