The Bragg Reflector Layer of Low Surface Roughness Based on Solidly Mounted Resonators Article Swipe
Wei-Che Shih
,
Ying‐Chung Chen
,
Wei-Tsai Chang
,
Chien-Chuan Cheng
,
Kuo-Sheng Kao
,
Kuo-Hwa Cheng
,
Chih‐Ming Wang
,
Chih-Yu Wen
,
Jui-Yung Chang
,
Po-Wei Ting
·
YOU?
·
· 2015
· Open Access
·
· DOI: https://doi.org/10.12792/iciae2015.078
YOU?
·
· 2015
· Open Access
·
· DOI: https://doi.org/10.12792/iciae2015.078
In this study, the solidly mounted resonator (SMR) device is composed of a piezoelectric layer sandwiched between two electrodes on a Bragg reflector attached to a silicon substrate. To obtain appropriate SMR characteristics for the new-generation communication applications, the surface roughness of Bragg reflector has been investigated thoroughly. Manufacture parameters are adjusted in accordance with the results of atomic force microscopy (AFM) and scanning electron microscopy (SEM). The frequency response is measured using an HP8720 network analyzer and a CASCADE probe station. Afterwards, a ¼λ mode SMR is experimentally realized. The surface roughness of 6.442 nm and well return loss can be achieved for four-pair SiO 2 /Mo Bragg reflector.
Related Topics
Concepts
Distributed Bragg reflector
Materials science
Resonator
Surface finish
Surface roughness
Reflector (photography)
Optics
Layer (electronics)
Silicon
Optoelectronics
Substrate (aquarium)
Scanning electron microscope
Bragg's law
Diffraction
Nanotechnology
Composite material
Geology
Physics
Light source
Wavelength
Oceanography
Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.12792/iciae2015.078
- https://www2.ia-engineers.org/conference/index.php/iciae/iciae2015/paper/download/565/450
- OA Status
- gold
- References
- 15
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W2312851379
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W2312851379Canonical identifier for this work in OpenAlex
- DOI
-
https://doi.org/10.12792/iciae2015.078Digital Object Identifier
- Title
-
The Bragg Reflector Layer of Low Surface Roughness Based on Solidly Mounted ResonatorsWork title
- Type
-
articleOpenAlex work type
- Language
-
enPrimary language
- Publication year
-
2015Year of publication
- Publication date
-
2015-01-01Full publication date if available
- Authors
-
Wei-Che Shih, Ying‐Chung Chen, Wei-Tsai Chang, Chien-Chuan Cheng, Kuo-Sheng Kao, Kuo-Hwa Cheng, Chih‐Ming Wang, Chih-Yu Wen, Jui-Yung Chang, Po-Wei TingList of authors in order
- Landing page
-
https://doi.org/10.12792/iciae2015.078Publisher landing page
- PDF URL
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https://www2.ia-engineers.org/conference/index.php/iciae/iciae2015/paper/download/565/450Direct link to full text PDF
- Open access
-
YesWhether a free full text is available
- OA status
-
goldOpen access status per OpenAlex
- OA URL
-
https://www2.ia-engineers.org/conference/index.php/iciae/iciae2015/paper/download/565/450Direct OA link when available
- Concepts
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Distributed Bragg reflector, Materials science, Resonator, Surface finish, Surface roughness, Reflector (photography), Optics, Layer (electronics), Silicon, Optoelectronics, Substrate (aquarium), Scanning electron microscope, Bragg's law, Diffraction, Nanotechnology, Composite material, Geology, Physics, Light source, Wavelength, OceanographyTop concepts (fields/topics) attached by OpenAlex
- Cited by
-
0Total citation count in OpenAlex
- References (count)
-
15Number of works referenced by this work
- Related works (count)
-
10Other works algorithmically related by OpenAlex
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