Tribological properties of thin films made by atomic layer deposition sliding against silicon Article Swipe
Lauri Kilpi
,
Oili Ylivaara
,
Antti Vaajoki
,
Xuwen Liu
,
Ville Rontu
,
Sakari Sintonen
,
Eero Haimi
,
Jari Malm
,
Markus Bosund
,
M. Tuominen
,
Timo Sajavaara
,
Harri Lipsanen
,
Simo‐Pekka Hannula
,
Riikka L. Puurunen
,
Helena Ronkainen
·
YOU?
·
· 2017
· Open Access
·
· DOI: https://doi.org/10.1116/1.5003729
YOU?
·
· 2017
· Open Access
·
· DOI: https://doi.org/10.1116/1.5003729
Interfacial phenomena, such as adhesion, friction, and wear, can dominate the performance and reliability of microelectromechanical (MEMS) devices. Here, thin films made by atomic layer deposition (ALD) were tested for their tribological properties. Tribological tests were carried out with silicon counterpart sliding against ALD thin films in order to simulate the contacts occurring in the MEMS devices. The counterpart was sliding in a linear reciprocating motion against the ALD films with the total sliding distances of 5 and 20 m. Al2O3 and TiO2 coatings with different deposition temperatures were investigated in addition to Al2O3-TiO2-nanolaminate, TiN, NbN, TiAlCN, a-C:H [diamondlike carbon (DLC)] coatings, and uncoated Si. The formation of the tribolayer in the contact area was the dominating phenomenon for friction and wear performance. Hardness, elastic modulus, and crystallinity of the materials were also investigated. The nitride coatings had the most favorable friction and wear performance of the ALD coatings, yet lower friction coefficient was measured with DLC a-C:H coating. These results help us to take steps toward improved coating solutions in, e.g., MEMS applications.
Related Topics
Concepts
Materials science
Tribology
Atomic layer deposition
Composite material
Thin film
Coating
Crystallinity
Layer (electronics)
Tin
Deposition (geology)
Silicon
Microelectromechanical systems
Silicon nitride
Reciprocating motion
Nanotechnology
Metallurgy
Mechanical engineering
Biology
Paleontology
Sediment
Gas compressor
Engineering
Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.1116/1.5003729
- https://avs.scitation.org/doi/pdf/10.1116/1.5003729
- OA Status
- bronze
- Cited By
- 10
- References
- 47
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W2780280661
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W2780280661Canonical identifier for this work in OpenAlex
- DOI
-
https://doi.org/10.1116/1.5003729Digital Object Identifier
- Title
-
Tribological properties of thin films made by atomic layer deposition sliding against siliconWork title
- Type
-
articleOpenAlex work type
- Language
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enPrimary language
- Publication year
-
2017Year of publication
- Publication date
-
2017-12-29Full publication date if available
- Authors
-
Lauri Kilpi, Oili Ylivaara, Antti Vaajoki, Xuwen Liu, Ville Rontu, Sakari Sintonen, Eero Haimi, Jari Malm, Markus Bosund, M. Tuominen, Timo Sajavaara, Harri Lipsanen, Simo‐Pekka Hannula, Riikka L. Puurunen, Helena RonkainenList of authors in order
- Landing page
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https://doi.org/10.1116/1.5003729Publisher landing page
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https://avs.scitation.org/doi/pdf/10.1116/1.5003729Direct link to full text PDF
- Open access
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YesWhether a free full text is available
- OA status
-
bronzeOpen access status per OpenAlex
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https://avs.scitation.org/doi/pdf/10.1116/1.5003729Direct OA link when available
- Concepts
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Materials science, Tribology, Atomic layer deposition, Composite material, Thin film, Coating, Crystallinity, Layer (electronics), Tin, Deposition (geology), Silicon, Microelectromechanical systems, Silicon nitride, Reciprocating motion, Nanotechnology, Metallurgy, Mechanical engineering, Biology, Paleontology, Sediment, Gas compressor, EngineeringTop concepts (fields/topics) attached by OpenAlex
