Towards integrated position sensors with nanometer precision Article Swipe
Sebastian A. Schulz
,
Paul A Beck
,
Laura C. Wynne
,
Simone Iadanza
,
Liam O’Faoláin
,
Peter Banzer
·
YOU?
·
· 2023
· Open Access
·
· DOI: https://doi.org/10.1117/12.2644959
YOU?
·
· 2023
· Open Access
·
· DOI: https://doi.org/10.1117/12.2644959
The ability to precisely measure the displacement between two elements, e.g. a mask and a substrate or a beam and optical elements, is fundamental to many precision experiments and processes. Yet typical optical displacement sensors struggle to go significantly below the diffraction limit. Here we combine advances in our understanding of directional scattering from nanoparticles with silicon photonic waveguides to demonstrate a displacement sensor with deep subwavelength accuracy. Depending on the level of integration and waveguide geometry used we achieve a spatial resolution between 5 − 7 nm, equivalent to approximately λ/200 − λ/300.
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- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.1117/12.2644959
- OA Status
- green
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4315631667
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https://doi.org/10.1117/12.2644959Digital Object Identifier
- Title
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Towards integrated position sensors with nanometer precisionWork title
- Type
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articleOpenAlex work type
- Language
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enPrimary language
- Publication year
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2023Year of publication
- Publication date
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2023-01-11Full publication date if available
- Authors
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Sebastian A. Schulz, Paul A Beck, Laura C. Wynne, Simone Iadanza, Liam O’Faoláin, Peter BanzerList of authors in order
- Landing page
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https://doi.org/10.1117/12.2644959Publisher landing page
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YesWhether a free full text is available
- OA status
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greenOpen access status per OpenAlex
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https://research-repository.st-andrews.ac.uk/bitstream/10023/27915/1/Schulz_2023_Towards_integrated_position_sensors_ProcSPIE_1233405.pdfDirect OA link when available
- Concepts
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Displacement (psychology), Optics, Waveguide, Photonics, Position (finance), Diffraction, Nanometre, Image resolution, Silicon, Materials science, Limit (mathematics), Scattering, Silicon photonics, Optoelectronics, Physics, Mathematics, Mathematical analysis, Finance, Psychotherapist, Psychology, EconomicsTop concepts (fields/topics) attached by OpenAlex
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10Other works algorithmically related by OpenAlex
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