W‐Band High‐Efficiency Waveguide Slot Array Antenna with Low Sidelobe Levels Based on Silicon Micromachining Technology Article Swipe

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Shisen YAO , Yu Jian Cheng , Hang Bai , Yong Fan ·

YOU? · · 2022 · Open Access · · DOI: https://doi.org/10.1049/cje.2020.00.315

A high-efficiency waveguide slot array antenna with low sidelobe level (SLL) is investigated for W-band applications. The silicon micromachining technology is utilized to realize multilayer antenna architecture by three key steps of selective etching, gold plating and Au-Au bonding. The radiating slot based on this technique becomes thick with a minimum thickness of 0.2 mm and accompanies with the decrease of slot's radiation ability. To overcome this weakness, a stepped radiation cavity is loaded on the slot. The characteristic of cavity-loaded slot is investigated to synthesize the low-SLL array antenna. The unequal hybrid corporate feeding network is constructed to achieve sidelobe suppression in the E-plane. A pair of 16 × 8 low-SLL and high-effciency slot arrays is fashioned and confirmed experimentally. The bandwidth with the radiation effciency higher than 80% is 92.3–96.3 GHz. The SLLs in both E- and H-planes are below −19 dB.

Related Topics

Materials Science

Optoelectronics

Etching (Microfabrication)

Semiconductor Device Fabrication

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Materials science Surface micromachining Slot antenna Optoelectronics Antenna efficiency Etching (microfabrication) Silicon Bandwidth (computing) Antenna (radio) Bulk micromachining Radiation pattern Radiation Optics Fabrication Computer science Telecommunications Physics Layer (electronics) Nanotechnology Medicine Pathology Alternative medicine

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Type: article
Language: en
Landing Page: https://doi.org/10.1049/cje.2020.00.315
PDF: https://onlinelibrary.wiley.com/doi/pdfdirect/10.1049/cje.2020.00.315
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Cited By: 6
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DOI: https://doi.org/10.1049/cje.2020.00.315

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Title: W‐Band High‐Efficiency Waveguide Slot Array Antenna with Low Sidelobe Levels Based on Silicon Micromachining Technology

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Language: en

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Publication year: 2022

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Authors: Shisen YAO, Yu Jian Cheng, Hang Bai, Yong Fan

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Landing page: https://doi.org/10.1049/cje.2020.00.315

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Concepts: Materials science, Surface micromachining, Slot antenna, Optoelectronics, Antenna efficiency, Etching (microfabrication), Silicon, Bandwidth (computing), Antenna (radio), Bulk micromachining, Radiation pattern, Radiation, Optics, Fabrication, Computer science, Telecommunications, Physics, Layer (electronics), Nanotechnology, Medicine, Pathology, Alternative medicine

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Cited by: 6

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