- Cited by
-
10Total citation count in OpenAlex
- Citations by year (recent)
-
2024: 2, 2023: 1, 2021: 3, 2020: 2, 2019: 1Per-year citation counts (last 5 years)
- References (count)
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47Number of works referenced by this work
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10Other works algorithmically related by OpenAlex
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| abstract_inverted_index.steps | 165 |
| abstract_inverted_index.tests | 34 |
| abstract_inverted_index.their | 30 |
| abstract_inverted_index.total | 72 |
| abstract_inverted_index.wear, | 7 |
| abstract_inverted_index.(DLC)] | 100 |
| abstract_inverted_index.(MEMS) | 16 |
| abstract_inverted_index.atomic | 23 |
| abstract_inverted_index.carbon | 99 |
| abstract_inverted_index.linear | 63 |
| abstract_inverted_index.motion | 65 |
| abstract_inverted_index.tested | 28 |
| abstract_inverted_index.toward | 166 |
| abstract_inverted_index.TiAlCN, | 96 |
| abstract_inverted_index.against | 42, 66 |
| abstract_inverted_index.carried | 36 |
| abstract_inverted_index.coating | 168 |
| abstract_inverted_index.contact | 112 |
| abstract_inverted_index.elastic | 124 |
| abstract_inverted_index.nitride | 135 |
| abstract_inverted_index.results | 160 |
| abstract_inverted_index.silicon | 39 |
| abstract_inverted_index.sliding | 41, 60, 73 |
| abstract_inverted_index.addition | 91 |
| abstract_inverted_index.coating. | 158 |
| abstract_inverted_index.coatings | 83, 136 |
| abstract_inverted_index.contacts | 51 |
| abstract_inverted_index.devices. | 17, 56 |
| abstract_inverted_index.dominate | 9 |
| abstract_inverted_index.friction | 119, 141, 151 |
| abstract_inverted_index.improved | 167 |
| abstract_inverted_index.measured | 154 |
| abstract_inverted_index.modulus, | 125 |
| abstract_inverted_index.simulate | 49 |
| abstract_inverted_index.uncoated | 103 |
| abstract_inverted_index.Hardness, | 123 |
| abstract_inverted_index.adhesion, | 4 |
| abstract_inverted_index.coatings, | 101, 148 |
| abstract_inverted_index.different | 85 |
| abstract_inverted_index.distances | 74 |
| abstract_inverted_index.favorable | 140 |
| abstract_inverted_index.formation | 106 |
| abstract_inverted_index.friction, | 5 |
| abstract_inverted_index.materials | 130 |
| abstract_inverted_index.occurring | 52 |
| abstract_inverted_index.solutions | 169 |
| abstract_inverted_index.deposition | 25, 86 |
| abstract_inverted_index.dominating | 116 |
| abstract_inverted_index.phenomena, | 1 |
| abstract_inverted_index.phenomenon | 117 |
| abstract_inverted_index.tribolayer | 109 |
| abstract_inverted_index.Interfacial | 0 |
| abstract_inverted_index.coefficient | 152 |
| abstract_inverted_index.counterpart | 40, 58 |
| abstract_inverted_index.performance | 11, 144 |
| abstract_inverted_index.properties. | 32 |
| abstract_inverted_index.reliability | 13 |
| abstract_inverted_index.Tribological | 33 |
| abstract_inverted_index.[diamondlike | 98 |
| abstract_inverted_index.investigated | 89 |
| abstract_inverted_index.performance. | 122 |
| abstract_inverted_index.temperatures | 87 |
| abstract_inverted_index.tribological | 31 |
| abstract_inverted_index.applications. | 173 |
| abstract_inverted_index.crystallinity | 127 |
| abstract_inverted_index.investigated. | 133 |
| abstract_inverted_index.reciprocating | 64 |
| abstract_inverted_index.microelectromechanical | 15 |
| abstract_inverted_index.Al2O3-TiO2-nanolaminate, | 93 |
| cited_by_percentile_year.max | 97 |
| cited_by_percentile_year.min | 89 |
| countries_distinct_count | 1 |
| institutions_distinct_count | 15 |
| citation_normalized_percentile.value | 0.73488372 |
| citation_normalized_percentile.is_in_top_1_percent | False |
| citation_normalized_percentile.is_in_top_10_percent | False |