Thermal Marangoni-driven dynamics of spinning liquid films Article Swipe

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Joshua A. Dijksman , Shomeek Mukhopadhyay , Robert Behringer , Thomas P. Witelski ·

YOU? · · 2019 · Open Access · · DOI: https://doi.org/10.1103/physrevfluids.4.084103 · OA: W2811331643

Spin coating of thin films of viscous liquids on a rotating substrate is a\ncore technological component of semiconductor microchip fabrication. The\nthinning dynamics is influenced by many physical processes. Specifically\ntemperature gradients affect thin liquid films through their influence on the\nlocal fluid surface tension. We show here experimentally and numerically that\nadding a static temperature gradient has a significant effect on the\nequilibrium film thickness and height profile reached in spin coating. Our\nresults suggest that thermal gradients can be used to control film height\nprofile dynamics.\n