Wafer-scale characterization for two-dimensional material layers Article Swipe
Alain Moussa
,
Janusz Bogdanowicz
,
Benjamin Groven
,
P. Morin
,
Matteo Beggiato
,
M. Saïb
,
G. Santoro
,
Yaniv Abramovitz
,
Kevin Houchens
,
Shmuel Ben Nissim
,
Noga Meir
,
J. Hung
,
Adam Urbanowicz
,
Roy Koret
,
Igor Turovets
,
Bongmook Lee
,
W.T. Lee
,
Gian F. Lorusso
,
A.-L. Charley
·
YOU?
·
· 2024
· Open Access
·
· DOI: https://doi.org/10.35848/1347-4065/ad26bc
YOU?
·
· 2024
· Open Access
·
· DOI: https://doi.org/10.35848/1347-4065/ad26bc
Logic devices based on two-dimensional (2D) channel materials require highly crystalline monolayers. Despite various laboratory-scale metrology techniques being intensively used to characterize 2D materials on small coupons, the development of in-line and routine characterization of 2D material monolayers grown on 300 mm wafers remains in its early stages. In this work, we evaluate and combine different in-line metrologies to characterize the thickness and morphology of tungsten disulfide (WS 2 ) monolayers at the 300 mm wafer level. By combining complementary metrology techniques, we reveal the morphology of WS 2 , the WS 2 layer thickness and within-wafer uniformity for different WS 2 deposition conditions across 300 mm wafers.
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Metadata
- Type
- article
- Language
- en
- Landing Page
- https://doi.org/10.35848/1347-4065/ad26bc
- https://iopscience.iop.org/article/10.35848/1347-4065/ad26bc/pdf
- OA Status
- bronze
- Cited By
- 1
- References
- 27
- Related Works
- 10
- OpenAlex ID
- https://openalex.org/W4391579710
All OpenAlex metadata
Raw OpenAlex JSON
- OpenAlex ID
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https://openalex.org/W4391579710Canonical identifier for this work in OpenAlex
- DOI
-
https://doi.org/10.35848/1347-4065/ad26bcDigital Object Identifier
- Title
-
Wafer-scale characterization for two-dimensional material layersWork title
- Type
-
articleOpenAlex work type
- Language
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enPrimary language
- Publication year
-
2024Year of publication
- Publication date
-
2024-02-06Full publication date if available
- Authors
-
Alain Moussa, Janusz Bogdanowicz, Benjamin Groven, P. Morin, Matteo Beggiato, M. Saïb, G. Santoro, Yaniv Abramovitz, Kevin Houchens, Shmuel Ben Nissim, Noga Meir, J. Hung, Adam Urbanowicz, Roy Koret, Igor Turovets, Bongmook Lee, W.T. Lee, Gian F. Lorusso, A.-L. CharleyList of authors in order
- Landing page
-
https://doi.org/10.35848/1347-4065/ad26bcPublisher landing page
- PDF URL
-
https://iopscience.iop.org/article/10.35848/1347-4065/ad26bc/pdfDirect link to full text PDF
- Open access
-
YesWhether a free full text is available
- OA status
-
bronzeOpen access status per OpenAlex
- OA URL
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https://iopscience.iop.org/article/10.35848/1347-4065/ad26bc/pdfDirect OA link when available
- Concepts
-
Wafer, Monolayer, Metrology, Materials science, Characterization (materials science), Tungsten disulfide, Deposition (geology), Nanotechnology, Tungsten, Layer (electronics), Optoelectronics, Composite material, Optics, Metallurgy, Geology, Physics, Paleontology, SedimentTop concepts (fields/topics) attached by OpenAlex
- Cited by
-
1Total citation count in OpenAlex
- Citations by year (recent)
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2025: 1Per-year citation counts (last 5 years)
- References (count)
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27Number of works referenced by this work
- Related works (count)
-
10Other works algorithmically related by OpenAlex
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