Temporal pre-pulse shaping in dual pulse laser produced plasma for the optimization of the EUV source in tin microdroplet system Article Swipe
V. Sizyuk
,
T. Sizyuk
,
A. Hassanein
·
YOU?
·
· 2024
· Open Access
·
· DOI: https://doi.org/10.1063/5.0189195
YOU?
·
· 2024
· Open Access
·
· DOI: https://doi.org/10.1063/5.0189195
Dual-laser beams interacting with small droplets of liquid tin are currently the most efficient systems for producing the 13.5 nm EUV photon radiation source required for the next generation microchips. Usually, EUV light is produced during the second main-pulse stage, while the pre-pulse (PP) is used for target preparation, i.e., droplet preheating, vaporization, and target deformation. However, the PP laser energy can be utilized more efficiently if the EUV producing plasma is being developed during the PP stage as well. In this work, we study the ways of optimization of the PP laser temporal shape to achieve conditions for maximum EUV output during the pre-pulse. The size of the deformed droplet is kept optimized for the following main laser pulse. Our simulations showed a significant increase in the EUV output at the pre-pulse stage when a ramping profile is used for the laser temporal shape. Using the ramped square pre-pulse produces 24% gain in the EUV output in comparison with the standard Gaussian temporal profile (i.e., regular Nd:YAG shape) for the same energy of the laser pulse.
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- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.1063/5.0189195
- OA Status
- green
- Cited By
- 6
- References
- 17
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4392355644
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Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W4392355644Canonical identifier for this work in OpenAlex
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https://doi.org/10.1063/5.0189195Digital Object Identifier
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Temporal pre-pulse shaping in dual pulse laser produced plasma for the optimization of the EUV source in tin microdroplet systemWork title
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articleOpenAlex work type
- Language
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enPrimary language
- Publication year
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2024Year of publication
- Publication date
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2024-03-01Full publication date if available
- Authors
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V. Sizyuk, T. Sizyuk, A. HassaneinList of authors in order
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https://doi.org/10.1063/5.0189195Publisher landing page
- Open access
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YesWhether a free full text is available
- OA status
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greenOpen access status per OpenAlex
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https://www.osti.gov/servlets/purl/2500332Direct OA link when available
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Extreme ultraviolet lithography, Laser, Pulse (music), Optics, Extreme ultraviolet, Plasma, Tin, Materials science, Vaporization, Pulse duration, Optoelectronics, Physics, Detector, Metallurgy, Quantum mechanics, ThermodynamicsTop concepts (fields/topics) attached by OpenAlex
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6Total citation count in OpenAlex
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2025: 6Per-year citation counts (last 5 years)
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10Other works algorithmically related by OpenAlex
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| abstract_inverted_index.main | 117 |
| abstract_inverted_index.more | 64 |
| abstract_inverted_index.most | 12 |
| abstract_inverted_index.next | 27 |
| abstract_inverted_index.same | 171 |
| abstract_inverted_index.size | 106 |
| abstract_inverted_index.this | 81 |
| abstract_inverted_index.used | 45, 139 |
| abstract_inverted_index.ways | 86 |
| abstract_inverted_index.when | 134 |
| abstract_inverted_index.with | 3, 159 |
| abstract_inverted_index.Using | 145 |
| abstract_inverted_index.beams | 1 |
| abstract_inverted_index.being | 72 |
| abstract_inverted_index.i.e., | 49 |
| abstract_inverted_index.laser | 59, 92, 118, 142, 175 |
| abstract_inverted_index.light | 32 |
| abstract_inverted_index.shape | 94 |
| abstract_inverted_index.small | 4 |
| abstract_inverted_index.stage | 77, 133 |
| abstract_inverted_index.study | 84 |
| abstract_inverted_index.well. | 79 |
| abstract_inverted_index.while | 40 |
| abstract_inverted_index.work, | 82 |
| abstract_inverted_index.(i.e., | 165 |
| abstract_inverted_index.Nd:YAG | 167 |
| abstract_inverted_index.during | 35, 74, 102 |
| abstract_inverted_index.energy | 60, 172 |
| abstract_inverted_index.liquid | 7 |
| abstract_inverted_index.output | 101, 129, 156 |
| abstract_inverted_index.photon | 21 |
| abstract_inverted_index.plasma | 70 |
| abstract_inverted_index.pulse. | 119, 176 |
| abstract_inverted_index.ramped | 147 |
| abstract_inverted_index.second | 37 |
| abstract_inverted_index.shape) | 168 |
| abstract_inverted_index.shape. | 144 |
| abstract_inverted_index.showed | 122 |
| abstract_inverted_index.source | 23 |
| abstract_inverted_index.square | 148 |
| abstract_inverted_index.stage, | 39 |
| abstract_inverted_index.target | 47, 54 |
| abstract_inverted_index.achieve | 96 |
| abstract_inverted_index.droplet | 50, 110 |
| abstract_inverted_index.maximum | 99 |
| abstract_inverted_index.profile | 137, 164 |
| abstract_inverted_index.ramping | 136 |
| abstract_inverted_index.regular | 166 |
| abstract_inverted_index.systems | 14 |
| abstract_inverted_index.Gaussian | 162 |
| abstract_inverted_index.However, | 56 |
| abstract_inverted_index.Usually, | 30 |
| abstract_inverted_index.deformed | 109 |
| abstract_inverted_index.droplets | 5 |
| abstract_inverted_index.increase | 125 |
| abstract_inverted_index.produced | 34 |
| abstract_inverted_index.produces | 150 |
| abstract_inverted_index.required | 24 |
| abstract_inverted_index.standard | 161 |
| abstract_inverted_index.temporal | 93, 143, 163 |
| abstract_inverted_index.utilized | 63 |
| abstract_inverted_index.currently | 10 |
| abstract_inverted_index.developed | 73 |
| abstract_inverted_index.efficient | 13 |
| abstract_inverted_index.following | 116 |
| abstract_inverted_index.optimized | 113 |
| abstract_inverted_index.pre-pulse | 42, 132, 149 |
| abstract_inverted_index.producing | 16, 69 |
| abstract_inverted_index.radiation | 22 |
| abstract_inverted_index.Dual-laser | 0 |
| abstract_inverted_index.comparison | 158 |
| abstract_inverted_index.conditions | 97 |
| abstract_inverted_index.generation | 28 |
| abstract_inverted_index.main-pulse | 38 |
| abstract_inverted_index.pre-pulse. | 104 |
| abstract_inverted_index.efficiently | 65 |
| abstract_inverted_index.interacting | 2 |
| abstract_inverted_index.microchips. | 29 |
| abstract_inverted_index.preheating, | 51 |
| abstract_inverted_index.significant | 124 |
| abstract_inverted_index.simulations | 121 |
| abstract_inverted_index.deformation. | 55 |
| abstract_inverted_index.optimization | 88 |
| abstract_inverted_index.preparation, | 48 |
| abstract_inverted_index.vaporization, | 52 |
| cited_by_percentile_year.max | 99 |
| cited_by_percentile_year.min | 98 |
| countries_distinct_count | 1 |
| institutions_distinct_count | 3 |
| sustainable_development_goals[0].id | https://metadata.un.org/sdg/7 |
| sustainable_development_goals[0].score | 0.8899999856948853 |
| sustainable_development_goals[0].display_name | Affordable and clean energy |
| citation_normalized_percentile.value | 0.89746386 |
| citation_normalized_percentile.is_in_top_1_percent | False |
| citation_normalized_percentile.is_in_top_10_percent | True |