Thermo-optic coefficient of PECVD silicon-rich silicon nitride Article Swipe

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Natale G. Pruiti , Charalambos Klitis , C. Gough , Stuart May , Marc Sorel ·

YOU? · · 2020 · Open Access · · DOI: https://doi.org/10.1364/ol.403357

The thermo-optic coefficient (TOC) of photonic integrated waveguides fabricated on silicon-rich silicon nitride grown by plasma-enanched chemical vapor deposition is characterized for the first time, to the best of our knowledge. The TOC is found to increase linearly with the fractional composition of silicon over a range from that of silicon nitride to a-Si. This finding is significant for improving the power efficiency of thermally tuned photonic integrated circuits.

Related Topics

Silicon Nitride

Materials Science

Silicon

Chemical Vapor Deposition

$Refractive Index$

Concepts

Plasma-enhanced chemical vapor deposition Silicon nitride Materials science Silicon Chemical vapor deposition Photonics Optoelectronics Hybrid silicon laser Silicon photonics LOCOS Photonic integrated circuit Optics Refractive index Nitride Nanotechnology Physics Layer (electronics)

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Type: article
Language: en
Landing Page: https://doi.org/10.1364/ol.403357
OA Status: hybrid
Cited By: 11
References: 35
Related Works: 10
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DOI: https://doi.org/10.1364/ol.403357

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Title: Thermo-optic coefficient of PECVD silicon-rich silicon nitride

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Language: en

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Publication year: 2020

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Publication date: 2020-10-05

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Authors: Natale G. Pruiti, Charalambos Klitis, C. Gough, Stuart May, Marc Sorel

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Landing page: https://doi.org/10.1364/ol.403357

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Concepts: Plasma-enhanced chemical vapor deposition, Silicon nitride, Materials science, Silicon, Chemical vapor deposition, Photonics, Optoelectronics, Hybrid silicon laser, Silicon photonics, LOCOS, Photonic integrated circuit, Optics, Refractive index, Nitride, Nanotechnology, Physics, Layer (electronics)

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Cited by: 11

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abstract_inverted_index.range	46
abstract_inverted_index.time,	24
abstract_inverted_index.tuned	65
abstract_inverted_index.vapor	17
abstract_inverted_index.finding	55
abstract_inverted_index.nitride	12, 51
abstract_inverted_index.silicon	11, 43, 50
abstract_inverted_index.chemical	16
abstract_inverted_index.increase	36
abstract_inverted_index.linearly	37
abstract_inverted_index.photonic	5, 66
abstract_inverted_index.circuits.	68
abstract_inverted_index.improving	59
abstract_inverted_index.thermally	64
abstract_inverted_index.deposition	18
abstract_inverted_index.efficiency	62
abstract_inverted_index.fabricated	8
abstract_inverted_index.fractional	40
abstract_inverted_index.integrated	6, 67
abstract_inverted_index.knowledge.	30
abstract_inverted_index.waveguides	7
abstract_inverted_index.coefficient	2
abstract_inverted_index.composition	41
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abstract_inverted_index.silicon-rich	10
abstract_inverted_index.thermo-optic	1
abstract_inverted_index.characterized	20
abstract_inverted_index.plasma-enanched	15
cited_by_percentile_year.max	98
cited_by_percentile_year.min	91
countries_distinct_count	0
institutions_distinct_count	5
sustainable_development_goals[0].id	https://metadata.un.org/sdg/7
sustainable_development_goals[0].score	0.8600000143051147
sustainable_development_goals[0].display_name	Affordable and clean energy
citation_normalized_percentile.value	0.68864265
citation_normalized_percentile.is_in_top_1_percent	False
citation_normalized_percentile.is_in_top_10_percent	False